• 제목/요약/키워드: ITO박막

검색결과 824건 처리시간 0.029초

나노인덴테이션과 주사탐침현미경을 이용한 박막 재료의 특성평가 (Characterization of Thin Film Materials by Nanoindentation and Scanning Probe Microscopy)

  • 김봉섭;윤존도;김종국
    • 한국재료학회지
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    • 제13권9호
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    • pp.606-612
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    • 2003
  • Surface and mechanical properties of thin films with submicron thickness was characterized by nanoindentation with Berkovich and Vickers tips, and scanning probe microscopy. Nanoindention was made in a depth range of 15 to 200 nm from the surface by applying tiny force in a range from 150 to $9,000 \mu$N. Stiffness, contact area, hardness, and elastic modulus were determined from the force-displacement curve obtained. Reliability was first tested by using fused quartz, a standard sample. Elastic modulus and hardness values of fused quartz measured were the same as those reported in the literature within two percent of error. Mechanical properties of ITO thin film were characterized in a depth range of 15∼200nm. As indentation depth increased, elastic modulus and hardness decreased by substrate effect. Ion beam deposited DLC thin films were indented in a depth range of 40∼50 nm. The results showed that the DLC thin film using benzene and bias voltage 0∼-50 V has elastic modulus and hardness value of 132 and 18 GPa respectively. Pure DLC thin films showed roughnesses lower than 0.25 nm, but silicon-added DLC thin films showed much higher roughness values, and the wavy surface morphology.

금속나노와이어를 이용하여 제작한 박막의 특성 향상을 위한 나노용접에 관한 연구

  • 오지수;염근영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.118-118
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    • 2018
  • Indium tim Oxide (ITO) 의 idium 공급 제한과 그 고유한 특성상 유연기판에 적용에는 한계가 있어 대체 물질 개발이 활발히 이뤄지는 가운데, 금속나노와이어는 그 중에서도 각광받는 물질 중 하나이다. 금속나노와이어 네트워크는 높은 전기 전도성, 투명성과 같은 많은 이점을 가지며 유연기판에 다양한 방법으로 손쉽게 제조할 수 있다. 이러한 장점에도 불구하고 금속나노와이어는 자체의 고유한 표면 거칠기 및 접착 문제 등으로 인해 그 한계를 가지며, 또한 polynivnylpyrolidone (PVP)의 코팅이 불가피하기 때문에 나노와이어 간의 높은 접촉저항 및 junction 문제는 해결과제로 남아있다. 본 연구에서는 이러한 금속나노와이어의 문제를 극복하기 위해 유도전류에 의해 와전류를 발생시켜 나노와이어 junction 부분에서 짧은 시간동안 국소적으로 용접시킬 수 있는 induction coil system을 구축하였다. 금속나노와이어 전극 기판의 투명도를 유지하며 기판과 나노와이어에 영향을 미치지 않고 electric field를 통해 nano-welding 하는 효과를 기대하였다. 그 결과, 실험에 사용한 은나노와이어와 구리나노와이어는 초기 투과도를 유지하면서 면저항을 각각 약 68 %, 50% 감소하는 효과를 보였다. 또한 표면 이미지 측정을 하여 표면 거칠기도 감소하였음을 확인하였으며, welding됨에 따라 내구성 향상에도 영향을 미쳤음을 bending test 와 adhesion test를 통해 그 특성이 향상되었음을 확인하였다. 본 연구에서 실시한 와전류를 이용한 나노용접 방법은 건식방법이며 열이 직접적으로 발생하지 않기 때문에 모든 종류의 금속 나노와이어에 적용될 것으로 기대하며, 짧은 시간과 저렴한 비용으로 넓은 영역에 적용 가능하다는 장점을 가져 다방면에 활용 가능할 것으로 기대한다.

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Photoacryl을 게이트 절연층으로 사용한 유기 박막트랜지스터의 전기적 특성에 관한 연구 (A Study on the Electrical Characteristics of Organic Thin Film Transistor using Photoacryl as Gate Dielectric Layer)

  • 김윤명;표상우;김준호;신재훈;김영관;김정수
    • 한국전기전자재료학회논문지
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    • 제15권2호
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    • pp.110-118
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    • 2002
  • Organic thin film transitors(OTFT) are of interest for use in broad area electronic applications. And recently organic electroluminescent devices(OELD) have been intensively investigated for using in full-color flat-panel display. We have fabricated inverted-staggered structure OTFTs at lower temperature using the fused-ring polycyclic aromatic hydrocarbon pentacene as the active eletronic material and photoacryl as the organic gate insulator. The field effect mobility is 0.039∼0.17 ㎠/Vs, on-off current ratio is 10$\^$6/, and threshold voltage is -7V. And here we report the study of driving emitting, Ir(ppy)$_3$, phosphorescent OELD with all organic thin film transistor and investigated its electrical characteristics. The OELD with a structure of ITO/TPD/8% Ir(ooy)$_3$ doped in BCP/BCP/Alq$_3$/Li:Al/Al and OTFT with a structure of inverted-stagged Al(gate electrode)/photoacry(gate insulator)/pentacene(p-type organic semiconductor)/ Au(source-drain electrode) were fabricated on the ITP patterned glass substrate. The electrical characteristics are turn-on voltage of -10V, and maximum luminance of about 90 cd/㎡. Device characteristics were quite different with that of only OELD.

솔-젤법에 의한 강유전성 PZT 박막의 제조;(II) 치밀화 및 결정화에 미치는 촉매의 영향 (Preparation of Ferroelectric PZT Thin Film by Sol-Gel Processing; (II) Effect of Catalysts on Densification and Crystallization)

  • 김병호;박성호;김병호
    • 한국세라믹학회지
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    • 제32권7호
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    • pp.783-792
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    • 1995
  • Sol-Gel derived ferroelectric PZT thin films were fabricated on ITO/Glass and Si/SiO2 substrates. In order to investigate the effect of catalysts on the densification and crystallization of PZT thin films, a nitric acid or ammonium hydroxide was added to the PZT stock solution at the state of partial hydrolysis reaction. The measured pH for a stable PZT sol was 5.2~9.3. In case of an acid-catalyzed PZT sol, a highly condensed particulate PZT sol was formed by accelerating the hydrolysis reaction. But weakly branched polymeric PZT sol was formed with a base-catalyzed condition. The difference in densification behavior was not found in the pH range of added catalyst, but the refractive index of PZT thin film was increased rapidly as the annealing temperature increased. The PZT thin film annealed at 54$0^{\circ}C$ for 10 min was fully densified and its refractive index was above 2.4. When the annealing temperature increased, the transition from the pyrochlore phase to perovskite appeared at 54$0^{\circ}C$. The base-catalyzed PZT thin film suppressed to form the pyrochlore phase and proceeded effectively to convert the perovskite phase. This was due to the formation of polymeric molecular structure by controlling the hydrolysis and condensation reaction through the additiion of the ammonium hydroxide.

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아세토니트릴에서 Eosin B에 의한 $SnO_2$ 전극의 감광화 (Photosensitization of $SnO_2$ Electrode by Eosin B in Acetonitrile)

  • 강만구;윤길중;김강진
    • 대한화학회지
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    • 제36권1호
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    • pp.75-80
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    • 1992
  • Thiourea, 1-allyl-2-thiourea, NaI 또는 NaSCN 등의 초감응제 존재하에 광전기화학셀, $ITO/SnO_2/eosin$ B, $NaClO_4/Pt$ 을 이용하여 들뜬 eosin B로부터 박막 전도체 $SnO_2$의 전도띠로 주입되는 광전류의 크기를 장시간에 걸쳐 조사하였다. Thiourea 또는 allylthiourea를 첨가하면, 큰 초기 광전류를 나타내지만 시간에 따라 감소한 반면, 흡광도는 오히려 증가하다가 일정시간 후에는 계속 감소하는 특성을 나타내었다. 이를 분광학적으로 조사한 결과 빛을 받아서 흡광도가 더 큰 물질로 변화하므로 흡광도는 증가하나 형광 양자수율이 보다 더 크게 증가하기 때문에 광전류는 감소하는 것으로 밝혀졌다.

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전기화학적 전착에 의한 ZnSe박막 구조 및 발광특성 (Structural and luminescent properties of ZnSe thin films by electrochemical deposition)

  • 김환동;최길호;윤도영
    • 반도체디스플레이기술학회지
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    • 제7권4호
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    • pp.19-22
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    • 2008
  • Thin film has been an increasing important subject of intensive research, owing to the fact that these films possess desirable optical, electrical and electrochemical properties for uses in many semi-conducting nano-crystal applications, such as light-emitting diodes, lasers and solar cell applications. Here, ZnSe thin films were deposited by electrochemical method for the applications of light emitting diode. Electrochemical deposition of ZnSe thin film is not easy, because of the high difference of reduction potential between zinc ion and selenium acid. In order to handle the band gap of ZnSe crystal thin films easily, electrochemical methods are promising to manufacture these films economically. Therefore we have investigated the present study to characterize zinc selenide thin films deposited on ITO glass plates electrochemically. The luminescent properties of ZnSe films have been evaluated by UV-Vis spectrometer and luminescence spectrometer. And the morphology of the film surface has been discussed qualitatively from SEM images.

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실리콘계 투명하드코팅을 이용한 CNT 투명전도막의 내구성 증진에 관한 연구

  • 하인호;이철승;신권우;서문석;이경일;조진우
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.511-511
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    • 2013
  • 균일한 전기 전도성 및 우수한 광투과성과 내화학성을 갖는 탄소나노튜브(CNT) 기반의 투명전도막(TCF)은 기존의 ITO 박막보다 우수한 유연성을 갖기 때문에 차세대 플렉시블 디스플레이 소재로서 많은 관심을 모으고 있다. 특히 낮은 저항과 투과도가 일정하면서 투명 전도막의 내구성을 향상 및 유지 시키는 연구는 상업화에 가장 필요한 연구 분야이다. 본 연구에서는 PET기판을 이용한 탄소나노튜브로 제작된 투명전도막 위에 오버 코팅을 통한 물성에 따른 내구성 개선 및 유지를 연구하였다. 오버 코팅 물질로는 실리콘계 투명 하드코팅 소재를 기본으로 하고 용매 및 합성 온도을 제어하여 내구성을 개선하고자 하였다. 연구결과 CNT 코팅층과 오버 코팅층과의 젖음성이 물성 향상에 가장 많은 영향을 끼치는 것을 관찰하였고, 특히 젖음성이 증가할수록 투과도와 전기전도도가 향상되는 것을 확인하였다. 구조 분석결과, 이러한 젖음성에 가장 많은 영향을 주는 것은 용매의 비점과 비중 그리고 용질의 합성 온도 임을 확인하였다. 또한 오버코팅 물질 중 고비점 용매가 고온 고습 환경에서 240시간 이상 내구성 테스트 결과, 투명전도성 평가 지수(${\sigma}DC/{\sigma}OP$)가 향상되었고 또한 테스트 전후의 HAZE 변화율이 10%이하 임을 확인하였다.

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다양한 박막 형성법을 사용한 ZnO 전자 추출층이 역구조 고분자 태양전지에 미치는 영향 연구 (Investigation of the Effects of ZnO Thin Film Deposition Methods on Inverted Polymer Solar Cells)

  • 이동구;노승욱;성명모;이창희
    • Current Photovoltaic Research
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    • 제1권1호
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    • pp.59-62
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    • 2013
  • We investigated the effects of ZnO thin film deposition methods on the performance of inverted polymer solar cells with a structure of ITO/ZnO/P3HT:PCBM/MoO3/Al. The ZnO thin films were deposited by various methods (spin coating of nanoparticles, sol-gel process, atomic layer deposition) and their morphology was analyzed by atomic force microscopy (AFM). The device with ZnO nanoparticle thin films showed the highest power conversion efficiency of 3 % with low series resistance and high shunt resistance. The superior performance of the device with the ZnO nanoparticle layer is attributed to better electron extraction capability.

증착조건 및 후-열처리에 따른 $WO_3$박막의 구조와 전기착색 특성 (The Structure and Electrochromic Characteristics of $WO_3$ thin Film with deposition Conditions and Post-Annealing)

  • 조형호;임원택;안일신;이창효
    • 한국진공학회지
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    • 제8권2호
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    • pp.141-147
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    • 1999
  • The electrochromic characteristics of tungsten oxide films are largely affected by deposition conditions, such as substrate temperature and gas flow rate and also post-annealing. We have considered gas flow rate and temperature as important factors having an effect on an electrical, optical phenomenon and structural variation of $WO_3$ . The tungsten oxide films were deposited onto ITO(20$\Omega\box$, 1000$\AA$) using rf magnetron sputtering method. In particular, the films deposited at room temperature were annealed at various temperatures in air. All specimens had crystal structure except one being deposited at room temperature with nearly amorphous-like structure. The specimen deposited at $100^{\circ}C$ had a structure in which the increase in deposition temperature. The specimen deposited at $100^{\circ}C$ had a structure in which the cations$(Li^+)$ are easily movable because of void boundaries induced by regularly arrayed large grains. The specimen deposited at $300^{\circ}C$ had a dense structure with small grains but it exhibited the large mobility and charge density in $WO_3$ because of distinct grain boundaries.

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혼합파우더 및 절연박막층을 이용한 PELD의 광학특성 (EL Devices for LCD Backlight Based on ZnS:Cu Phosphor)

  • 박수길;조성렬;전세호;엄재석;이주성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.391-394
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    • 1998
  • Electroluminescence is the light emission obtained by an electrical excitation energy passing through a phosphor under an applied high electrical field. EL are paid much attention on flat panel display as a backlight and indicator, which are divided into ACPRL(alternating-current powder electroluminescent) and ACTFEL(alternating-current powder electroluminescent). In this paper, Electric and emission properties on ACPEL are investigated based on ZnS:Cu phosphor. The basic structure on this is ITO glass/phosphor/insulator/ backelectrode, CR-M which has high efficiency on thermal properties and dielectric Properties was introduced and BaTiO$_3$ as a insulating layer in order to increase app1ied electric field on phosphor. Changing on Dielectric and emission Properties was caused by a different viscosity of binder which filled on space between phosphor particle. 60cd/$m^2$ under 60V, 2kHz sinusoidal was gotten from ACPELD prepared in this work.

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