• 한국광학회지
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• 제4권1호
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• pp.15-21
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• 1993

본 연구에서는 설계제작된 KrF 엑시머 레이저 스텝퍼는 광원인 KrF엑시머 레이저, 조명광학계, 축소트영광학계, 정밀구동 웨이퍼 스테이지, 정렬시스템 및 이들을 제어하기 위한 제어계로 구성되어 있다. 본 실험에서 사용한 KrFdprtlaj 레이저는 밴드폭 3pm, 반복주파수 200Hz, 평균축력 3W이고, 5:1 투영렌즈는 N.A. 0.42, 전체 필드영역 $\varphi$21.2mm, 왜곡수차 최대 60nm 이하이다. 또한 정밀구동 웨이퍼 스테이지의 재현성과 해상도는 각각 $\pm$0.08$\mu\textrm{m}$/200mm(3 sigma), 100mm 반경에서 0.05 $\mu\textrm{m}$이다. 자동 초점 시스템은 $\pm$50$\mu\textrm{m}$범위에서 0.1$\mu\textrm{m}$의 해상도를 나타냈으며, 자동수평시스템은 120 arcsec 범위에서 larcsec의 해상도를 나타냈다. OFF-AXIS 정렬방식에서는 0.2$\mu\textrm{m}$의 해상도를 가지며, 두빔의 간섭을 이용한 새로운 TTL 정렬은 0.1$\mu\textrm{m}$의 해상도를 나타냈다. 스텝퍼 패턴 실험결과 SAL603레지스트를 사용하였을 때 웨이퍼의 노광후 열처리 $105^{\circ}C$, 60초에서 0.3$\mu\textrm{m}$ Lines and Spaces(L/S)까지 해상되었으며, 0.34$\mu\textrm{m}$ L/S에서 1$\mu\textrm{m}$의 초점심도를 얻을 수 있었다. 마스크 패턴과 레지스트 패턴의 선형성은 0.4$\mu\textrm{m}$ L/S가지 유지 되었다. 또한 XP-89131레지스트의 경우 노광후 열처리 $110^{\circ}C$, 60초에서 0.34$\mu\textrm{m}$ L/S까지 해상됨을 알수 있었다.

• 한국결정성장학회지
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• 제11권4호
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• pp.138-147
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• 2001

수평 전기로에서 $ZnIn_{2}S_{4}$ 다결정을 합성하여 HWE(Hot Wall Epitaxy)방법으로 $ZnIn_{2}S_{4}$ 단결정 박막을 반절연성 GaAs(100) 기판 위에 성장시겼다. $ZnIn_{2}S_{4}$ 단결정 박막은 증발원의 온도를 $610^{\circ}C$, 기판의 온도를 $450^{\circ}C$로 성장시켰고 성장 속도는 0.5$\mu\textrm{m}$/hr로 확인되었다. $ZnIn_{2}S_{4}$ 단결정 박막의 결정성의 조사에서 $10^{\circ}$K에서 광발광 (photoluminescence) 스펙트럼이 433nm (2.8633 eV)에서 exciton emission 스펙트럼이 가장 강하게 나타났으며, 또한 이중결정 X-선 요동곡성 (DCRC)의 반폭치(FWHM)도 133 arcsec로 가장 작아 최적 성장 조건임을 알 수 있었다. Hall 효과는 van der Pauw 방법에 의해 측정되었으며, 온도에 의존하는 운반자 농도와 이동도는 $293^{\circ}$K에서 각각 $8.51{\times}10^{17}electron{\textrm}{cm}^{-3}$, 291$\textrm{cm}^2$/V-s 였다. $ZnIn_{2}S_{4}$ 단결정 박막의 광전류 단파장대 봉우리들로부터 $10^{\circ}$K에서 측정된 ${\Delta}$Cr(crystal field splitting)은 0.1678 eV, ${\Delta}$So (spin orbit coupling)는 0.0148eV였다. $10^{\circ}$K의 광발광 측정으로부터 고품질의 결정에서 볼 수 있는 free exciton 과 매우 강한 세기의 중성 주개 bound exciton 등의 피크가 관찰되었다. 이때 증성 주개 bound exciton 의 반치폭과 결합 에너지는 각각 9meV와 26meV였다. 또한 Haynes rule에 의해 구한 불순물의 활성화 에너지는 130meV였다.

• 한국재료학회지
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• 제11권5호
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• pp.419-426
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• 2001

AgGaSe$_2$ 단결정 박막은 수평 전기로에서 합성한 $AgGaSe_2$ 다결정을 증발원으로 하여, hot wall epitaxy (HWE) 방법으로 증발원과 기판 (반절연성-GaAs(100)) 의 온도를 각각 $630^{\circ}C$, $420^{\circ}C$로 고정하여 박막 결정 성장을 하였다. 10K에서 측정한 광발광 excition 스펙트럼과 이중결정 X-선 요동곡선 (DCRC) 의 반치폭 (FWHM )을 분석하여 단결정 박막의 최적 성장 조건을 얻었다. Hall효과는 van der Pauw 방법에 의해 측정되었으며, 온도에 의존하는 운반자 농도와 이동도는 293k에서 각각 4.89$\times$$10^{ 16}$/㎤, 129$\textrm{cm}^2$/V.s였다. 광전류 봉우리의 10K에서 단파장대의 가전자대 갈라짐 (splitting)에 의해서 측정된 $\Delta$C$_{r}$ (crystal field splitting)은 0.1762eV, $$\Delta$S_{o}$ (spin orbit splitting)는 0.2494eV였다 10K의 광발광 측정으로부터 고풍질의 결정에서 볼 수 있는 free excitors과 매우 강한 세기의 중성 주개 bound excitors등의 피크가 관찰되었다. 이때 중성 주개 bound ekciton의 반치폭과 결합에너지는 각각 BmeV와 14.1meV였다. 또한 Haynes rule에 의해 구한 불순물의 활성화 에너지는 141meV였다.rule에 의해 구한 불순물의 활성화 에너지는 141meV였다.

• 한국직업건강간호학회지
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• 제3권호
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• pp.54-70
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• 1993

According as the automation of clerical work(OA ; Office Automation) develops, the use of VDT(Visual or Video Display Terminal) is increasing suddenly. But, in proportion to the spread of office automation(OA tendency), the self-conciousness syptom attendant upon the work is appearing also (Kim, Jung Tae, Lee, Young Ook, 1990). The apparatuses of office enable the clerical workers to be convenient and perform mass businesses. But, they are increasing the opportunity to be exposed to VDT syndrom, techno stress, computer terminal disease, pain by muscle strain(RSI), bradycausia of noise nature, and electromagnetic waves, etc. which are referred to as the new type of occupational diseases to the workers. It is the real situation that the workers to use VDT is complaining of the physical inconvenience sense in the recent newspaper and literature, it is the point of time that the sydrome to come from VDT use and computer terminal disease, etc. must be classified into the occupational disease(Lee, Kwang Young 1990, Lee, Kyoo Hak 1990, Lee, Won Ho 1991, Lee, Si Young 1991, Lee, Joon 1991, Choi, Young Tae 1991, Heo, Seung Ho 1989). In addition, it is the real situation that the scientifitic study result about the scope that electromagnetic waves has influence on the human body has not been suggested yet, and criticism on the stable exposure permission standard about electromagnetic waves to be emitted from VDT and on the problem in the health about electromagnetic waves is continuing. (IEEE Spectrum, 1990). In addition according to the experience of nursery business of industry field, it is the real situation that the patients who consult complaining of physical and mental inconvenience sence, among the users of apparatus of office automation, are reaching 10% of the patients coming to doctor's room. Therefore, it is necessary to confirm the self-consciousness symptom that the clerical workers complain of multilaterally with the actual state examination about the use of the apparatuses of offices automaton. Thus, this study was tried as th basic data for the cosultation and education for the maintenance and furtherance of the health of workers as the nurse of industry field, by confirming the contents of self-consciousness symptom attendant upon the use of the apparatus for office outomation making the financial institution in which the spparatus for office automation in most frequently used as the subject, and by examining whether there is the difference according to the subject of study, the data were collected, by using the questionnaire method, making 200 workers who consented to the study participation as the subject, among the persons who have spent over 3 months since they used the apparatuses for office automation and didn't receive the treatment in hospital due to the clerical disease for recent 3 years. The period of data collection was from Oct. 9, 1991 to Oct. 12. As for the measurement instrument about the complaint if self-consciousness symptom attendant upon the use of apparatuses fo office automation, the question item on the complaint symptom of health problem attendant upon the treatment of VDT that Kim(1991) developed and on CMI health problem and the question items on the fatigue degree due to industry were used by previous examination to 25 persons. Collected data were analyzed with the statistical method such as percentage, arithmetic mean, Person correlation coeffient, Kai square verfication, t-test, ANOVA, etc. by using SPSS/PC+ program, and the result is as follows : 1. The self-consciousness symptom that the clerical workers complained of most frequetly appeared high in 'My eyes are tired'(99.4%), 'I feel fatigue and weariness'(99.4%), 'I feel that my head is heavy5(90.0%), 'eyesight fell'(88.8%), 'I have a stiff neck'(88.8%), 'I fell pain in the shoulder'(85.0%), 'I feel cold and painful in the eyes'(76.9%), 'I feel the dry sense of eyeball'(76.2%), 'My nerves are edgy, and I an fretful, (75.6%), 'I feel pain in the waist'(73.2%) and 'I fell pain in the back'(72.8%). It emerged that the subject use the apparatuses for office automation complained of self-consciousness symptoms related to visual symptoms and musculoskeletal symptoms. 2. As for the general feature of examination subjects, the result to see the distribution by classifying into sex, age, school career, use career of apparatuses for office automation, skillfulness degree of the use of apparatus for office automation, use hours of the apparatuses for office automation per 1 day, type of business of the apparatus for office automation, rest hours during the use of apparatus for office automation, satifaction degree of business of office automation, and work circumstance, etc. emerged as follows : As for the sex of subjects, the distribution showed that men were 58.8% and women were 41.3%, Age was average 26.9. As the distribution of school career, the distribution showed that4below the graduation of high school' was 58.8%, 'graduation from junior college-university' was 35.0%, and 'over graduate school' was 6.3%. In the question to ask the existence or non-existence of experience of health consultation in connection with the work of office automation, the response that I had the consultation exprience and I feel the necessity emergerd as 90.1% And, the case that the subject who didn't wear the glasses or lens before using the OA apparatus wear glasses or lens after using OA apparatus emerged as 28.3% of whole. As for the existence or non-existence of use career of OA apparatus, the case under 3 years was highest as 52. 7%. As for the skillfulnness degree about the use of apparatus for office automation, most of them are skillful with the fact that 'common' was 44.4%, 'skill' was 42.5%, and 'unskillful' was 13.1% As for the use average hours of the apparatus for office automation per 1 day, the distribution showed that the case under 3-6 hours was 33.1%, the case under 6-9 hours was 28.1%, the case under 3 hours was 30.6%, and the case over 9 hours was 8.1% Main OA business and the use hours for 1 day showed in the order of keeping and retrieval, business of information transmission(162min), business of information transmission(79.3 min), business of document framing(55.5 min), and business of duplication and printing(25.4min). as for the rest during the use of apparatus for affice automation, that I take rest occasion demands the major portion, but that I take after completing the work emerged as 33.8%. Though the subiness gets to be convenient by the use of the apparatus for of office automation, respondents who showed the dissatisfaction about the present OA business emergd high as 78.1%. The work circumstances of each office was good with the fact that the temperature of office was 21.8, noise was average 42.7db, and the illumination was average 364.4 lx, in the light of ANSi/HFS 100 Standard. 3. Sight syptom, musculoskeletal symptom, skin and other symptoms showed the significant difference according to the extent of skillfulness of the apparatus for office automation. All the symptoms exept skin symptom showed the difference according to the use hours of the apparatus for office automation. All the question items exept the sytoms of digestive organs and the rest hours during the apparatus for office automation showed the signicant difference. The question item which showed the signicant difference from the satisfaction degree of present OA business showed the significant difference from all the question item classified into 6 groups. But, age and school career didn't significant difference from the complaint of any self-consciousness symptoms.