• Journal of the Korea Institute of Building Construction
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• v.23 no.2
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• pp.113-121
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• 2023

In this study, the applicability and reproducibility of laser induced breakdown spectroscopy(LIBS) for heavy metal analysis in clinker and 5 types of by-products(crushed stone sludge, blast furnace slag, steel slag, waste concrete sludge, bottom ash) were experimentally reviewed. As a result of ICP-MS, XRF, and LIBS analysis of the six samples, the difference between ICP and XRF was confirmed in the quantitative analysis, but the LIBS analysis showed a difference by element from the standard analysis, and only qualitative analysis of the sample was possible. LIBS analysis wavelength was set for three types of heavy metals(Cd - 214.44nm, Pb - 405.78nm, Hg - 253.65nm). As a result of laser irradiation on the surface of the membrane impregnated with a solution of each concentration(1~1000ppm) and dried, the correlation between the spectral intensity and the concentration was confirmed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.290-290
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• 2011

유도결합플라즈마 장비의 공정에서 안테나의 역할은 매우 중요하다. 유도결합플라즈마의 식각 공정에서도 충분한 식각과 균등한 식각 결과를 얻기 위해 안테나의 역할은 중요한 요인 중 하나이다. 안테나와 공정 웨이퍼간의 거리에 따라 발생하는 플라즈마 밀도나 전자 온도 등이 변화하고 그에 따른 식각정도나 균등성도 달라진다. 본 연구에서는 플라즈마 특성 변화를 관찰하기 위해 기존 유도결합플라즈마 식각 장비의 안테나와 웨이퍼간 거리와 내부 안테나를 웨이퍼와 가깝게 하였을 때의 플라즈마 밀도, 안테나의 전류와 식각률 등을 측정하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.65-65
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• 2009

본 연구에서는 ICP 식각장치 및 $Cl_2$/Ar 플라즈마에 의한 $Ba_2Ti_9O_{20}$(BTO) 박막의 식각 특성을 고찰하였다. XPS 분석 장치를 이용하여 식각 표면 반응을 조사하였으며, 공정 변수 ($Cl_2$/Ar 가스 혼합비, 소스파워, 챔버 압력, 바이어스 파워)에 따라 플라즈마 특성 변화를 Langmuir probe measuring system을 이용하여 추출하였다. $Cl_2$/Ar 가스에서 Ar 가스의 혼합비가 증가함에 따라 BTO 박막의 식각 속도는 감소하였으며, $Cl_2$ 가스만을 사용하는 경우, 31.7 nm/min 으로 가장 높은 식각 속도를 보였다. Ar 가스의 혼합비에 따른 BTO박막의 식각속도 변화는 Langmuir probe 특성과 XPS 분석결과로부터 플라즈마 내에 형성되는 Cl radical density와 밀접한 관련이 있는 것으로 판단할 수 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.87-87
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• 2007

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.05a
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• pp.10-10
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• 1998

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.85.2-85.2
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.137-137
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• 2006

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.288-288
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• 2008

• Journal of the Korean Chemical Society
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• v.48 no.6
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• pp.583-589
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• 2004

In a stream of aqueous sample, trace arsenic ions were quantitatively coprecipitated and detected in ICP-AES through hydride generation. In was used as a coprecipitating reagent. The precipitate was collected on a filter and dissolved by HCl. The eluted As was sent into the reaction coil to generate hydrides and analyzed by ICP. With optimal conditions, and with a sample of 0.3 mL, an enrichment of 70 was obtained with the sampling speed of 10/hr. When compared with coprecipitation and hydride generation technique, the sensitivity was increased by 7 and 10 times, respectively. The limit of detection limit$(3{\sigma})$ was 0.020 ${\mu}g\;L^{-1}$ and the precision was 7-10%. Separation of $As^{3+}\;and\;As^{5+}$ were possible using citric acid in hydride generation.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.13 no.4
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• pp.82-86
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• 1999

Electron Energy Distribution Function(EEDF) were treasured In Radio-Frequency Inductively Coupled Plasma(RFlCP) using a probe rrethocl Measurerrents were conducted in argon discharge for pressure from 10[mTorr] to 4O[mTorr] and input rf power from 100[W] to 600[W] and flow rate from 3[sccm] to 12[sccm]. Spatial distribution of electron energy distribution function were measured for discharge with same aspoct ratio (R/L=2). Electron energy distribution function strongly depended on both pressure and power. Electron energy distribution function increased with increasing flow rate. Radial distribution of the electron energy distribution function were peaked in the plasma center. Normal distribution of the electron energy distribution function were peaked in the center between quartz plate and substrate. From the results, we can find out the generation mechanism of Radio Frequency Inductively Coupled Plasma. And these results contribute the application of a simple Inductively Coupled Plasma(ICP).a(ICP).