• Title/Summary/Keyword: In-su

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SU-8 Mold Fabrication with Low Internal Stress and High Aspect Ratio for UV LIGA Process (고 형상비 UV LIGA 공정을 위한 낮은 내부응력의 SU-8 도금틀 제작)

  • Jang, Hyeon-Gi;Kim, Yong-Gwon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.8
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    • pp.598-604
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    • 1999
  • This paper describes the research to minimize the film stress and maximize the aspect ratio of photoresist structure, especially about SU-8 for electroplating mold. UV LIGA process using SU-8 allows fabricating high aspect ratio polymer structures. However, it is hard to get fine patterns in the high aspect ratio structures because of high internal stress and difficulty of removing SU-8. The purpose of this paper is to setup the process condition for the obtainment of both low film stress and high aspect ratio and to find design rules that make the pattern be less dependent on stress problem. Firstly, the process of heat treatment and exposure of SU-8 are proposed. These two conditions control the amount of cross-linkage in polymer structure, which is the most important parameter of both pattern generation and remaining stress. Heat treatment is dealed with soft bake and post-exposure-bake. Temperature and time duration of each step are varied with heat treatment condition. Some test patterns are fabricated to evaluate the proposed process. Nickel electroplating is performed with the mold fabricated through the proposed process to confirm the SU-8 as a good electroplating mold.

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Simulation of Run-out caused by Imperfection of Ball Bearing for High-speed Spindle Units

  • Zverev Igor Aexeevich;Eun In-Ung;Chung Won-Jee;Lee Choon-Man
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.3
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    • pp.3-7
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    • 2006
  • For the purpose to improve and to automate designing of high-speed spindle units (SU's), we have developed the mathematical models and software to estimate SU performance characteristics, including the run-out of spindles running on ball bearings. In order to understand better the mechanics of high-speed SUs, the dynamic interaction of ball bearings and SU, and the influence of the bearing imperfections and SU's operational conditions on the run-out, we have carried out computer simulation and experimental studies. Through the study of SU's, we have found out that run-out of SU can vary drastically with variation of rpm. The influences of rotation speed and of accuracy parameters of bearings on the SU accuracy have the greatest importance. The influence of bearing preload has a secondary importance. Comparison of the results of these studies has demonstrated adequacy of the models and software developed to the real SU's.

A STUDY ON GO-HWANG(膏盲) AND GO-HWANG-SU(膏盲兪) (고맹(膏盲)과 고맹유(膏盲兪)에 관(關)한 문헌적(文獻的) 고찰(考察))

  • So, Jae-jin;Lee, Yun-ho;Kim, Chang-hwan
    • Journal of Acupuncture Research
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    • v.20 no.5
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    • pp.28-37
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    • 2003
  • Objective & Methods: In order to ascertain the names. locations. the way of getting acu-point and indications for moxibustion about Ko-Hwang(膏盲) and Go-Hwang-Su(膏盲兪). I have translated the text for Ko-Hwang(膏盲) and Go-Hwang-Su(膏盲兪) collected in several relative classical books. and performed literal investigation about it. Through the study, the following results are obtained. Results & Conclusions: 1. The two words Go(膏) and Hwang(盲) have different concepts each other originally. and Go-Hwang(膏盲) is the abbreviation of the words "Upon the Hwang(盲), Under the Go(膏)", which means "A gap of Heart and diaphragm" that is under the heart and on the diaphragm 2. Go-Hwang-Su(膏盲兪) is the acu-point which can treat the diseases located in the gap of Go(膏) and Hwang(盲), so they must not be named as Go-Hwang(膏盲) or Go-Hwang-Hyui(膏盲穴). 3. The origination of Go-Hwang-Su(膏盲兪) is speculated as the interval of Hwang-Bo-Mil(皇甫謐) and Son-Sa-Mak(孫思邈). And I think it had been created by Son-Sa-Mak(孫思邈) up to now. 4. The words "Four ribs and Three spaces(四肋三間)" those are founded in the text of The Entrance of Medicine(醫學入門) and The Great Success on Acupuncture and Moxibustion(針灸大成) are either the words those had been quoted from The Bible of Helping Life by Acupucture and Moxibustion(針灸資生經) in wrong way. or the misunderstanding of the original mind of Son-Sa-Mak(孫思邈) as being quoted in the text. So you should know it exactly as Son-Sa-Mak(孫思邈) had said. 5. When you search the acu-point Go-Hwang-Su(膏盲兪), you must pull the arms of patients forwardly to reveal the acu -point. because it is covered by the scapula in normal posture. 6. The indications for the use of Go-Hwang-Su(膏盲兪) are same as mentioned in this study. And it can grow the Yang-Gi(陽氣) more prosperous.

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Characterization of Photoresist Processing by Statistical Design of Experiment (DOE)

  • Kim, Gwang-Beom;Park, Jae-Hyun;Soh, Dae-Wha;Hong, Sang-Jeen
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.43-44
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    • 2005
  • SU-8 is a epoxy based photoresist designed for MEMS applications, where a thick, chemically and thermally stable image is desired. But SU-8 has proven to be very sensitive to variation in processing variables and hence difficult to use in the fabrication of useful structures. In this paper, negative SU-8 photoresist processed has been characterized in terms of delamination. Based on a full factorial designed experiment. Employing the design of experiment (DOE), a process parameter is established, and analyzing of full factional design is generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.

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Characterization of Negative Photoresist Processing by Statistical Design of Experiment (DOE)

  • Mun Sei-Young;Kim Gwang-Beom;Soh Dea-Wha;Hong Sang Jeen
    • Journal of information and communication convergence engineering
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    • v.3 no.4
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    • pp.191-194
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    • 2005
  • SU-8 is a epoxy based photoresist designed for MEMS applications, where a thick, chemically and thermally stable image are desired. However SU-8 has proven to be very sensitive to variation in processing variables and hence difficult to use in the fabrication of useful structures. In this paper, negative SU-8 photoresist processed has been characterized in terms of delamination, based on a full factorial designed experiment. Employing the design of experiment (DOE), a process parameter is established, and analyzing of full factorial design is generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.

The effects on the thermal changes of an acupuncture point area with the Young-Su-Bo-Sa(迎隨補瀉)-Acupuncture stimulation (영수보사(迎隨補瀉) 침자극(鍼刺戟)이 경혈영역(經穴領域)의 온도변화(溫度變化)에 미치는 영향(影響))

  • Lee, Seung-woo;Lee, Jeoung-hoon;Song, Beom-Yong;Yook, Tae-han
    • Journal of Acupuncture Research
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    • v.18 no.2
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    • pp.161-174
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    • 2001
  • Purpose : This study is to see the existence of the meridian and the meridian point through their response to the Young-Su-Bo-Sa. Objective and Methods : For this purpose, with acupuncture stimulation with Young-Su-Bo-Sa on the Hapkok of left hand and an the non-meridian point, and using the Digital infrared thermal image(D.I.T.I), We observed and analyzed the thermal changes of Hapkok, Samgan, non-meridian point(NA), Yonghyang, Soryo, Chonchu, Shingwol. Results and Conclusions : To sum up, We could understand Young-Su-Bo-Sa stimulation through the study findings that the acupuncture stimulation on the meridian point caused significant thermal changes of the associated meridian and meridian point, and Young-Su-Bo stimulation given in the direction of the meridian passage caused increases in the thermal changes of the associated meridian point, while Young-Su-Sa stimulation caused decreases in the thermal changes of the associated meridian point.

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A Study on the Name of Ho-su(好袖) of Chosun Period (朝鮮時代의 胡袖)

  • 김진구
    • The Research Journal of the Costume Culture
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    • v.7 no.3
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    • pp.22-34
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    • 1999
  • The purpose of this study was to trace and identify the origin and the meanings of the word ho-su(胡袖) of Chosun dynasty period. Findings of this study can be summerized as follows : The original meaning of the word ho-su(胡袖) is a name of round sleeves. Later it was used as a name of a dress with round sleeves. The word ho-su as a name of a dress is an abbrecviated form of ho su so o za(好袖小 子) of a previous period. The word jyo go ri(赤古里) in historical documents is anothor name of so o za(小 子). Wearing the ho-su(胡袖) was restricted to royal family women. It was included in royal women\`s wedding garments as ordinary use. Colors of this dress was used as a means of differentiating the rank and position of the wearer.

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Effect of Boiling Methods on the Physicochemical Properties of Su Ri Chwi (Synurus palmatopinnonatifidus var. indivisus KiTAM) Pectin (삶는방법이 수리취(Synurus palmatopinnonatifidus var. indivisus KiTAM.) 펙틴의 이화학적 특성에 미치는 영향)

  • 김명희;박용곤;장명숙
    • Korean journal of food and cookery science
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    • v.9 no.1
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    • pp.19-24
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    • 1993
  • The purpose of this study was to investigate the physicochemical properties of Su Ri Chwi (Synurus Palmatopinnonatifidus var. indivisus KiTAM.) cooked in different solution (distilled water, 1%, salt and 1% sodium bicarbonate added water) and time. The content of crude fiber showed the highest percentage among the alcohol-insoluble solids of cooked Su Ri Chwi. The contents of Ca and Mg were decreased by the addition of 1% sodium bicarbonate. The main neutral sugars of alcohol insoluble solids were arabinose, galactose, and glucose. The content of glucose was increased regardless of method used. The main neutral sugars of crude pectins were rhamnose, arabinose and glucose. Galactose was increased by the cooking. The gel chromatography on Sepharose CL-4B indicated that the pectin extracted from cooked Su Ri Chwi had lower molecular weight distribution than that of the raw Su Ri Chwi. Total pectin was decreased by the cooking method used. The amounts of soluble pectins of Su Ri Chwi cooked in 1% sodium bicarbonate added water were lower than those of raw material.

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SU/PG Model Evaluation for river dynamics (자연하천 해석을 위한 SU/PG 모형의 개발)

  • Han, Kun Yeun;Park, Kyung Ok;Baek, Chang Hyun
    • Proceedings of the Korea Water Resources Association Conference
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    • 2004.05b
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    • pp.1331-1334
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    • 2004
  • Wet/Dry phenomena typically incorporate a number of complex flow mechanism. These include a momentum transfer and turbulent mixing caused by the delivery of water. However currently available one dimensional schemes applicable to wet/dry process cannot effectively simulate such process. Two dimensional finite element model, SU/PG, is used to simulate complex flow in this study. The Wetted Area Method in SU/PG allows elements to transition gradually between wet and dry states. The model is applicable to a straight river reach with irregular bathymetry. Wet/dry calculation using the wetted area method can simulate simple numerical test. The computed results of velocity vectors and water depth agree with those of observed. The methodology Presented in this study will contributed to two-dimensional wet/dry analysis in a river in this country.

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A Study on Status of Health Care for Community Residents in a Rural Health Subcenter - With special Reference to Organization and Man Power of Su Dong Myun Health Subcenter - (한 농촌보건지소에서의 보건관리 실태에 관한 고찰 -수동면 보건지소의 조직과 인력을 중심으로-)

  • Wie, Cha-Hyung
    • Journal of agricultural medicine and community health
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    • v.16 no.1
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    • pp.3-9
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    • 1991
  • In order to find out status of health care for community residents with special reference to organization and man power in a rural health subcenter, a study was carried out, through analyzing the data, operated by health subcenter during 1973~1990 in a rural area, Su Dong-Myun, Nam Yang Ju-Gun, Kyung Gi-Do, Korea. The following results were obtained : l) The Number of Population in Su Dong-Myun is decreasing and household is increasing chronologically. 2) In 1989, the characteristics of population composition rate in Su Dong-Myun were shown : the groups of Age, 65 and over was high rate(9.8%) and 0~4 was low rate(5.3%) decreasing chronologically. 3) Since 1972, services of Su Dong-Myun health subcenter have been carried in the 3 functions(medical treatment, health care management and clerical work) with supports of Ewha Woman's University through the participation of community residents organization. 4) The Number of Su Dong-Myun health subcenter personnel in 1990 was 5 persons(public health doctor l, public health dentist l, health worker l, dental technician l and assistant nurse l) and of these, health worker who must have the huge charge of health care management, has been worked at Myun-office as a public official, in condition, decreased from 3 in 1980 to 2 in 1981 and from 2 to 1 in 1985. 5) Health service Activities of Su Dong Myun health subcenter obtained good results in it's achievement during 1975-1985, but since 1986, it has been in condition of lower stepping. 6) Since 1977, annual medical utilization rate showed decreasing tendency such as 900 per l,000 population in 1977, 846 in 1979, 723 in 1981, 343 in 1973 and 34l in 1987. 7) A proposal : (l) Organization of health subcenter must be unified and systematized by government, so that health subcenter can carry out primary health care for community residents through responsibilities and authorities. (2) Teaching programs in educational process must be reorganized, according to periodical request. considering relative importance to primary health care in health care needs of community residents.

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