• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.32-32
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• 2011

Plasma etching is used in microelectronic processing for patterning of micro- and nano-scale devices. Commonly, optical emission spectroscopy (OES) is widely used for real-time endpoint detection for plasma etching. However, if the viewport for optical-emission monitoring becomes blurred by polymer film due to prolonged use of the etching system, optical-emission monitoring becomes impossible. In addition, when the exposed area ratio on the wafer is small, changes in the optical emission are so slight that it is almost impossible to detect the endpoint of etching. For this reason, as a simple method of detecting variations in plasma without contamination of the reaction chamber at low cost, a method of measuring plasma impedance is being examined. The object in this research is to investigate the suitability of using plasma impedance monitoring (PIM) with statistical approach for real-time endpoint detection of $SiO_2$ etching. The endpoint was determined by impedance signal variation from I-V monitor (VI probe). However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ film on Si wafer is etched by fluorocarbon plasma on inductive coupled plasma (ICP) etcher. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance analysis is compared with optical emission spectroscopy (OES). From impedance data, we tried to analyze physical properties of plasma, and real-time endpoint detection can be achieved.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.1
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• pp.81.2-81.2
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• 2015

FU Orionis 형 천체는 태양 질량의 2배 이하인 T Tauri 별 중에서도 급격한 밝기 변화를 보이는 별들로서, 광도 증가폭이 최대 5등급에 이르는 것으로 알려져 있다. 이러한 현상의 원인은 FU Orionis를 둘러싼 강착 원반에서 나타나는 불안정성에 의해, 원반 안쪽의 물질이 한꺼번에 중심별로 쏟아져 내리기 때문인 것으로 분석된다. V1057 Cyg는 FU Orionis 형 천체 중 하나로, 1969년에 급격한 밝기 변화를 일으키며, 기존의 16등급에서 변화 직후 9등급 후반에 이르는 광도 증가를 보였다. 우리는 V, R, I 필터 대역에서 관측을 수행하였으며, 본 발표에서는 2013 ~ 2014년에 걸쳐 소백산, 레몬산 천문대 및 경희천문대에서 관측한 결과를 보고한다.

• Corrosion Science and Technology
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• v.16 no.3
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• pp.151-159
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• 2017

The MA8 alloy (formula Mg-Mn-Се) has been shown to have greater corrosion stability than the VMD10 magnesium alloy (formula Mg-Zn-Zr-Y) in chloride-containing solutions by Scanning Vibrating Electrode Technique (SVET) and by optical microscopy, gravimetry, and volumetry. It has been established that the crucial factor for the corrosion activity of these samples is the occurrence of microgalvanic coupling at the sample surface. The peculiarities of the kinetics and mechanism of the corrosion in the local heterogeneous regions of the magnesium alloy surface were investigated by localized electrochemical techniques. The stages of the corrosion process in artificial defects in the coating obtained by plasma electrolytic oxidation (PEO) at the surface of the MA8 magnesium alloy were also studied. The analysis of the experimental data enabled us to determine that the corrosion process in the defect zone develops predominantly at the magnesium/coating interface. Based on the measurements of the corrosion rate of the samples with PEO and composite polymer-containing coatings, the best anticorrosion properties were displayed by the composite polymer-containing coatings.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1885-1887
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• 2000

In this paper we introduce preventative and diagnostic systems developed to prevent substations from accidental fault of electric power transmitting apparatus. We propose monitoring and diagnostic system for ultra high voltage GIS and main transformer of 765kV substations as an example of preventative and diagnostic techniques being applied in Korea. We also present a guideline to construct and manage an expert system for this purpose. Finally, an engineering solution as a substation management support system is proposed.

• Smart Structures and Systems
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• v.26 no.4
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• pp.507-520
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• 2020

In order to achieve effective corrosion monitoring of buried metal pipelines, a Novel nondestructive Testing (NDT) methodology using ultra-long (250 mm) Polymer Optical Fiber (POF) sensors coated with the Fe-C alloy film is proposed in this study. The theoretical principle is investigated to clarify the monitoring mechanism of this method, and the detailed fabrication process of this novel POF sensor is presented. To validate the feasibility of this novel POF sensor, exploratory research of the proposed method was performed using simulated corrosion tests. For simplicity, the geometric shape of the buried pipeline was simulated as a round hot-rolled plain steel bar. A thin nickel layer was applied as the inner plated layer, and the Fe-C alloy film was coated using an electroless plating technique to precisely control the thickness of the alloy film. In the end, systematic sensitivity analysis on corrosion severity was further performed with experimental studies on three sensors fabricated with different metal layer thicknesses of 25 ㎛, 30 ㎛ and 35 ㎛. The experimental observation demonstrated that the sensor coated with 25 ㎛ Fe-C alloy film presented the highest effectiveness with the corrosion sensitivity of 0.3364 mV/g at Δm = 9.32 × 10^-4 g in Stage I and 0.0121 mV/g in Stage III. The research findings indicate that the detection accuracy of the novel POF sensor proposed in this study is satisfying. Moreover, the simple fabrication of the high-sensitivity sensor makes it cost-effective and suitable for the on-site corrosion monitoring of buried metal pipelines.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.182-182
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• 2012

Plasma etching is used in various semiconductor processing steps. In plasma etcher, optical- emission spectroscopy (OES) is widely used for in-situ endpoint detection. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. Because of these problems, the object is to investigate the suitability of using plasma impedance monitoring (PIM) and self plasma optical emission spectrocopy (SPOES) with statistical approach for in-situ endpoint detection. The endpoint was determined by impedance signal variation from I-V monitor (VI probe) and optical emission signal from SPOES. However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ and SiNx layers are etched by fluorocarbon on inductive coupled plasma (ICP) etcher, if the proportion of $SiO_2$ and SiNx area on Si wafer are small. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance monitoring is compared with optical emission spectroscopy.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.5
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• pp.526-531
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• 2014

Vehicular communications have been receiving much attention in intelligent transport systems(ITS) by combining communication technology with automobile industries. In general, vehicular communication can be used for vehicle-to-vehicle(V2V) and vehicle-to-infrastructure( V2I) communication by adopting IEEE802.11p/1609 standard which is commonly known as wireless access in vehicular environment(WAVE). WAVE system transmits signal in 5.835~5.925 GHz frequency band with orthogonal frequency division multiplexing(OFDM) signaling. In this paper, after 32 bit processed the channel monitoring in MAC(Media Access Control) layer of WAVE system implemented according to IEEE 802.11p standard, data were received and we evaluated the performance, we built the test bed consisting of OBU(On Board Unit) in the real expressway. We transmitted WSM(WAVE Short Message) and received WSM between OBU wirelessly. And then, we calculated channel occupancy time per one frame and throughput, and evaluated the performance.

• Smart Structures and Systems
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• v.33 no.3
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• pp.227-241
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• 2024

Safety and structural integrity of civil structures, like bridges and buildings, can be substantially enhanced by employing appropriate structural health monitoring (SHM) techniques for timely diagnosis of incipient damages. The information gathered from health monitoring of important infrastructure helps in making informed decisions on their maintenance. This ensures smooth, uninterrupted operation of the civil infrastructure and also cuts down the overall maintenance cost. With an early warning system, SHM can protect human life during major structural failures. A real-time online damage localization technique is proposed using only the vibration measurements in this paper. The concept of the 'Degree of Scatter' (DoS) of the vibration measurements is used to generate a spatial profile, and fractal dimension theory is used for damage detection and localization in the proposed two-phase algorithm. Further, it ensures robustness against environmental and operational variability (EoV). The proposed method works only with output-only responses and does not require correlated finite element models. Investigations are carried out to test the presented algorithm, using the synthetic data generated from a simply supported beam, a 25-storey shear building model, and also experimental data obtained from the lab-level experiments on a steel I-beam and a ten-storey framed structure. The investigations suggest that the proposed damage localization algorithm is capable of isolating the influence of the confounding factors associated with EoV while detecting and localizing damage even with noisy measurements.

• Journal of the Korean Geotechnical Society
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• v.27 no.6
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• pp.17-26
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• 2011

Ground anchor method is one of the most popular reinforcing technology in Korea. For the sound monitoring of slope reinforced by permanent anchor for a long period, monitoring the tension force of ground anchor is very important. However, special technology except conventional load cell has not been developed for this purpose. In this paper, a new method is described to replace the conventional strain gauge and V.W. type load cell which has been commonly used as a prestress force monitoring tool for a short-term and long-term. Four 11.5 m long strain detectable tension type anchors were made using FBG sensor embedded tendon since FBG sensor is smaller than strain gauge type load cell and does not have noise from electromagnetic wave. Each two set strain detectable tension type anchors were installed into the different ground conditions, i.e., soft rock and weathered granite soil. Prestress force of ground anchor was monitored during the loading-unloading step from in-situ pullout test using proposed FBG sensor embedded in the tendon and the conventional load cell Test results show that the prestress force monitored from FBG sensor may well be used practically, for it almost matches with that measured from expensive load cell.

• Journal of the Korean institute of surface engineering
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• v.45 no.4
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• pp.168-173
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• 2012

A real-time monitoring of an immersed antenna type inductively coupled plasma (ICP) was done with optical emission spectroscopy (OES) to check the reports that sputtered atom density is decreasing as the ICP power is increased. At 10 mTorr pressure of Ar, Mg was sputtered by a bipolar pulsed power supply into 2 MHz ICP which has an insulator covered 2.5 turn antenna. Emitted light was collected in two different positions: above the target and inside the ICP region. With 100 W of Mg sputtering power, the intensities of Mg I (285.06 nm), Mg II (279.48 nm), Ar I (420.1 nm) were increased constantly with ICP power from 100 W to 600 W. At 500 W, the intensity of $Mg^+$ exceeded that of Mg under PID controlled discharge voltage of 180 V. The ratio of Mg II/Mg I was increased from 0.45 to 2.71 approximately 6 times.