• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.

• 해양환경안전학회지
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• 제7권1호
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• pp.15-23
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• 2001

In regulation of IGC code 12.1 mechanical ventilation should be arranged to ensure sufficient air movement through the space to avoid the accumulation of flammable or toxic vapours and ensure a safe working environment, but in no case should the ventilation system have a capacity of less than 30 changes of air per hour baed upon the total volume of the space. In this study, a scaled mode chamber was constructed to investigate the ventilation characteristics and stagnation area in the hood room of LNG carrier and pump room in tanker. An experimental study was performed on the model by using visualization equipment with a laser apparatus and an image intensifier CCD camera. Twelve different kinds of measuring areas were selected as the experimental condition. Instant simultaneous velocity vectors in the whole fields were measured by a 2-D PIV system A three-dimensional numerical simulation was also carried out for three different Reynolds numbers. Then the CFD predictions were discussed with the experimental results. The results show the spiral L-shape flow that moves from the opening on the left wall diagonally to the upper right part dominates the ventilation structure. The stationary area of hood room in the velcoity distributions was located in the upper left stern part.

• 한국가시화정보학회지
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• 제6권2호
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• pp.14-19
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• 2008

In this paper, the recirculation flow motion and mixing characteristics driven by air bubble flow in a rectangular water tank is studied. The Time-resolved PIV technique is adopted for the quantitative visualization and analysis. 532 nm Diode CW laser is used for illumination and orange fluorescent particle images are acquired by a PCO 10bit high-speed camera. To obtain clean particle images, 545 nm long pass optical filter and an image intensifier are employed and the flow rates of compressed air is changed from 2 l/min to 4 l/min at 0.5 MPa. The recirculation and mixing flow field is further investigated by the POD analysis technique. It is observed that the large scale counterclockwise rotation and main vortex is generated in the upper half depth from the free surface and one quarter width from the sidewall. When the flow rates are increased, the main vortex core is moved to the side and bottom wall direction.

• 한국가시화정보학회지
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• 제6권1호
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• pp.41-46
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• 2008

In this paper, the recirculation flow motion and mixing characteristics driven by air bubble stream in a rectangular water tank is studied. The time-resolved PIV technique is adopted for the quantitative visualization and analysis. 488 nm Ar-ion CW laser is used for illumination and orange fluorescent ($\lambda_{ex}=540nm,\;\lambda_{em}=560nm$) particle images are acquired by a PCO 10bit high-speed CCD camera (1280$\times$1024). To obtain clean particle images, 545 nm long pass optical filter and an image intensifier are employed and the flow rates of compressed air is 3 l/min at 0.5 MPa. The recirculation and mixing flow field is further investigated by time-resolved POD analysis technique. It is observed that the large scale recirculation resulting from the interaction between rising bubble stream and side wall is the most dominant flow structure and there are small scale vortex structures moving along with large scale recirculation flow. It is also verified that the sum of 20 modes of velocity field has about 67.4% of total turbulent energy.