• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.37-41
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• 2007

Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.151-158
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• 2005

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was $0.05{\mu}m$ and position accuracy less than $2{\mu}m$ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many fuming experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.494-497
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• 2003

A rotating device driven by an Inchworm motor was designed and fabricated to be used as an angie standard system. 1. PZT was adopted as a driving source, while the movement of PZT was guided by the leaf spring employing the elastic transformation of metals. 2. The device could rotate in a 360-degree arc. continuously Performance test of the device showed about 0.02 sec. of the minimum revolution angle and 1/15 rpm of the maimum revolution speed. 3. To improve its performance requires further studies on realizing a shifting device with faster response time, on increasing the output current (capacity) of the power amplifier used to drive PZT, on the dynamic motion of clamping. and on determining the optimum clamping condition