• Title/Summary/Keyword: Imaging Measurement Technique

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A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution

  • Kim, Sangyun;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.2 no.2
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    • pp.153-164
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    • 2018
  • In semiconductor manufacturing, critical dimensions indicate the features of patterns formed by the semiconductor process. The purpose of measuring critical dimensions is to confirm whether patterns are made as intended. The deposition process for an organic light emitting diode (OLED) forms a luminous organic layer on the thin-film transistor electrode. The position of this organic layer greatly affects the luminescent performance of an OLED. Thus, a system for measuring the position of the organic layer from outside of the vacuum chamber in real-time is desired for monitoring the deposition process. Typically, imaging from large stand-off distances results in low spatial resolution because of diffraction blur, and it is difficult to attain an adequate industrial-level measurement. The proposed method offers a new superresolution single-image using a conversion formula between two different optical systems obtained by a deep learning technique. This formula converts an image measured at long distance and with low-resolution optics into one image as if it were measured with high-resolution optics. The performance of this method is evaluated with various samples in terms of spatial resolution and measurement performance.

Simultaneous imaging and radiometric performance simulation for computer generated GOCI optical system with measured characteristics

  • Jeong, Soo-Min;Jeong, Yu-Kyeong;Ryu, Dong-Ok;Yoo, Jin-Hee;Kim, Seong-Hui;Cho, Seong-Ick;Ham, Sun-Jeong;Youn, Heong-Sik;Woo, Sun-Hee;Kim, Sug-Whan
    • Bulletin of the Korean Space Science Society
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    • 2008.10a
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    • pp.27.3-28
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    • 2008
  • In this study, we report a new Monte Carlo ray tracing technique for estimating GOCI (Geostationary Ocean Color Instrument) radiative transfer characteristics and imaging performance simultaneously. First, a full scale GOCI optical model was constructed with measured characteristics at the component level and placed in the geostationary orbit. An optical model of approximated GOCI target area centered at the Korean penninsular was then built using the USGS coastal line data and representative land and sea surface reflectivity data. The light rays launched from a simulated sun model travel to the Earth surface, where they are reflected and scattered. Some of the light rays that are headed to the GOCI model in the orbit were selected and traced, as they have entered into the GOCI aperture. As they pass through each GOCI optical part, the ray path and intensity are adjusted according to the measured characteristics for reflection, transmission, refractive index and surface scattering. The ray-traced imaging and radiative transfer performance indicators confirm that the computer generated GOCI optical system with measured characteristics can be used for in-orbit operation simulation following the designed measurement sequence. The computational technique and its implications as a operation support tool are discussed.

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Measurement of turbulent jet flow using dynamic PIV technique (Dynamic PIV를 이용한 난류 제트유동 해석)

  • Lee Sang-Joon;Jang Young-Gil;Kim Seok
    • 한국가시화정보학회:학술대회논문집
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    • 2005.12a
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    • pp.36-39
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    • 2005
  • Information on temporal evolution of whole velocity fields is essential for physical understanding of a complicated turbulent flow and was obtainable using dynamic PIV because of advances of high-speed imaging technique, laser and electronics. A dynamic PIV systme consists of a high-speed CMOS camera having $1K\times1K$ pixels resolution at 1 KHz and a high-repetition Nd:Yag pulse laser. In order to validate its performance, the dynamic PIV system was applied to a turbulent jet whose Reynolds number is about 3000. The particle images of $1024\times512$ pixels were captured at a sampling rate of 4 KHz. The dynamic PIV system measured successfully the temporal evolution of instantaneous velocity fields of the turbulent jet, from which spectral analysis of turbulent structure was also feasible.

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Study on enhancing the ultrasonic image for bone densitometry (골밀도 측정을 위한 초음파 영상 개선에 관한 연구)

  • Shin, Jung-Sik;Ahn, Jung-Hwan;Kim, Hyung-Joon;Kim, Hwa-Young;Han, Seung-Moo
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.8 s.173
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    • pp.182-191
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    • 2005
  • It is very important to obtain a high quality of bone image for an accurate ultrasonic measurement of bone mineral density. In this study, we suggested a technique to acquire an optimal image by adapting an acoustic lens and a properly selected ultrasonic probe. Also, we have applied an image processing algorithm with which automatically makes a decision of brightness and contrast of image by generating threshold level, a composition of ultrasonic data, an elimination of noise using modified median filter, and a real time interpolation. We could confirm much improved resolution of bone image with acoustic lens attached to the ultrasonic probe and with the image processing algorithm suggested in this study. Therefore, it became possible to precisely diagnose the osteoprosis using ultrasonic imaging technique.

Magnetic field Inhomogeneity measurement algorithm using magnetic resonance (자기 공명 영상을 이용한 불균일 자계 측정 알고리즘)

  • Kim, H.J.;Kim, C.Y.;Han, S.Y.;Yoon, J.H.;Ahn, C.B.
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.2809-2811
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    • 1999
  • In this paper, we develope an algorithm to calculate field inhomogeneity in MR imaging using a dual fast spin echo pulse sequence. Because phase modulation time can be easily modified with this pulse sequence, high resolution image can be obtained and acquisition time can be reduced compared to gradient echo technique. In the case of phase wrapping in field map, phase corrected using image processing technique. We assume the field pattern to be second order polynomial and apply Pseudo-Inverse equation to calculate second order polynomial coefficients. These coefficients can be used for the shimming of the magnetic field.

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Comparison of 2 root surface area measurement methods: 3-dimensional laser scanning and cone-beam computed tomography

  • Tasanapanont, Jintana;Apisariyakul, Janya;Wattanachai, Tanapan;Sriwilas, Patiyut;Midtbo, Marit;Jotikasthira, Dhirawat
    • Imaging Science in Dentistry
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    • v.47 no.2
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    • pp.117-122
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    • 2017
  • Purpose: The aim of this study was to compare the use of 3-dimensional (3D) laser scanning and cone-beam computed tomography (CBCT) as methods of root surface measurement. Materials and Methods: Thirty teeth (15 maxillary first premolars and 15 mandibular first premolars) from 8 patients who required extractions for orthodontic treatment were selected. Before extraction, pre-treatment CBCT images of all the patients were recorded. First, a CBCT image was imported into simulation software (Mimics version 15.01; Materialise, Leuven, Belgium) and the root surface area of each tooth was calculated using 3-Matic (version 7.01, Materialise, Leuven, Belgium). After extraction, all the teeth were scanned and the root surface area of each extracted tooth was calculated. The root surface areas calculated using these 2 measurement methods were analyzed using the paired t-test (P<.05). Correlations between the 2 methods were determined by calculating the Pearson correlation coefficient. The intraclass correlation coefficient(ICC) was used to assess intraobserver reliability. Results: The root surface area measurements ($230.11{\pm}41.97mm^2$) obtained using CBCT were slightly greater than those ($229.31{\pm}42.46mm^2$) obtained using 3D laser scanning, but not significantly (P=.425). A high Pearson correlation coefficient was found between the CBCT and the 3D laser scanner measurements. The intraobserver ICC was 1.000 for 3D laser scanning and 0.990 for CBCT. Conclusion: This study presents a novel CBCT approach for measuring the root surface area; this technique can be used for estimating the root surface area of non-extracted teeth.

Retrospective Electrocardiography-Gated Real-Time Cardiac Cine MRI at 3T: Comparison with Conventional Segmented Cine MRI

  • Chen Cui;Gang Yin;Minjie Lu;Xiuyu Chen;Sainan Cheng;Lu Li;Weipeng Yan;Yanyan Song;Sanjay Prasad;Yan Zhang;Shihua Zhao
    • Korean Journal of Radiology
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    • v.20 no.1
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    • pp.114-125
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    • 2019
  • Objective: Segmented cardiac cine magnetic resonance imaging (MRI) is the gold standard for cardiac ventricular volumetric assessment. In patients with difficulty in breath-holding or arrhythmia, this technique may generate images with inadequate quality for diagnosis. Real-time cardiac cine MRI has been developed to address this limitation. We aimed to assess the performance of retrospective electrocardiography-gated real-time cine MRI at 3T for left ventricular (LV) volume and mass measurement. Materials and Methods: Fifty-one patients were consecutively enrolled. A series of short-axis cine images covering the entire left ventricle using both segmented and real-time balanced steady-state free precession cardiac cine MRI were obtained. End-diastolic volume (EDV), end-systolic volume (ESV), stroke volume (SV), ejection fraction (EF), and LV mass were measured. The agreement and correlation of the parameters were assessed. Additionally, image quality was evaluated using European CMR Registry (Euro-CMR) score and structure visibility rating. Results: In patients without difficulty in breath-holding or arrhythmia, no significant difference was found in Euro-CMR score between the two techniques (0.3 ± 0.7 vs. 0.3 ± 0.5, p > 0.05). Good agreements and correlations were found between the techniques for measuring EDV, ESV, EF, SV, and LV mass. In patients with difficulty in breath-holding or arrhythmia, segmented cine MRI had a significant higher Euro-CMR score (2.3 ± 1.2 vs. 0.4 ± 0.5, p < 0.001). Conclusion: Real-time cine MRI at 3T allowed the assessment of LV volume with high accuracy and showed a significantly better image quality compared to that of segmented cine MRI in patients with difficulty in breath-holding and arrhythmia.

Functional beamforming for high-resolution ultrasound imaging in the air with random sparse array transducer (고해상도 공기중 초음파 영상을 위한 기능성 빔형성법 적용)

  • Choon-Su Park
    • The Journal of the Acoustical Society of Korea
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    • v.43 no.3
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    • pp.361-367
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    • 2024
  • Ultrasound in the air is widely used in industry as a measurement technique to prevent abnormalities in the machinery. Recently, the use of airborne ultrasound imaging techniques, which can find the location of abnormalities using an array transducers, is increasing. A beamforming method that uses the phase difference for each sensor is used to visualize the location of the ultrasonic sound source. We exploit a random sparse ultrasonic array and obtain beamforming power distribution on the source in a certain distance away from the array. Conventional beamforming methods inevitably have limited spatial resolution depending on the number of sensors used and the aperture size. A high-resolution ultrasound imaging technique was implemented by applying functional beamforming as a method to overcome the geometric constraints of the array. The functional beamforming method can be expressed as a generalized beam forming method mathematically, and has the advantage of being able to obtain high-resolution imaging by reducing main-lobe width and side lobes. As a result of observation through computer simulation, it was verified that the resolution of the ultrasonic source in the air was successfully increased by functional beamforming using the ultrasonic sparse array.

The Doping Concentration and Physical Properties Measurement of Silicon Wafer Using Terahertz Wave (테라헤르츠파를 이용한 실리콘 웨이퍼의 도핑 정도와 물리적 특성 측정에 관한 연구)

  • Park, Sung Hyeon;Oh, Gyung Hwan;Kim, Hak Sung
    • Journal of the Korean Society for Nondestructive Testing
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    • v.37 no.1
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    • pp.1-6
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    • 2017
  • In this study, a terahertz time domain spectroscopy (THz-TDS) imaging technique was used to measure doping concentration and physical properties (such as refractive index and permittivity) of the doped silicon (Si) wafers. The transmission and reflection modes with an incidence angle of $30^{\circ}$ were employed to determine the physical properties of the doped Si wafers. The doping concentrations of the prepared Si wafers were varied from $10^{14}$ to $10^{18}$ in both N-type and P-type cases. Finally, the correlation between the doping concentration and the power of the THz wave was determined by measuring the powers of the transmitted and reflected THz waves of the doped Si wafers. Additionally, the doped thickness, the refractive index, and permittivity of each doped Si wafer were calculated using the THz time domain waveform. The results indicate that the THz-TDS imaging technique is potentially a promising technique to measure the doping concentration as well as other optical properties (such as the refractive index and permittivity) of the doped Si wafer.

A Study on MCG Imaging (MCG 영상진단 검사에 관한 연구)

  • Kim, Jong-Gyu
    • Korean Journal of Clinical Laboratory Science
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    • v.38 no.2
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    • pp.135-140
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    • 2006
  • Magnetocardiography (MCG) is the measurement and analysis of the magnetic component of the electro-magnetic field of the human heart, usually conducted externally, using extremely sensitive devices such as a Superconducting Quantum Interference Device (SQUID). MCG is a totally noninvasive method, it uses neither radiation nor ultrasonics. The magnetic activity of the heart is registered from outside the thorax. MCG has a very high sensitivity and a high spatial resolution for very a small, local myocardial current. In comparison to the electrical signals measured by an ECG, the magnetic signal does not disturb the boundaries of tissues with different electrical properties. MCG measures the myocardial function rather than describing the morphology. MCG is a relatively new technique that promises good spatial resolution and extremely high temporal resolution, thus complementing other heart activity measurement techniques such as Electrocardiography (ECG). The clinical uses of MCG are in detecting various cardiac disorders including myocardial infarction, ventricular hypertrophy, ventricular conduction defects, Wolff-Parkinson-White (WPW) syndrome, sudden cardiac death and fetal magnetocardiography. Magnetocardiography may be used alone or together with electrcardiography for the measurement of spontaneous or overloaded activity and for research or clinical purposes.

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