• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.135-136
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• 2008

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12
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• pp.1115-1120
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• 2003

In this paper, we investigated the position dependent stress distribution of indium-tin-oxide (ITO) film on Polycarbonate (PC) substrate by external bending force. It was found that there are the maximum crack density at the center position and decreasing crack density as goes to the edge, In accordance with crack distribution, it was observed that the change of electrical resistivity of ITO islands is maximum at the center and decrease as goes to the edge. From the result that crack density is increasing at same island position as face plate distance (L) decreases, it is evident that the more stress is imposed on same island position as L decreases.

• Laser Solutions
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• v.16 no.4
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• pp.1-6
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• 2013

Femtosecond laser patterning of ITO on a touch screen panel with a shaped fs laser beam was investigated. A quasi flat-top beam was formed using a variable mask and a planoconvex lens. The spatial profile of the original Gaussian beam and the shaped beam were monitored by a CCD beam profiler. The laser patterned ITO film was examined using an optical microscope, Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Spectroscopy (EDS), and Atomic Force Microscope (AFM). It turned out that the quality of the ITO pattern fabricated by a shaped beam is superior to that of the pattern without beam shaping in terms of debris generation, height of the craters, and homogeneity of the bottom. Optimum processing window was determined at the laser irradiance exhibiting 100% removal of Sn. The removal rate of In was measured to be 83%.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.11
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• pp.8-12
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• 2008

For the reduction of fabrication cost and process time of AC plasma display panel (PDP), indium tin oxide (ITO) layer was patterned as bus electrode using Nd:$YVO_4$ laser. In comparison with the chemically wet etched ITO patterns, laser ablated ITO patterns showed the formation of shoulders and ripple-like structures at the edge of the ITO lines. For the reduction of shoulders and ripple-like structures, pulse repetition rate and scan velocity of laser was changed. In addition, we analyzed a discharge characteristic of PDP test panel to observe how the shoulders and ripple-like structures influence on the PDP. Based on experimental results, the pattern etched at the 500 mm/s and 40 kHz was better than any other condition. From this experiment we could see the possibility of the laser direct patterning for the application to the patterning of ITO in AC-PDP.

• Laser Solutions
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• v.17 no.1
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• pp.1-6
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• 2014

Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.193-194
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• 2009

This report makes an important correction to estimating angular dependent emission pattern of Organic Light-Emitting Diodes (OLEDs). Today, experiments on measuring angular light intensity of OLEDs are conducted without considering the difference between the view angle identified by photodiode and the actual angle being measured. ITO-TPD-$Alq_3$-LiF-Al Organic Light-Emitting Diode was used to find out the degree of the error. In this case, the difference in average was about $1^*$, which is highly significant. Since the difference varies from case to case, the need for adjustment must be evaluated for each case.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.7
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• pp.230-238
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• 2014

In this paper, we propose the possible way of accurate analysis and examination of ITO sensor to discriminate whether mutual capacitance ITO sensor is defective by using mutual capacitance of data in each node which consists of electrodes inside of ITO sensor. We have analyzed the structure characteristic of mutual capacitance ITO sensor which is used as an input device for not only small size electronics like mobile phone and tablets but also big size electronics and designed the circuit to inspect ITO sensor using touch screen panel IC. Set a variable related with mutual capacitance of charge and discharge and Implement to find and analyze accurate position when defect is made through the data from each node of ITO sensor. First, we can set a yield effective range through the first experiment data of mutual capacitance ITO sensor and by using the data of each node of ITO sensor which is the result from the second experiment, we can verify accuracy and effectiveness of effective range from the first experiment as a sample which is used in this experiment.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.241.2-241.2
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• 2014

We present highly transparent liquid crystal displays (LCDs) using hybrid films based on carbon nanomaterials, metal grid, and indium-tin-oxide (ITO) grid. Carbon based nanomaterials are used as transparent electrodes because of high transmittance. Despite of their high transmittance they have relatively high sheet resistance. To solve this problem, we applied grid and made hybrid conductive films based on carbon nanomaterials. Conventional photolithography processes were used to make a grid pattern of metal and ITO. To fabricate transparent conductive films, carbon nanotube (CNT) ink was spin coated on the grid pattern. The transparency of the conductive film was controlled by shape and size of the grid pattern and the thickness of CNT films. The optical transmittance of CNT-based hybrid films is 92.2% and sheet resistance is also reduced to $168{\Omega}/square$. These substrates were used for the fabrication of typical twisted nematic (TN) LCD cells. From the characteristics of LCD devices such as transmittance, operating voltage, voltage holding ratio our devices were comparable to those of pristine ITO substrates. The result shows that the hybrid conductive films based on carbon nanomaterials could be alternative of ITO for the highly transparent LCDs.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1556-1559
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• 2005

Indium-tin oxide (ITO) films were deposited by a low-frequency (LF, 100 Hz) magnetron sputtering on glass substrates at the room temperature. The effects of the film thickness on the structural, electrical and optical properties of ITO films were investigated. With the film thickness the films reveal better crystallinity, showing both (222) and (400) pla nes in the XRD pattern. The optical transmittance and the sheet resistance of the films decreased with the increasing thickness. In addition, the electrical properties of ITO films were improved after annealing in a vacuum.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.339.2-339.2
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• 2014

터치패널은 저항막 방식, 정전용량 방식, 적외선방식, Camera방식 등을 사용하고 있으며 현재 널리 상용화 되어 있는 방식은 정전용량 방식이다. 최근 터치스크린의 면적이 점점 커지게 되면서 점차 저저항, 고투과율을 가지는 IM ITO (Index matching ITO)를 요구하고 있다. 본 연구에서는 중대형 사이즈(15inch 이상)의 Cover glass 일체형 터치센서 구현을 위한 저저항(60ohm/sq이하), 고투과(88% 이상)의 IMITO Glass를 제작하여 전기적,광학적 특성을 분석하여 IMITO 성막조건을 최적화시키는 연구를 하였다. 또한 TSP의 Pattern 시인성을 향상시키기 위해 Index matching층을 고굴절재료와 저굴절 재료를 사용한 다층박막을 형성하여 반사율(0.5% 이하)을 최소화시켜 구현하였다.