• Title/Summary/Keyword: Icp

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Parametric study of inductively coupled plasma etching of GaN epitaxy layer (GaN epitaxy 층의 식각특성에 미치는 공정변수의 영향)

  • Choi, Byoung Su;Park, Hae Li;Cho, Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.4
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    • pp.145-149
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    • 2016
  • The effect of process parameters such as plasma composition, ICP (Inductively Coupled Plasma) source power and rf chuck power on the etch characteristics of GaN epitaxy layer was studied. $Cl_2/Ar$ ICP discharges showed higher etch rates than $SF_6/Ar$ discharges because of the higher volatility of $GaCl_x$ etch products than $GaF_x$ compounds. As the Ar ratio increases in the $Cl_2/Ar$ ICP discharges, the etch anisotropy was enhanced due to the improved physical component of the etching. For both plasma chemistries, the GaN etch rate increased continuously as both the ICP source power and rf chuck power increased, and a maximum etch rate of 251.9 nm/min was obtained at $13Cl_2/2Ar$, 750W ICP power, 400W rf chuck power and 10 mTorr condition.

Characterizations of i-a-Si:H and p-a-SiC:H Film using ICP-CVD Method to the Fabrication of Large-area Heterojunction Silicon Solar Cells

  • Jeong, Chae-Hwan;Jeon, Min-Sung;Kamisako, Koichi
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.2
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    • pp.73-78
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    • 2008
  • We investigated for comparison of large-area i-a-Si:H and p-a-SiC:H film quality like thickness uniformity, optical bandgap and surface roughness using both ICP-CVD and PECVD on the large-area substrate(diameter of 100 mm). As a whole, films using ICP-CVD could be achieved much uniform thickness and bandgap of that using PECVD. For i-a-Si:H films, its uniformity of thickness and optical bandgap were 2.8 % and 0.38 %, respectively. Also, thickness and optical bandgap of p-a-SiC:H films using ICP-CVD could be obtained at 1.8 % and 0.3 %, respectively. In case of surface roughness, average surface roughness (below 5 nm) of ICP-CVD film could be much better than that (below 30 nm) of PECVD film. HIT solar cell with 2 wt%-AZO/p-a-SiC:H/i-a-Si:H/c-Si/Ag structure was fabricated and characterized with diameter of 152.3 mm in this large-area ICP-CVD system. Conversion efficiency of 9.123 % was achieved with a practical area of $100\;mm\;{\times}\;100\;mm$, which can show the potential to fabrication of the large-area solar cell using ICP-CVD method.

6D ICP Based on Adaptive Sampling of Color Distribution (색상분포에 기반한 적응형 샘플링 및 6차원 ICP)

  • Kim, Eung-Su;Choi, Sung-In;Park, Soon-Yong
    • KIPS Transactions on Software and Data Engineering
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    • v.5 no.9
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    • pp.401-410
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    • 2016
  • 3D registration is a computer vision technique of aligning multi-view range images with respect to a reference coordinate system. Various 3D registration algorithms have been introduced in the past few decades. Iterative Closest Point (ICP) is one of the widely used 3D registration algorithms, where various modifications are available nowadays. In the ICP-based algorithms, the closest points are considered as the corresponding points. However, this assumption fails to find matching points accurately when the initial pose between point clouds is not sufficiently close. In this paper, we propose a new method to solve this problem using the 6D distance (3D color space and 3D Euclidean distances). Moreover, a color segmentation-based adaptive sampling technique is used to reduce the computational time and improve the registration accuracy. Several experiments are performed to evaluate the proposed method. Experimental results show that the proposed method yields better performance compared to the conventional methods.

Usefulness of Hypothermia Treatment in Patients with Increased Intracranial Pressure (두개강내압 상승 환자에서 저체온법의 유용성 - 임 상 연 구 -)

  • Lee, Jong Moo;Ahn, Jae Sung;Kim, Jeong Hoon;Kim, Chang Jin;Kwon, Yang;Lee, Jung Kyo;Kwun, Byung Duk;Jeon, Sang Ryong
    • Journal of Korean Neurosurgical Society
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    • v.30 no.sup2
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    • pp.316-321
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    • 2001
  • Objectives : The goal of this study is to evaluate the usefulness of mild hypothermia treatment in patients with increased intracranial pressure(ICP). Material and Method : From November 1999 to May 2001, 11 patients were treated with mild hypothermia ($32-34^{\circ}C$) in whom ICP maintained at higher than 20mmHg in spite of decompressive surgery and high dose barbiturate therapy. The patient's rectal temperature were lowered by external cooling. Hypothermia was maintained for not more than 7 days and then the patients were rewarmed slowly for 24 hours. If increased ICP persisted for 2 days of hypothermia, this treatment was continued for several days. The functional outcome of each patient was assessed according to Glasgow Outcome Scale(GOS). Results : All cases except two cases showed decrease of ICP after hypothermia therapy. In 1 case which was right middle cerebral artery(MCA) infarct, ICP re-increased after 24 hours and in another 1 case, ICP was not controlled initially. Among 11 cases, 3 cases showed favorable outcome. Conclusion : Mild hypothermia treatment in patients with increased ICP was effective in controlling ICP and mortality was so decreased. More clinical experience and controlled study was need to determine the effectiveness.

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Comparison of Blood Lead Concentration Using Graphite Furnace Atomic Absorption Spectrometry (GF-AAs) and Inductively Coupled Plasma-mass Spectrometry (ICP-MS) (흑연로 원자 흡광 광도법과 유도 결합 플라즈마 질량 분석법을 이용한 혈중 납 농도 비교)

  • Kang, Min-Kyung;Kwon, Jung-Yeon;Kim, Byoung-Gwon;Lim, Hyoun-Ju;Seo, Jeong-Wook;Kim, Yu-Mi;Hong, Young-Seoub
    • Journal of Environmental Health Sciences
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    • v.45 no.3
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    • pp.258-266
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    • 2019
  • Objectives: In this study, blood lead was analyzed using graphite furnace atomic absorption spectrometry (GF-AAs) and inductively coupled plasma mass spectrometry (ICP-MS). We tried to examine the difference and consistency of the analytical values and the applicability of the analytical method. Methods: We selected 57 people who agreed to participate in this study. After confirming the linearity of the calibration standard curves in GF-AAs and ICP-MS, the concentrations of lead in quality control material and samples were measured, and the degree of agreement was compared. Results: The detection limit of the ICP-MS was lower than that of GF-AAs. The coefficient of variation of reference materials was shown to be stable in the ICP-MS and GF-AAs. When the correspondence between the two equipments was verified by bias of the analysis values, a concordance was shown, and approximately 98% of the ideal reference lines were present within ${\pm}40%$ of the deflection. Conclusion: GF-AAs showed high sensitivity to single heavy metal analysis, but it took much time and showed higher detection limit than ICP-MS. Therefore, it would be considered necessary to switch to ICP-MS analysis method, considering that the level of lead exposure is gradually decreasing.

Deposition Efficiency Modeling of TiN ICP-CVD system (TiN ICP-CVD장치의 증착 성능 모델링)

  • Son, Seok-Jae;Ju, Jeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.88-89
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    • 2008
  • TiN ICP-CVD 공정에서의 펄스 직류인가는 동일한 전력공급 하에 보다 효과적이고 우수한성능의 증착능을 나타낸다. 이에 따른 공적 최적화를 위해 전산모사 프로그램을 이용하여 전자의 에너지 분포 모사가 공정에 미치는 영향을 조사하였다.

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Analysis of Copper, Zinc in Serum Using ICP-MS & AAS (ICP-MS와 AAS를 이용한 체내 혈청 Cu, Zn 분석에 관한 연구)

  • Lee, Yea-Jin;Kim, Dong-Yub;Lee, Go-Eun;Jo, Young-Suk
    • Korean Journal of Clinical Laboratory Science
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    • v.41 no.1
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    • pp.31-36
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    • 2009
  • The exposure of human beings to toxic trace metals (Cu, Zn) continues to be an important public health issue and concern. This study was conducted to assess the exposure to trace metals (Cu, Zn) in the general Korean population by inductively coupled plasma mass spectrometry (ICP-MS) and Atomic absorption spectrometry (AAS). Serum samples were obtained from 40 healthy volunteers. Specimens were collected in special container and we applied sample processing to minimize contamination. We used ICP-MS and AAS to analyze simultaneously the concentration of metals including copper, zinc. Distribution of trace metal levels in the general healthy population showed lower values. The results in this study can provide background data for clinical studies associated with trace metal exposure in the korean population.

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A Study of the Potential Interference of ArC+ on the Direct Determination of Trivalent Chromium and Hexavalent Chromium Using Ion Chromatography Coupled with ICP-MS

  • Nam, Sang-Ho;Park, Young-Il;Kim, Jae-Jin;Han, Sun-Ho;Kim, Won-Ho
    • Bulletin of the Korean Chemical Society
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    • v.25 no.4
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    • pp.447-451
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    • 2004
  • Low and high resolution inductively coupled plasma mass spectrometry (ICP-MS) coupled with ion chromatography (IC) has been investigated for speciation of Cr(III) and Cr(VI). In particular, the interference of ArC^+formed by the carbon in a sample on the simultaneous determination of Cr(III) and Cr(VI) has been studied. In chemical speciation, this study shows that quadrupole type ICP-MS with low resolution has a limitation of simultaneous determination fo chromium species if the sample contains the carbon elements. The interference problems can be solved by high resolution ICP-MS.

Determination of heavy metals in mainstream smoke by ORS-ICP-MS (ORS-ICP-MS를 이용한 담배 연기의 중금속 성분 분석)

  • Cho, Sung-Eel;Ji, Sang-Un;Hwang, Keon-Joong
    • Journal of the Korean Society of Tobacco Science
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    • v.30 no.1
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    • pp.25-32
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    • 2008
  • In this study, we compared three different pretreatment methods, such as block digestion, microwave digestion and solvent injection, coupled with Octopole Reaction System(ORS)-ICP-MS was used for the quantification of heavy metals in mainstream smoke of 2R4F reference cigarette, and then evaluated those efficiencies in the recovery, repeatability and reproducibility. In all methods, volatile heavy metals, As, showed the highest CV value, and Cd showed the lowest one. However, the solvent injection method showed the most stable recovery rate and CV value of 2.36 %. This method showed also advantages in time-consuming and compatibility with ICP-MS system. This results demonstrate that solvent injection method can be recommended as a superior pretreatment procedure to be able to reduce contaminants and spectral interference as well as loss of the elements interested.

The Power Rating Design of Inductively Coupled Plasma Light Source and The Electrical Dependency Between Parameters (ICP 광원의 정격용량 설계 요소와 전기적 의존성)

  • Kim, Hyun-Il;Park, Dae-Hee;Chang, Hong-Soon;Baek, Soo-Hyun;Yim, Youn-Chan
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.3
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    • pp.453-457
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    • 2008
  • We studied on the dependency of parameters which those were used to design a ballast of ICP light source. These parameters were derived from Barkhausen criterion equation about the oscillating condition of ballast. Comparing with a change of turns, we can suggest that a change of l is suitable to control a $I_p$ of an ICP light source. According to the Z-l equation, we can find an optimum rating power of ICP light sources corresponding to l.