• Title/Summary/Keyword: Imaging Ellipsometry

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Study on Refractive Index and Thickness of Human Stem Cells by Using Imaging Ellipsometry (영상 타원법을 이용한 인간 줄기세포의 굴절률과 두께 분포 연구)

  • Choi, Joong-Kyu;Shim, Woo-Young;Lee, Gwang;Kim, Sang-Youl;Park, Sang-Uk;CheGal, Won;Cho, Hyun-Mo;Cho, Yong-Jai
    • Korean Journal of Optics and Photonics
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    • v.20 no.1
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    • pp.53-56
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    • 2009
  • We applied an ellipsometric technique to get quantitative information about the thickness and refractive index of human Mesenchymal Stem Cells (hMSCs). The images of ellipsometric constants $\Delta$, $\Psi$ for the nucleus region and for the cell body region of hMSCs were obtained by using an Imaging Ellipsomter (IE) for their in vitro state. A numerical inversion method was applied to deduce the refractive index and the thickness of hMSCs from the measured $\Delta$, $\Psi$. Thus the images of the refractive index and those of the thickness of hMSCs for the nucleus region and for the cell body region are reported.

Three-Dimensional Analysis of the Collapse of a Fatty Acid at Various Compression Rates using In Situ Imaging Ellipsometry

  • Hwang, Soon Yong;Kim, Tae Jung;Byun, Jun Seok;Park, Han Gyeol;Choi, Junho;Kang, Yu Ri;Park, Jae Chan;Kim, Young Dong
    • Journal of the Optical Society of Korea
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    • v.18 no.4
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    • pp.350-358
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    • 2014
  • The collapse of Langmuir monolayers of arachidic acid (AA) on water at various rates of molecular area compression has been investigated in situ by imaging ellipsometry (IE). The thickness of the collapsed AA molecules, which are inherently inhomogeneous, was determined by IE with a spatial resolution of a few microns. For the analysis, we determined the dielectric function of AA monolayers from 380 to 1690 nm by conventional spectroscopic ellipsometry. Compression rates ranged from 0.23 to $0.94{\AA}^2/min$. A change of multilayer domains was observed in the in situ IE images. Lower compression rates resulted in more uniform collapsed films. Our experimental results correspond with previous theoretical simulations.

Immunosensor for Detection of Escherichia coli O157:H7 Using Imaging Ellipsometry

  • Bae Young-Min;Park Kwang-Won;Oh Byung-Keun;Choi Jeong-Woo
    • Journal of Microbiology and Biotechnology
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    • v.16 no.8
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    • pp.1169-1173
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    • 2006
  • Imaging ellipsometry (IE) for detection of binding of Escherichia coli O157:H7 (E. coli O157:H7) to an immunosensor is reported. A protein G layer, chemically bound to a self-assembled layer of 11-mercaptoundecanoic acid (11-MUA), was adopted for immobilization of monoclonal antibody against E. coli O157:H7 (Mab). The immobilization of antibody was investigated using surface plasmon resonance. To fabricate antibody spots on a gold surface, protein G solution was spotted onto the gold surface modified with an 11-MUA layer, followed by immobilizing Mab on the protein G spot. Ellipsometric images of the protein G spot, the Mab spot, and Mab spots with binding of E. coli O157:H7 in various concentrations were acquired using the IE system. The change of mean optical intensity of the Mab spots in the ellipsometric images indicated that the lowest detection limit was $10^3$CFU/ml for E. coli O157:H7. Thus, IE can be applied to an immunosensor for detection of E. coli O157:H7 as a detection method with the advantages of allowing label-free detection, high sensitivity, and operational simplicity.

Measurement of Thin Film Thickness of Patterned Samples Using Spectral Imaging Ellipsometry (분광결상 타원계측법을 이용한 패턴이 형성된 나노박막의 두께측정)

  • 제갈원;조용재;조현모;김현종;이윤우;김수현
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.6
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    • pp.15-21
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    • 2004
  • 반도체 제조산업과 나노, 바이오 산업의 비약적 발전에 따라 게이트 산화막(gate oxide)과 같이 반도체 제조공정에서 사용되는 유전체 박막(dielectric film)의 두께는 수 $\mu\textrm{m}$에서 수 nm 에 이르기까지 다양할 뿐 아니라 얇아지고 있으며, 또한 이러한 박막들이 다층으로 복잡하게 적층된 다층 박막의 응용이 높아지는 추세이다. 따라서, 반도체 및 광통신 소자, 발광소자, 바이오 칩 어레이 등과 같은 나노박막을 이용하는 산업에서는 박막의 두께 측정을 더욱 정확하고, 보다 빠르며 효율적으로 측정할 수 있는 박막 두께 측정용 계측기가 요구된다.(중략)

An Ellipsometry Study of Water Absorption in the 193 nm photoresist (Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구)

  • Lee, Hyoung-Joo;Lee, Jung-Hwan;Seo, Ju-Bin;Kyoung, Jai-Sun;An, Il-Sin
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.2 s.15
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    • pp.37-39
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    • 2006
  • We employed in-situ spectroscopic ellipsometry(SE) and imaging ellipsometry(IE) to study the interaction of water and photoresist(PR) in 193 immersion lithography. Real time measurement of SE showed thickness increase when PR was immerged in water indicating swelling effect. From the temporal evolution we could observe its reaction-limited behavior. Meanwhile, IE could identify the modification of PR surface by contact of water even for a short period of a second.

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Biosensor for Detection of Yersinia enterocolitica based on imaging ellipsometry (이미지 엘립소미트리를 이용한 예시니아 검출용 바이오센서 개발)

  • Y. M. Bae;Park, K. W.;Park, J. W.;S. I. Cho
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2003.07a
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    • pp.421-426
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    • 2003
  • The Immunosensor based on antigen-antibody binding have been developed for detecting several analytes including antigen, small molecules, and cell. This method can be rapid and show very good detection limits. For Implementation of immunosensor, technologies for immobilization of antibody onto solid surface and detection of protein-protein binding must be developed. (an ellipsis)

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Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구

  • Lee Hyeong-Ju;Lee Jeong-Hwan;Seo Ju-Bin;Gyeong Jae-Seon;An Il-Sin
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.05a
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    • pp.172-176
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    • 2006
  • 본 논문에서는 물을 이용한 193nm immersion lithography에서 물이 photoresist(PR)에 흡수되는 현상을 측정하기 위하여 타원해석기(Ellipsometer)의 응용 가능성을 연구하였다. 물이 PR 에 흡수됨에 따라 swelling 현상이 발생하여 두께 증가로 나타났는데 이는 실시간 타원해석기를 적용하여 시간에 따른 두께 변화를 분석함으로써 그 반응정도를 분석해 낼 수 있었다. 또한 짧은 시간에 발생하는 물의 흡수 현상은 imaging 타원해석기론 이용하여 규명할 수가 있었다.

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Nano Bio Imaging for NT and BT

  • Moon, DaeWon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.51.2-51.2
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    • 2015
  • Understanding interfacial phenomena has been one of the main research issues not only in semiconductors but only in life sciences. I have been trying to meet the atomic scale surface and interface analysis challenges from semiconductor industries and furthermore to extend the application scope to biomedical areas. Optical imaing has been most widely and successfully used for biomedical imaging but complementary ion beam imaging techniques based on mass spectrometry and ion scattering can provide more detailed molecular specific and nanoscale information In this presentation, I will review the 27 years history of medium energy ion scattering (MEIS) development at KRISS and DGIST for nanoanalysis. A electrostatic MEIS system constructed at KRISS after the FOM, Netherland design had been successfully applied for the gate oxide analysis and quantitative surface analysis. Recenlty, we developed time-of-flight (TOF) MEIS system, for the first time in the world. With TOF-MEIS, we reported quantitative compositional profiling with single atomic layer resolution for 0.5~3 nm CdSe/ZnS conjugated QDs and ultra shallow junctions and FINFET's of As implanted Si. With this new TOF-MEIS nano analysis technique, details of nano-structured materials could be measured quantitatively. Progresses in TOF-MEIS analysis in various nano & bio technology will be discussed. For last 10 years, I have been trying to develop multimodal nanobio imaging techniques for cardiovascular and brain tissues. Firstly, in atherosclerotic plaque imaging, using, coherent anti-stokes raman scattering (CARS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS) multimodal analysis showed that increased cholesterol palmitate may contribute to the formation of a necrotic core by increasing cell death. Secondly, surface plasmon resonance imaging ellipsometry (SPRIE) was developed for cell biointerface imaging of cell adhesion, migration, and infiltration dynamics for HUVEC, CASMC, and T cells. Thirdly, we developed an ambient mass spectrometric imaging system for live cells and tissues. Preliminary results on mouse brain hippocampus and hypotahlamus will be presented. In conclusions, multimodal optical and mass spectrometric imaging privides overall structural and morphological information with complementary molecular specific information, which can be a useful methodology for biomedical studies. Future challenges in optical and mass spectrometric imaging for new biomedical applications will be discussed.

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High-Contrast Imaging of Biomolecular Interactions Using Liquid Crystals Supported on Roller Printed Protein Surfaces

  • Park, Min-Kyung;Jang, Chang-Hyun
    • Bulletin of the Korean Chemical Society
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    • v.33 no.10
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    • pp.3269-3273
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    • 2012
  • In this study, we report a new method for the high contrast imaging of biomolecular interactions at roller printed protein surfaces using thermotropic liquid crystals (LCs). Avidin was roller printed and covalently immobilized onto the obliquely deposited gold surface that was decorated with carboxylic acid-terminated self-assembled monolayers (SAMs). The optical response of LCs on the roller printed film of avidin contrasted sharply with that on the obliquely deposited gold surface. The binding of biotin-peroxidase to the roller printed avidin was then investigated on the obliquely deposited gold substrate. LCs exhibited a non-uniform and random orientation on the roller printed area decorated with the complex of avidin and biotin-peroxidase, while LCs displayed a uniform and planar orientation on the area without roller printed proteins. The orientational transition of LCs from uniform to non-uniform state was triggered by the erasion of nanometer-scale topographies on the roller printed surface after the binding of biotin-peroxidase to the surface-immobilized avidin. The specific binding events of protein-receptor interactions were also confirmed by atomic force microscopy and ellipsometry. These results demonstrate that the roller printing of proteins on obliquely deposited gold substrates could provide a high contrast signal for imaging biomolecular interactions using LC-based sensors.