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Degradation from Polishing Damage in Ferroelectric Characteristics of BLT Capacitor Fabricated by Chemical Mechanical Polishing Process (화학적기계적연마 공정으로 제조한 BLT Capacitor의 Polishing Damage에 의한 강유전 특성 열화)

  • Na, Han-Yong;Park, Ju-Sun;Jung, Pan-Gum;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.236-236
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    • 2008
  • (Bi,La)$Ti_3O_{12}$(BLT) thin film is one of the most attractive materials for ferroelectric random access memory (FRAM) applications due to its some excellent properties such as high fatigue endurance, low processing temperature, and large remanent polarization [1-2]. The authors firstly investigated and reported the damascene process of chemical mechanical polishing (CMP) for BLT thin film capacitor on behalf of plasma etching process for fabrication of FRAM [3]. CMP process could prepare the BLT capacitors with the superior process efficiency to the plasma etching process without the well-known problems such as plasma damages and sloped sidewall, which was enough to apply to the fabrication of FRAM [2]. BLT-CMP characteristics showed the typical oxide-CMP characteristics which were related in both pressure and velocity according to Preston's equation and Hernandez's power law [2-4]. Good surface roughness was also obtained for the densification of multilevel memory structure by CMP process [3]. The well prepared BLT capacitors fabricated by CMP process should have the sufficient ferroelectric properties for FRAM; therefore, in this study the electrical properties of the BLT capacitor fabricated by CMP process were analyzed with the process parameters. Especially, the effects of CMP pressure, which had mainly affected the removal rate of BLT thin films [2], on the electrical properties were investigated. In order to check the influences of the pressure in eMP process on the ferroelectric properties of BLT thin films, the electrical test of the BLT capacitors was performed. The polarization-voltage (P-V) characteristics show a decreased the remanent polarization (Pr) value when CMP process was performed with the high pressure. The shape of the hysteresis loop is close to typical loop of BLT thin films in case of the specimen after CMP process with the pressures of 4.9 kPa; however, the shape of the hysteresis loop is not saturated due to high leakage current caused by structural and/or chemical damages in case of the specimen after CMP process with the pressures of 29.4 kPa. The leakage current density obtained with positive bias is one order lower than that with negative bias in case of 29.4 kPa, which was one or two order higher than in case of 4.9 kPa. The high pressure condition was not suitable for the damascene process of BLT thin films due to the defects in electrical properties although the better efficiency of process. by higher removal rate of BLT thin films was obtained with the high pressure of 29.4 kPa in the previous study [2].

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The Inhibitive Effect of Electrochemical Treatment Applied to Fresh/hardened Concrete (철근 부식 방식을 위한 굳지 않은/굳은 콘크리트의 전기방식 적용에 관한 연구)

  • Kim, Sung-Wook;Moon, Jae-Heum;Ann, Ki-Yong
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.17 no.5
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    • pp.67-76
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    • 2013
  • In this study, the inhibitive effect of electrochemical treatment subjected to fresh and hardened concrete and literature reviews in terms of the treatment were performed. In hardened concrete, chloride ions are mixed during casting to destroy the passivity of steel, and then the current was provided for 2 weeks with 250, 500 and $750mA/m^2$. After completion of electrochemical treatment, the extraction of chloride ions was quantified and repassivation of steel was observed. Simultaneously, the equated levels of current density for 2 weeks were applied to fresh concrete. Steel-concrete interface in concrete was observed by BSE image analysis and the concrete properties in terms of the diffusivity of chloride ions and the resistance of steel corrosion was measured. As the result, electrochemical treatment is very effectiveness to rehabilitate the passive film on the steel surface and 63-73% of chloride ions in concrete were extracted by the treatment. As the treatment was applied to fresh concrete, the resistance of steel corrosion was improved due to the densification of $Ca(OH)_2$ layers in the vicinity of steel. However, an increase in the current density resulted in an increase in surface chloride content of concrete.

Microstructural Analysis on $UO_2$ and $UO_2$-4wt% $CeO_2$ by Using Additives in Reducing and Oxidizing Atmospheres

  • Kim, Han-Soo;Kim, Si-Hyung;Lee, Young-Woo;Na, Sang-Ho
    • Nuclear Engineering and Technology
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    • v.28 no.5
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    • pp.458-466
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    • 1996
  • The effects of dopants on the modification of microstructure of UO$_2$ and UO$_2$-4wt%CeO$_2$ sintered pellets have been studied in hydrogen and $CO_2$/CO mixture atmospheres by using $Ta_2O_5$, TiO$_2$ and $Nb_2O_5$ as sintering additives. The dopant were added as oxide powders and homogenized by attrition milling. The mixed powders were pressed, and then sintered in hydrogen at 1$700^{\circ}C$ , or in oxidizing atmosphere using Controlled $CO_2$/CO mixtures at 125$0^{\circ}C$. Both density and microstructure of UO$_2$ are modified by the addition of dopants in reducing atmosphere. The sintered density is increased with $Ta_2O_5$ addition up to 0.33wt% and subsequently decreased with higher content of the additive. The effect on the densification and the gain growth are apparent with the addition of 0.24wt% $Nb_2O_5$. With 0.lwt% titania and 0.6wt% $Ta_2O_5$, the sintered density is decreased, but the grain size is increased. In oxidizing atmosphere, the grain sizes for UO$_2$ doped with the above additives are smaller than that for pure UO$_2$. The grain size of Ta or Nb-doped UO$_2$ is decreased with increasing $CO_2$/CO ratio, but that of pure UO$_2$or T-doped UO$_2$ is increased. A large portion of second phases is observed in UO$_2$ doped with 0.lwt% TiO$_2$ sintered in hydrogen atmosphere, while, in $CO_2$/CO atmospheres, the second phases or dopant agglomerates are not observed. For UO$_2$-4wt%CeO$_2$ mixed oxide, the effect of additives on the gain growth is not so much as that for the pure UO$_2$. This is attributed to the formation of clusters by dopant cations and Ce ions, so that the additives contribute to a lesser exent to the grain growth for the mixed oxide.

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A Study of Post Electrode Formation by Microwave Sintering in LTCC Substrate (마이크로파 소결법을 이용한 LTCC 기판 Post 전극 형성에 관한 연구)

  • Kim, Yong-Suk;Lee, Taek-Jung;Yoo, Won-Hee;Chang, Byeung-Gyu;Park, Sung-Yeol;Oh, Yong-Soo
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.4
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    • pp.43-48
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    • 2007
  • This study is focused on the effect of the surface properties for the post electrode, which is used in pad formation consisted of SMT such as IC, passive component, combined with fired LTCC substrate, We carried out the surface microstructure of sintered electrode and the basic reliability evaluations with sample fired by microwave sintering to solve the problems occurred in post electrode by electric sintering. We evaluated surface densification status of post electrode according to various conditions of microwave sintering. In additions, it is obtained strong effect on blister improvement of post electrode because of over-sintering and the insufficient out gas in bum out process. As a result of adhesion strength, we confirmed $44.3N/mm^2$ in microwave sintering and $34.5N/mm^2$ in electric sintering, respectively. This result will be used for the basic reliability test. Finally, microwave sintering seems to be economic in process time with 30 min compared to electric sintering with 10 hr. In terms of Mass production and efficiency, microwave sintering are excepted to be higher than electric sintering.

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Study of Oil Palm Biomass Resources (Part 3) - Torrefaction of Oil Palm Biomass - (오일팜 바이오매스의 자원화 연구 III - 오일팜 바이오매스의 반탄화 연구 -)

  • Cho, Hu-Seung;Sung, Yong Joo;Kim, Chul-Hwan;Lee, Gyeong-Seon;Yim, Su-Jin;Nam, Hyeo-Gyeong;Lee, Ji-Young;Kim, Se-Bin
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.46 no.1
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    • pp.18-28
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    • 2014
  • Renewable Portfolio Standards(RPS) is a regulation that requires a renewable energy generated from eco-friendly energy sources such as biomass, wind, solar, and geothermal. The RPS mechanism generally is an obligatory policy that places on electricity supply companies to produce a designated fraction of their electricity from renewable energies. The domestic companies to supply electricity largely rely on wood pellets in order to implement the RPS in spite of undesirable situation of lack of wood resources in Korea. This means that the electricity supply companies in Korea must explore new biomass as an alternative to wood. Palm kernel shell (PKS) and empty fruit bunch (EFB) as oil palm wastes can be used as raw materials used for making pellets after their thermochemical treatment like torrefaction. Torrefaction is a pretreatment process which serves to improve the properties including heating value and energy densification of these oil palm wastes through a mild pyrolysis at temperature typically ranging between 200 and $300^{\circ}C$ in the absence of oxygen under atmospheric pressure. Torrefaction of oil palms wastes at above $200^{\circ}C$ contributed to the increase of fixed carbon with the decrease of volatile matters, leading to the improvement of their calorific values over 20.9 MJ/kg (=5,000 kcal/kg) up to 25.1 MJ/kg (=6,000 kcal/kg). In particular, EFB sensitively responded to torrefaction because of its physical properties like fiber bundles, compared to PKS and hardwood chips. In conclusion, torrefaction treatment of PKS and EFB can greatly contribute to the implement of RPS of the electricity supply companies in Korea through the increased co-firing biomass with coal.

Effect of Fiber Dispersion on Mechanical Strength of SiCf/SiC Composites (강화 섬유의 분산도가 SiCf/SiC 복합소재의 기계적 강도에 미치는 영향)

  • Ji Beom Choi;Soo-Hyun Kim;Seulhee Lee;In-Sub Han;Hyung-Joon Bang;Seyoung Kim;Young-Hoon Seong
    • Composites Research
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    • v.36 no.3
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    • pp.180-185
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    • 2023
  • This paper investigates the impact of fiber dispersion on the internal structure and mechanical strength of SiCf/SiC composites manufactured using spread SiC fibers. The fiber volume ratio of the specimen to which spread SiC fiber was applied decreased by 9%p compared to the non-spread specimen, and the resin slurry impregnated between the fibers more smoothly, resulting in minimal matrix porosity. In order to compare the fiber dispersion of each specimen, a method was proposed to quantify and evaluate the separation distance between fibers in composite materials. The results showed that the distance between fibers in the spread specimen increased by 2.23 ㎛ compared to the non-spread specimen, with a significant 42.6% increase in the distance between fiber surfaces. Furthermore, the 3pt bending test demonstrated a 49.3% higher flexural strength in the spread specimen, accompanied by a more uniform deviation in test data. These findings highlight the significant influence of SiC fiber dispersion on achieving uniform densification of the SiCf/SiC matrix and increasing mechanical strength.

Effect of In Situ YAG on Properties of the Pressureless-Sintered SiC-$ZrB_2$ Electroconductive Ceramic Composites (상압소결(常壓燒結)한 SiC-$ZrB_2$ 전도성(電導性) 복합체(複合體)의 특성(特性)에 미치는 In Situ YAG의 영향(影響))

  • Shin, Yong-Deok;Ju, Jin-Young;Ko, Tae-Hun;Lee, Jung-Hoon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.11
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    • pp.2015-2022
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    • 2008
  • The effect of content of $Al_2O_3+Y_2O_3$ sintering additives on the densification behavior, mechanical and electrical properties of the pressureless-sintered $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressurless-sintered for 2 hours at 1,700[$^{\circ}C$] temperatures with an addition of $Al_2O_3+Y_2O_3$(6 : 4 mixture of $Al_2O_3$ and $Y_2O_3$) as a sintering aid in the range of $8\;{\sim}\;20$[wt%]. Phase analysis of $SiC-ZrB_2$ composites by XRD revealed mostly of $\alpha$-SiC(6H), $ZrB_2$ and In Situ YAG($Al_5Y_3O_{12}$). The relative density, flexural strength, Young's modulus and vicker's hardness showed the highest value of 89.02[%], 81.58[MPa], 31.44[GPa] and 1.34[GPa] for $SiC-ZrB_2$ composites added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at room temperature respectively. Abnormal grain growth takes place during phase transformation from $\beta$-SiC into $\alpha$-SiC was correlated with In Situ YAG phase by reaction between $Al_2O_3$ and $Y_2O_3$ additive during sintering. The electrical resistivity showed the lowest value of $3.l4{\times}10^{-2}{\Omega}{\cdot}cm$ for $SiC-ZrB_2$ composite added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at 700[$^{\circ}C$]. The electrical resistivity of the $SiC-TiB_2$ and $SiC-ZrB_2$ composite was all negative temperature coefficient resistance (NTCR) in the temperature ranges from room temperature to 700[$^{\circ}C$]. Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites.

Exploring Physical Environments, Demographic and Socioeconomic Characteristics of Urban Heat Island Effect Areas in Seoul, Korea (서울시 도시열섬현상 지역의 물리적 환경과 인구 및 사회경제적 특성 탐색)

  • Cho, Hyemin;Ha, Jaehyun;Lee, Sugie
    • Journal of the Korean Regional Science Association
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    • v.35 no.4
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    • pp.61-73
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    • 2019
  • Urban development and densification have led to the Urban Heat Island Effect, in which the temperature of urban space is higher than the surrounding areas, and the intensity is increasing with climate change. In addition, when the city's air temperature rises in summer, low-income, elderly population, and socially vulnerable people who have health problems lack the ability to cope with the elevated heat environment. Therefore, this study aimed to identify the urban heat island area of Seoul through Hotspot analysis, which is a spatial statistics technique, and explored physical environments, demographic and socioeconomic characteristics of urban heat island effect areas using logistic regression models. This study performed urban heat island hotspot analysis using the average air temperatures of the 423 administrative dongs in Seoul. Analysis results identified that the urban heat islands were concentrated in Jung-gu, Jongno-gu, Yongsan-gu, and Yeongdeungpo-gu. Logistic regression analysis results indicated that urban heat island areas of Seoul were affected by residential floor area ratio, commercial facility floor area ratio, overall floor area ratio, impervious surface ratio, and normalized difference vegetation index(NDVI). In addition, as a result of analyzing the vulnerable area of thermal environment considering the demographic and socioeconomic characteristics of the heat island area, urban heat island areas of Seoul were significantly associated with the proportion of low-income elderly living alone. The result of this study provided useful insights for urban thermal environmental design and policy development that could improve the thermal environment for the socially disadvantaged urban population.

Effect of Annealing Temperature on Microstructure and Properties of the Pressureless-Sintered $SiC-ZrB_2$ Electroconductive Ceramic Composites (상압소결(常壓燒結)한 $SiC-ZrB_2$ 전도성(電導性) 복합체(複合體)의 미세구조(微細構造)와 특성(特性)에 미치는 Annealing 온도(溫度)의 영향(影響))

  • Shin, Yong-Deok;Ju, Jin-Young
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.9
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    • pp.434-441
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    • 2006
  • The effect of pressureless-sintered temperature on the densification behavior, mechanical and electrical properties of the $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressureless-sintered for 2 hours at temperatures in the range of $1,750{\sim}1,900[^{\circ}C]$, with an addition of 12[wt%] of $Al_2O_3+Y_2O_3$(6:4 mixture of $Al_2O_3\;and\;Y_2O_3$) as a sintering aid. The relative density and mechanical properties are increased markedly at temperatures in the range of $1,850{\sim}1,900[{^\circ}C]$. The relative density, flexural strength, vicker's hardness and fracture toughness showed the highest value of 81.1[%], 230[MPa], 9.88[GPa] and $6.05[MPa\;m^{1/2}]$ for $SiC-ZrB_2$ composites of $1,900[{^\circ}C]$ sintering temperature at room temperature respectively. The electrical resistivity was measured by the Pauw method in the temperature ranges from $25[{^\circ}C]\;to\;700[{^\circ}C]$, The electrical resistivity showed the value of $1.36{\times}10^{-4},\;3.83{\times}10^{-4},\;3.51{\times}10^{-4}\;and\; 3.2{\times}10^{-4}[{\Omega}{\cdot}cm]$ for SZ1750, SZ1800, SZ1850 and SZ1900 respectively at room temperature. The electrical resistivity of the composites was all PTCR(Positive Temperature Coefficient Resistivity). The resistance temperature coefficient showed the value of $4.194{\times}10^{-3},\;3,740{\times}10^{-3},\;2,993{\times}10^{-3},\;3,472{\times}10^{-3}/[^{\circ}C}$ for SZ1750, SZ1800, SZ1850 and SZ1900 respectively in the temperature ranges from $25[{\circ}C]\;to\;700[{\circ}C]$, It is assumed that because polycrystallines such as recrystallized $SiC-ZrB_2$ electroconductive ceramic composites, contain of porosity and In Situ $YAG(Al_5Y_3O_{12})$ crystal grain boundaries, their electrical conduction mechanism are complicated. In addition, because the condition of such grain boundaries due to $Al_2O_3+Y_2O_3$ additives widely varies with sintering temperature, electrical resistivity of the $SiC-ZrB_2$ electroconductive ceramic composites with sintering temperature also varies with sintering condition. It is convinced that ${\beta}-SiC$ based electroconductive ceramic composites for heaters or ignitors can be manufactured by pressureless sintering.

Effect of WO3 or Ga2O3 Addition on the Phase Evolution and Properties of Y2O3-Doped AlN Ceramics (Y2O3-AlN 세라믹스의 생성상 및 물성에 미치는 WO3 및 Ga2O3의 첨가효과)

  • Shin, Hyunho;Yoon, Sang-Ok;Kim, Shin;Hwang, Injoon
    • Journal of the Korean Ceramic Society
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    • v.50 no.3
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    • pp.206-211
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    • 2013
  • The effect of a $WO_3$ or $Ga_2O_3$ addition on the densification, phase evolution, optical reflectance, and elastic and dielectric properties of $Y_2O_3$-doped AlN ceramics sintered at $1800^{\circ}C$ for 3 h is investigated. The investigated compositions of the additives are 4.5 wt% $Y_2O_3$ (YA), 3.5 wt% $Y_2O_3$-1.0 wt% $Ga_2O_3$ (YGA), and 3.5 wt% $Y_2O_3$-1.0 wt% $WO_3$ (YWA). $YAlO_3$ and $Y_4Al_2O_9$ form as the secondary phases in all of the investigated compositions, whereas $W_2B$ appears additionally in the YWA. In the YGA, Ga is detected in the AlN grains, indicating that the dissolution of $Ga_2O_3$ into the AlN lattice occurs. The addition of $WO_3$ blackens the specimen more significantly than that of $Ga_2O_3$ does. In all of the investigated specimens, the linear shrinkage and the apparent density are above 20 percent and in the range of 3.34-3.37 $g/cm^3$, respectively. The elastic modulus, Poisson's ratio, the dielectric constant, and the dielectric loss are in the ranges of 335-368 GPa, 0.146-0.237, 8.60-8.63, $2.65-3.95{\times}10^{-3}$, respectively. The sinterability and the properties of $Y_2O_3$-doped AlN ceramics are not much altered by the addition of $WO_3$ or $Ga_2O_3$.