• Title/Summary/Keyword: ITO pattern

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Development of Defect Inspection System for PDP ITO Patterned Glass (PDP ITO 패턴유리의 결함 검사시스템 개발)

  • Song Jun Yeob;Park Hwa Young;Kim Hyun Jong;Jung Yeon Wook
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.12
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    • pp.92-99
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    • 2004
  • The formation degree of sustain (ITO pattern) decides quality of PDP (Plasma Display Panel). For this reason, it makes efforts in searching defects more than 30 un as 100%. Now, the existing inspection is dependent upon naked eye or microscope in off-line PDP manufacturing process. In this study developed prototype inspection system of PDP 170 glass is based on line-scan mechanism. Developed system creates information that detects and sorts kinds of defect automatically. Designed inspection technology adopts multi-vision method by slip-beam formation for the minimum of inspection time and detection algorithm is embodied in detection ability of developed system. Designed algorithm had to make good use of kernel matrix that draws up an approach to geometry. A characteristic of defects, as pin hole, substance, protrusion, are extracted from blob analysis method. Defects, as open, short, spots and et al, are distinguished by line type inspection algorithm. In experiment, we could have ensured ability of inspection that can be detected with reliability of up to 95% in about 60 seconds.

Development of Defect Inspection System for PDP ITO Patterned Glass

  • Song Jun-Yeob;Park Hwa-Young;Kim Hyun-Jong;Jung Yeon-Wook
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.3
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    • pp.18-23
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    • 2006
  • The formation degree of sustain (ITO pattern) determines the quality of a PDP (Plasma Display Panel). Thus, in the present study, we attempt to detect 100% of the defects that are larger than $30{\mu}m$. Currently, the inspection method in the PDP manufacturing process is dependent upon the naked eye or a microscope in off-line mode. In this study, a prototype inspection system for PDP ITO patterned glass is developed. The developed system, which is based on a line-scan mechanism, obtains information on the defects and sorts the defects by type automatically. The developed inspection system adopts a multi-vision method using slit-beam formation for minimum inspection time and the detection algorithm is embodied in the detection ability. Characteristic defects such as pin holes, substances, and protrusions are extracted using the blob analysis method. Defects such as open, short, spots and others are distinguished by the line type inspection algorithm. It was experimentally verified that the developed inspection system can detect defects with reliability of up to 95% in about 60 seconds for the 42-inch PDP panel.

Effects of Oxygen Partial Pressure on ITO Thin Films PrePared by Reactive dc Magenetron Sputtering (반응성 dc 미그네트론 스퍼링법으로 제조된 IPO박막에 미치는 산소분압의 영향)

  • 신성호;신재혁;박광자;김현우
    • Journal of the Korean institute of surface engineering
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    • v.31 no.3
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    • pp.171-176
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    • 1998
  • Transparent conducting ITO (Indium Tin Oxide) thin films were prepared on soda lime glass by reactive dc magnetron sputtering mothod. The maaterial properties were measured by the X-ray diffraction meter (XRD) and atomic force microscopy (AFM) scanning. As a resuIts, the (400) park for $O_2 gas rate 2% grows uniquely as the preferred orientaon. However, the (400) peak exists at $O_2 gas rate 5% as well as the (222) peak appears abruptly as the main orietation. Both <100> and <111> grain alignments are consisted simultaneously in the XRE pattern of ITO thin films. The electrical charcteristics were esimated by the electrical resistivity, optical transmission, and Hall mobillty, ect. The resistivity of ITO thin film deposited at 4cm from the substrate center is increased from $2\times10^-4$ to $8\times10^-4\Omega$cm as a function of $O_2$ gas pressure (0~5%). The optical transmission curves with a rising of $O_2$ gas rate become shifted into longer wavelength range.

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Evaluation of the ohmic contact resistivity in Plasma display panels

  • Yang, Seung-Hee;Moon, Cheol-Hee
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.882-885
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    • 2006
  • The contact resistivity of the black interlayer which has been introduced between BUS and ITO electrodes in a plasma display panel was evaluated using two kinds of specially designed test electrode patterns. Of the two, type 2 pattern was able to evaluate the contact resistivity more successfully, which was calculated as about $250{\Omega}$ in the suggested test pattern structure.

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Study of SF6/Ar plasma based textured glass surface morphology for high haze ratio of ITO films in thin film solar cell

  • Kang, Junyoung;Hussain, Shahzada Qamar;Kim, Sunbo;Park, Hyeongsik;Le, Anh Huy Tuan;Yi, Junsin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.430.2-430.2
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    • 2016
  • The front transparent conductive oxide (TCO) films in thin fill solar cell should exhibit high transparency, conductivity, good surface morphology and excellent light scattering properties. The light trapping phenomenon is limited due to random surface structure of TCO films. The proper control of surface structure and uniform cauliflower TCO films may be appropriate for efficient light trapping. We report light trapping scheme of ICP-RIE glass texturing by SF6/Ar plasma for high roughness and haze ratio of ITO films. It was observed that the variation of etching time, pattern size and Ar flow ratio during ICP-RIE process were important factors to improve the diffused transmittance and haze ratio of textured glass. The ICP-RIE textured glass showed low etching rates due to the presence of metal elements like Al, B, F and Na. The ITO films deposited on textured glass substrates showed the high RMS roughness and haze ratio in the visible wavelength region. The change in surface morphology showed negligible influence on electrical and structural properties of ITO films. The ITO films with high roughness and haze ratio can be used to improve the performance of thin film solar cells.

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Fabrication of Silver Micro Lines by Ink-Jet Method (잉크젯 기법을 이용한 은 미세라인 형성)

  • Byun, Jong-Hoon;Seo, Dong-Soo;Choi, Yuungmin;Chang, Hyunju;Kong, Ki-Jeong;Lee, Jung-O;Ryu, Beyong-Hwan
    • Journal of the Korean Ceramic Society
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    • v.41 no.10 s.269
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    • pp.788-791
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    • 2004
  • We have studied the fabrication of silver micro lines using the silver nano sol on ITO substrate by an ink-jet method. The average particles size of $10wt\%$ silver nano sol synthesized with polyelectrolytes was smaller than 10 nm. The pattern formation of silver nano sol on the substrate closely related with the contact angle of the silver nano sol. The dot shaped of silver nano sol on bare ITO substrate was formed due to the high contact angle of silver nano sol. When ITO substrates was treated with 100 ppm polyethylenimine for silver nano sol patterning, fine silver micro lines of $60{\sim}100{\mu}m$ width was fabricated by ink-jet method.

Developments of Transparent ac-PDPs

  • Choi, Hak-Nyun;Lee, Seog-Young;Kim, Yong-Seog
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1621-1624
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    • 2008
  • Transparent ac-PDP test panel was prepared via a combination of materials including ITO sustaining electrodes, thin film dielectric layer and nano-sized phosphor powders. The thin film dielectric layer was prepared by E-beam evaporation process and phosphor layer was deposited on metal mesh pattern by electrophoretic deposition process. The optical transmittance and luminance of the panel indicated that full color transparent ac-PDP is feasible with the approach.

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Characteristics on electrode pattern & Pt grid of dye-sensitized Solar Cell (염료 감응형 태양 전지의 전극 패턴 및 Pt 그리드에 따른 특성)

  • Lee Imgeun;Choi Jinyoun;Park Sungjin;Park Sungjin;Lee Dongyoon;Kim Heeje
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.06a
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    • pp.177-180
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    • 2005
  • 본 연구에서는 염료 감응형 태양전지의 효율 향상을 위한 유리 기판 및 전극 패턴에 따른 특성 변화와 대면적화 모듈을 위한 금속 그리드의 특성을 보여준다. 단위 셀 단위의 기본적인 재료와 기존의 제조 방법에 의해 제조된 염료 감응형 태양전지(DSC)는 높은 내부 저항으로 인하여 대면적 셀의 변환 효율은 치명적으로 저하된다. 또한 증가하는 내부 저항 감소를 위해서 외부적인 제조 공정이 추가되지 않고서는 불가능하다. 따라서 본 논문에서는 TCO(ITO) 식각, $TiO_2$ 식각, $50mm{\times}50mm$ 셀과 $100mm{\times}30mm$ 셀의 특성 비교 실험을 통해서 변환 효율 상승효과를 얻었고 광전류 포집 향상을 기대하기 위해 Pt 그리드를 이용해 current correcting line을 증착시켰다.

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Relationship between Replication and Structure of Micro/Nano Molded Parts

  • Ito, Hiroshi;Kazama, Kunihiko;Kikutani, Takeshi
    • Proceedings of the Polymer Society of Korea Conference
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    • 2006.10a
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    • pp.368-368
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    • 2006
  • Micro-molded parts can be defined as parts with microgram weight, parts with micro-structured surface, and parts with micro-precision. In this study, various micro-scale molded parts for various polymers were produced by using a precision micro-molding machine. Molded parts with nano-structure surface were also produced to analyze the effect of molding conditions on replication of surface pattern and higher-order structure development of molded parts. Replication of molded parts was influenced by material properties, molding conditions and size of surface pattern. Higher-order structure of molded parts was investigated by using polarized microscope. Skin-shear-core regions inside the molded parts were observed and shear region affected to surface replication.

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