• 한국표면공학회지
• /
• 제38권4호
• /
• pp.156-162
• /
• 2005

Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electro-plating for MEMS devices. The iron content of the deposits was changed by varying the nickel/iron ion ratio in the electrolyte. X-ray diffraction (XRD) analysis was applied for measuring the strength of the texture and grain size of the deposits. The nickel/iron atom ratio of the deposits was analyzed by EDS. The hardness of the alloys was evaluated by Vickers hardness indenter. The internal stress of the deposits was measured by Thin Film Stress Measurement using Stoney's formula. Surface morphology and roughness were investigated by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The results of this study revealed that at a grain size of approximately $17\~24$nm the hardness, internal stress and roughness depend strongly on the iron content. With increasing the iron content, the hardness and internal stress of the deposits increased. An excellent correlation between the increase in the internal stress and the loss of (200) texture was found.

• Composites Research
• /
• 제24권3호
• /
• pp.17-24
• /
• 2011

Ag/Cu층에서 발생하는 misfit 전위를 분석하기 위하여, EAM기법을 활용한 나노인덴테이션 해석을 수행하였다. N$\'{o}$se-Hoover 서모스텟 조건에 의거하여, 2-5nm 정도의 두께를 갖는 필름층에 구형 인덴터로 압입하였다. 해석결과는 misfit 전위에 대한 상대적인 압입위치가, 4nm이하의 필름에 대하여 영향을 미치는 것으로 나타났다. 전위에 의한 슬립 발생할 때 탄성에너지 변화는 Ag/Cu의 연화의 중요한 변수로 작용하며, 각각의 경우에 대하여 임계필름두께에 대해서도 고찰하였다.

• 한국정밀공학회지
• /
• 제27권12호
• /
• pp.28-32
• /
• 2010

Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

• Tribology and Lubricants
• /
• 제25권3호
• /
• pp.163-170
• /
• 2009

We developed a compact micro indentation testing device (designated SNUT) which is capable to measure Young's modulus of a sample using depth and applied load data during indentation. Performance of this device was evaluated using pure Ti, pure Ni, and die steel (SKD11). As a result of analysing the indentation test data, the frame compliance $C_f$ was found to influence mainly the modulus by 80% among several factors affecting accuracy of Young's modulus. Project area, which was determined by indirect indentation method, was modified using direct SEM observation. Finally, Young's modulus error was reduced to 5% after taking into consideration the frame compliance and modified projected area from 80% error without any these two correction factors. The performance of SNUT and MTS instruments was compared using same specimen (pure Ti).

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2004년도 추계학술대회논문집
• /
• pp.40-43
• /
• 2004

Stamps for microcontact processing are fabricated by casting elastomer such as PDMS on a master with a negative of the desired pattern. After curing, the PDMS stamp is peeled away from the master and exposed to a solution of ink and then dried. Transfer of the ink from the PDMS stamp to the substrate occurs during a brief contact between stamp and substrate. Generally, negative-tone masters, which are used for making positive-tone PDMS stamps, are fabricated by using photolithographic technique. The shortcomings of photolithography are a relative high-cost process and require extensive processing time and heavy capital investment to build and maintain the fabrication facilities. The goal of this study is to fabricate a negative-tone master by using Nano-indenter based patterning technique. Various sizes of V-grooves and U-groove were fabricated by using the combination of nanoscratch and HF isotropic etching technique. An achieved negative-tone structure was used as a master in the PDMS replica molding process to fabricate a positive-tone PDMS stamp.

• 소성∙가공
• /
• 제15권3호
• /
• pp.213-219
• /
• 2006

To improve the strength of glass is being studied in order to contribute to weight saving of flat panel displays. Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness by the formation of a heterogeneous phase inside glass. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5\;and\;70SiO_2-10CaO-24Na_2O-10TiO_2$ glasses were irradiated to strengthen by crystallization using femto-second laser pulse. XRD, Nano-indenter and SEM etc., irradiation of laser pulse without heat-treated samples was analyzed. Samples irradiated by laser had higher value($4.4{\sim}4.56^*10-3Pa$) of elastic modulus which related with strength of glass than values heat-treated samples and these are $1.2{\sim}1.5$ times higher values than them of mother glass. This process can be applicable to the strengthening of thinner glass plate, and it has an advantage over traditional heat-treatment and ion-exchange method.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2005년도 추계학술대회 논문집
• /
• pp.171-174
• /
• 2005

To improve the strength of glass is being studied in order to contribute to weight saving of flat panel displays. Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness by the formation of a heterogeneous Phase inside glass. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by crystallization using femto-second laser pulse. UV/VIS, Spectroscope, XRD, nano-indenter and SEM etc. irradiation of laser pulse without heat-treated samples was analyzed. Samples irradiated by laser had higher value$(4.4\~4.56{\ast}10-3Pa)$ of elastic modulus which related with strength of glass than values heat-treated samples and these are $1.2\~1.5$ times higher values than them of mother glass. This process can be applicable to the strengthening of thinner glass plate, and it has an advantage over traditional heat-treatment and ion-exchange method.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.173-173
• /
• 2011

반도체 집적도의 비약적인 발전으로 복잡하고 다양한 공정이 연구되었고 공정 중 박막에서 발생되는 물리적, 화학적 반응들에 대한 연구 필요성이 대두 되었다. 박막은 다양한 공정 환경에서 박막의 특성을 잃지 않고 물성을 유지하여야 한다. 특히 공정상의 고온 환경에서 박막은 안정해야하며 물리적손상이 있어서는 안 된다. 이 논문에서는 반도체의 기판으로 사용되는 Si기판과 금속배선 물질인 Cu와의 확산을 효과적으로 방지하기 위한 W-C-N 확산방지막을 제시하였고 시료 증착을 위하여 rf magnetron sputter를 사용하여 동일한 증착조건에서 질소(N)의 비율을 다르게 하여 박막 내 질소비율(0 sccm, 2 sccm)에 따른 확산방지막을 제작하였다. 이후 시료의 열적 안정성 측정을 위하여 상온, 600도, 800도로 각각 질소 분위기에서 30분간 열처리 과정을 실시하여 열적 손상을 인가하였다. 이후 Nanoindentation기법을 이용하여 총 16 point 측정을 하였다. 이를 Weibull distribution으로 분석하여 정량화 시켜 박막의 균일도와 신뢰도를 연구하였다. 또 WET-SPM을 이용하여 AFM 표면 이미지를 확인하였다. 그 결과 고온에서 박막이 Compressive stress를 받아 박막이 일어남을 확인 하였다. 이는 질화물질이 고온에서 물성변화가 적게 나타나는 것을 알 수 있었고, 균일도와 결정성 또한 질화물질에서 더 안정적이었다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.172-172
• /
• 2011

현대 반도체 금속배선 연구에서는 기존에 쓰이던 Al (Aluminium) 금속배선 대신에 Cu(Copper) 금속배선 연구가 진행 되고 있다. Cu는 Al 보다 비저항이 낮고, 녹는점도 Al보다 높다는 장점이 있지만 저온에서 기판인 Si (Silicon) 과 반응하고 접착력이 우수하지 못 하다는 단점이 있다. 이런 문제를 해결하기 위하여 확산방지막을 기판과 금속배선 사이에 삽입하는 방법이 제시 되었다. 확산방지막으로는 기존에 쓰이던 Ti (Titanium) 계열의 확산방지막과 W (Tungsten) 계열의 확산방지막이 있다. 이번 연구에서는 W 계열의 확산방지막에 불순물 C (Carbon), N(Nitrogen)을 첨가한 W-C-N 확산방지막 시편을 제조하였고, N2의 비율을 변화시키며 $600^{\circ}C$ 열처리를 하였다. 실험 결과 질소의 포함 농도에 따라 확산방지막의 안정도가 변화한다는 결과를 얻었으며, 질소 첨가량에 따라 시편의 표면 보다는 시편의 중간층의 물성 변화율이 큰데 이는 시편 표면의 질소는 열처리 중 확산에 의한 시편과의 분리 현상이 일어나지만 시편의 중간층은 trap현상에 의하여 시편에 남아있어 질소의 영향을 받아 시편의 중간층이 더욱 질소 유량에 따른 영향이 큰 것을 확인하였다. 이 결과로부터 W-C-N 박막은 첨가된 질소의 유량에 따라 박막의 안정도가 결정된 다는 것을 알았다. 본 연구에서 시편은 rf magnetron sputtering 방법으로 제작하였고 연속압입 실험은 Hysitron사의 Triboindenter를 이용하였다. Indenting에 사용된 압입팁은 Berkovich tip을 사용하였다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.54-54
• /
• 2011

The demand for low-friction, wear and corrosion resistant components, which operate under severe conditions, has directed attentions to advanced surface engineering technologies. The Filtered Vacuum Arc Cathode Deposition (FVACD) process has demonstrated atomically smooth surface at relatively high deposition rates over large surface areas. Preparation of Ti-Si-C-N nanocomposite coatings on (100) Si and stainless steel substrates with tetramethylsilane (TMS) gas pressures to optimize the film preparation conditions. Ti-S-C-N coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The XRD results have confirmed phase formation information of TiSiCN coatings, which shows mixing of TiN and TiC structure, corresponding to (111), (200) and (220) planes of TiCN. The chemical composition of the film was investigated by XPS core level spectra. The binding energy of the elements present in the films was estimated using XPS measurements and it shows present of elemental information corresponding to Ti2p, N1s, Si 2p and C1. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.