• 제목/요약/키워드: ITO Thin Film

검색결과 559건 처리시간 0.03초

RF 마그네트론 스퍼터링을 이용한 p 타입 투명전도 산화물 SrCu2O2 박막의 제조 (Fabrication of P-type Transparent Oxide Semiconductor SrCu2O2 Thin Films by RF Magnetron Sputtering)

  • 석혜원;김세기;이현석;임태영;황종희;최덕균
    • 한국재료학회지
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    • 제20권12호
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    • pp.676-680
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    • 2010
  • Most TCOs such as ITO, AZO(Al-doped ZnO), FTO(F-doped $SnO_2$) etc., which have been widely used in LCD, touch panel, solar cell, and organic LEDs etc. as transparent electrode material reveal n-type conductivity. But in order to realize transparent circuit, transparent p-n junction, and introduction of transparent p-type materials are prerequisite. Additional prerequisite condition is optical transparency in visible spectral region. Oxide based materials usually have a wide optical bandgap more than ~3.0 eV. In this study, single-phase transparent semiconductor of $SrCu_2O_2$, which shows p-type conductivity, have been synthesized by 2-step solid state reaction at $950^{\circ}C$ under $N_2$ atmosphere, and single-phase $SrCu_2O_2$ thin films of p-type TCOs have been deposited by RF magnetron sputtering on alkali-free glass substrate from single-phase target at $500^{\circ}C$, 1% $H_2$/(Ar + $H_2$) atmosphere. 3% $H_2$/(Ar + $H_2$) resulted in formation of second phases. Hall measurements confirmed the p-type nature of the fabricated $SrCu_2O_2$ thin films. The electrical conductivity, mobility of carrier and carrier density $5.27{\times}10^{-2}S/cm$, $2.2cm^2$/Vs, $1.53{\times}10^{17}/cm^3$ a room temperature, respectively. Transmittance and optical band-gap of the $SrCu_2O_2$ thin films revealed 62% at 550 nm and 3.28 eV. The electrical and optical properties of the obtained $SrCu_2O_2$ thin films deposited by RF magnetron sputtering were compared with those deposited by PLD and e-beam.

유리 덮개로 보호된 OLED소자의 발광특성 저하 연구 (Degradation Mechanisms of Organic Light-emitting Devices with a Glass Cap)

  • 양용석;추혜용;이정익;박상희;황치선;정승묵;도이미;김기현
    • 한국진공학회지
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    • 제15권1호
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    • pp.64-72
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    • 2006
  • 우리는 tris-(8-hydroxyquinoline) aluminum (Alq3)와 같은 단분자 유기물 박막을 사용하여 유기물 발광 소자(OLEDs)를 제작하였다. OLEDs는 ITO가 증착된 유기 기판 위에서 제조되었고, 수명 측정 이후의 OLEDs에 대한 발광, 축전 용량, 유전 손실 특성 등을 측정하였다. 여기서, 수명 측정을 위하여 사용한 인가 전류는 0.5mA 에서 9mA까지 였고, 수명의 인가 전류 의존성은 약 2 mA 부근에서 다르게 관찰되었다. C-V 특성 곡선에서 나타난 축전 용량의 봉우리들은 유기물 내의 분극과 유기물과 금속의 경계에서 나타난 분극의 영향으로 추측된다. 그리고, 2 mA 보다 낮은 전류 하에서 수명 측정 후 발광특성이 저하된 OLEDs에서는 소자 내의 분극 크기의 감소와 전하 유입 장벽의 낮아짐이 같이 관찰되었다.

Multi-component $ZnO-In_2O_3-SnO_2$ thin films deposited by RF magnetron co-sputtering

  • Lee, Byoung-Hoon;Hur, Jae-Sung;Back, Sang-Yul;Lee, Jeong-Seop;Song, Jung-Bin;Son, Chang-Sik;Choi, In-Hoon
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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    • pp.68-71
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    • 2006
  • Multi-component $ZnO-In_2O_3-SnO_2$ thin films have been prepared by RF magnetron co-sputtering using targets composed of $In_3Sn_4O_{12}$(99.99%) [1] and ZnO(99.99%) at room temperature. $In_3Sn_4O_{12}$ contains less In than commercial ITO, so that it lowers cost. Working pressure was held at 3 mtorr flowing Ar gas 20 sccm and sputtering time was 30 min. RF power ratio [RF1 / (RFI + RF2)] of two guns in sputtering system was varied from 0 to 1. Each RF power was varied $0{\sim}100W$ respectively. The thickness of the films was $350{\sim}650nm$. The composit ion concentrations of the each film were measured with EPMA, AES and XPS. The low resistivity of $1-2\;{\times}\;10^3$ and an average transmittance above 80% in the visible range were attained for the films over a range of ${\delta}\;(0.3\;{\leq}\;{\delta}\;{\leq}\;0.5)$. The films also showed a high chemical stability with time and a good uniformity.

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Study of Energy Level Alignment at the Interface of P3HT and PCBM Bilayer Deposited by Electrospray Vacuum Deposition

  • Kim, Ji-Hoon;Hong, Jong-Am;Seo, Jae-Won;Kwon, Dae-Gyoen;Park, Yong-Sup
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.134-134
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    • 2012
  • We investigated the interface of poly (3-hexylthiophene) (P3HT) and C61-butyric acid methylester (PCBM) by using photoelectron spectroscopy (PES). These are the most widely used materials for bulk heterojunction (BHJ) organic solar cells due to their high efficiency. Study of the BHJ interfaces is difficult because the organic films are typically prepared by spin coating in ambient conditions. This is incompatible with the interface electronic structure probes such as PES, which requires ultrahigh vacuum conditions. Study of interface requires gradual deposition of thin films that is also incompatible with the spin coating process. In this work, we used electrospray vacuum deposition (EVD) technique to deposit P3HT and PCBM in high vacuum conditions. EVD allows us to form polymer thin films onto ITO substrate in a step-wise manner directly from solutions and to use PES without exposing the sample to the ambient condition. Although the morphology of the EVD deposited P3HT films observed by optical and atomic force microscopes is quite different from that of the spin coated ones, the valence region spectra were similar. PCBM was deposited on the P3HT film in a similar manner and the energy level alignment between these two materials was studied. We discuss the relation between Voc of P3HT:PCBM solar cell and HOMO-LUMO energy offset obtained in this study.

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전자빔 조사에 따른 In2O3/Ti 적층박막의 전기적, 광학적 특성 변화 (Influence of Electron Irradiation on the Structural Electrical and Optical Properties of ITO/Ti bi-layered Films)

  • 문현주;전재현;송영환;오정현;공태경;최동혁;손동일;김대일
    • 열처리공학회지
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    • 제28권6호
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    • pp.310-314
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    • 2015
  • We have considered the influence of electron irradiation on the optical and electrical properties of $In_2O_3/Ti$ bi-layered films prepared with RF and DC magnetron sputtering. The $In_2O_3/Ti$ thin films irradiated at 600 eV shows the lowest resistivity of $6.9{\times}10^{-4}{\Omega}cm$. The optical transmittance in a visible wave length region also influenced with the electron irradiation energy. The film that electron irradiated at 600 eV shows 82.9% of optical transmittance in this study. By comparison of figure of merit, it is concluded that the opto-electrical performance of $In_2O_3/Ti$ bi-layered film is improved with electron irradiation.

적층구조에 적용하기 위한 WO3/Ag/WO3 투명전극막의 표면 특성 제어 (Surface Properties of WO3/Ag/WO3 Transparent Electrode Film with Multilayer Structures)

  • 강동수;이붕주;권홍규;신백균
    • 전기학회논문지
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    • 제64권9호
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    • pp.1323-1329
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    • 2015
  • The WO3/Ag/WO3 transparent thin films are fabricated by the RF magnetron sputtering. This has a transmittance of front and rear about 90% in the visible light range and surface resistance of 6.41Ω/□. In this paper, we analyzed the surface characteristics caused by the working pressure and O2 plasma surface treatment to apply a transparent electrode that was prepared to the laminated structure with other materials. The working pressure was changed in the WO3 film to 10mTorr, 7mTorr, and 5mTorr, it showed a lower than roughness of conventional ITO. In addition, by 55.5774 J/m2 at 5mTorr, it shows the hydrophobic property with lower process pressure. O2 plasma surface treatment was changed at the condisions of the RF power to 150W, 100W, and 50W and the process time to 240s, 180s, 120s, and 60s. The surface roughness are the maximum roughness(Rmax) 6.437nm and the average roughness(Rq) 0.827nm at RF power 150W, and the maximum roughness (Rmax) 6.880nm and the average roughness (Rq) 0.839nm at process time 240sec. It showed a lower value than the surface treatment. also about working pressure and process time is increased, it showed the hydrophobic.

Effect of the Length of Side Group Substitution on Optical and Electroluminescene Properties

  • Shin, Hwangyu;Kang, Hyeonmi;Kim, Beomjin;Park, Youngil;Yu, Young-Jun;Park, Jongwook
    • Bulletin of the Korean Chemical Society
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    • 제35권10호
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    • pp.3041-3046
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    • 2014
  • Blue emitting materials, 9,10-bis-biphenyl-4-yl-anthracene (AC-P), 9,10-bis-[1,1';4',1"]terphenyl-4-yl-anthracene (AC-DP), and 9,10-bis[3",5"-deiphenyltriphenyl-4'-yl]anthracene (AC-TP) were synthesized through boration and Suzuki aryl-aryl coupling reaction. EL performance of blue light-emitters was optimized and improved by varying the chemical structures of the side groups. In the thin film state, the three materials exhibit $PL_{max}$ values in the range of 442-456 nm. EL device with the synthesized compounds in the following configuration was fabricated: ITO/4,4',4"-tris(N-(2-naphthyl)-N-phenylamino)triphenylamine (2-TNATA) 60nm/N,N'-bis (naphthalene-1-yl)-N,N'-bis(phenyl)benzidine (NPB) 15nm/synthesized blue emitting materials (30nm)/1,3,5-tri(1-phenyl-1H-benzo[d]imidazol-2-yl)phenyl (TPBi) 20nm/LiF 1nm/Al 200nm. The current efficiency and C.I.E. value of AC-TP were 3.87 cd/A and (0.15, 0.12). A bulky and non-planar side group helps to prevent ${\pi}-{\pi}^*$ stacking interaction, which should lead to the formation of more reliable amorphous film. This is expected to have a positive effect on the high efficiency of the operating OLED device.

Effect of Au-ionic Doping Treatment on SWNT Flexible Transparent Conducting Films

  • 민형섭;정명선;최원국;김상식;이전국
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.111.1-111.1
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    • 2012
  • Interest in flexible transparent conducting films (TCFs) has been growing recently mainly due to the demand for electrodes incorporated in flexible or wearable displays in the future. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance on PET substrates is researched Arc-discharge SWNTs were dispersed in deionized water by adding sodium dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then was doped with Au-ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. This was confirmed and discussed on the XPS and UPS studies. We show that 87 ${\Omega}/{\Box}$ sheet resistances with 81% transmittance at the wavelength of 550nm. The changes in electrical and optical conductivity of SWNT film before and after Au-ionic doping treatments were discussed. The effect of Au-ion treatment on the electronic structure change of SWNT films was investigated by Raman and XPS.

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가상 n형 폴리아닐린의 제조 및 전기화학적 특성평가 (Preparation of pseudo n-type Polyaniline and Evaluation of Electrochemical Properties)

  • 김래현;최선용;정건용
    • 멤브레인
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    • 제13권3호
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    • pp.162-173
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    • 2003
  • 폴리아닐린(polyaniline, PANI)과 도판트인 camphorsulfonic acid(CSA), dodecyl benzene sulfonic acid(DBSA)와 의몰비 변화에 따라 가상 n형 PANI을 제조하였다. FT-IR측정으로부터 도핑유무를 확인하였고, indium thin oxide(ITO)에 코팅하여 제조한 전극에 대해, 순환전압전류법과 교류임피던스법을 이용하여 도판트의 영향을 조사하였다. FT-IR과 순환전압전류법으로부터, 제조된 전극이 양이온의 도핑-탈도핑이 일어나는 가상 n형의 특성을 가짐을 확인하였다. 순환전압전류법에서 산화-환원 피크전류값은 PANI/DBSA에 비하여 PANI/CSA가 약 5 배정도 더 큰 결과를 보였다. 교류임피던스법으로부터, 두 전극 모두 이상적인 Randles의 등가회로와 유사한 거동을 보였다. 전하이동저항은 PANI/CSA에서 $1.14~1.09 k{\Omega}$으로 거의 일정한 값을 보였고, PANI/DBSA는 DBSA 몰 비에 증가에 따라 $27.73{\sim}8.37K{\Omega}$으로 감소하여 나타났다. 이중층용량 또한 PANI/CSA는 $13.47{\sim}14.59 {\mu}F$으로 거의 일정하였으나, PANI/DBSA는 DBSA 몰 비 증가에 따라 $0.49{\sim}l.20 {\mu}F$으로 증가를 보였다. 결과적으로 PANI/CSA의 전기적 특성이 더 좋았으나, 도판트의 몰 비 증가에 따른 특성은 PANI/CSA 전극은 거의 일정하였고, PANI/DBSA 전극은 전기적 활성이 좋아짐을 알 수 있었다.

P3HT:PCBM 활성층을 갖는 유기 박막태양전지의 후속 열처리 효과 (The Post Annealing Effect of Organic Thin Film Solar Cells with P3HT:PCBM Active Layer)

  • 장성규;공수철;장호정
    • 마이크로전자및패키징학회지
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    • 제17권2호
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    • pp.63-67
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    • 2010
  • 본 연구에서는 P3HT와 PCBM 물질을 전자도너와 억셉터 광활성층 물질로 사용하여 벌크이종접합 구조를 갖는 Glass/ITO/PEDOT:PSS/P3HT-PCBM/Al 구조의 유기박막태양전지를 제작하였다. P3HT와 PCBM은 각각 0.5 wt%의 농도로 톨루엔 용액에 용해하였다. 광활성층 농도를 최적화하기 위하여 P3HT:PCBM= 3:4, 4:4, 4:3 wt%의 농도비로 소자를 제작하고, 농도비에 따른 전기적 특성을 조사하였다. 또한 활성층의 후속열처리 온도가 소자의 전기적 특성에 미치는 영향을 조사하였다. P3HT와 PCBM의 농도비가 4:4 wt%의 비율에서 가장 우수한 전기적 특성을 나타내었으며, 이때 단락전류밀도 ($J_{SC}$), 개방전압 ($V_{OC}$), 및 충실인자 (FF)는 4.7 $mA/cm^2$, 0.48 V 및 43.1%를 각각 나타내었다. 또한 전력변환효율(PCE)은 0.97%의 값을 얻었다. 최적화된 농도비를 갖는 태양전지 소자에 대해 $150^{\circ}C$에서 5분, 10분, 15분, 20분간 후속 열처리를 실시한 결과 P3HT 전자도너의 흡광계수가 증가하는 경향을 보였다. 후속 열처리 조건이 $150^{\circ}C$에서 15분인 경우 전기적 특성이 열처리 하지 않은 소자에 비해 특성이 개선되었다. 즉, 이때의 전기적 특성은 $J_{SC},\;V_{OC}$, FF, PCE의 값이 각각 7.8 $mA/cm^2$, 0.55 V, 47%, 2.0%를 나타내었다.