• Journal of Korean Vacuum Science & Technology
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• v.3 no.2
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• pp.139-144
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• 1999

Hydrogen concentration depth profiles in homoepitaxial Si(001) films grown from hyper-thermal Si beams generated by ultrahigh vacuum (UHV) ion-beam sputtering have been measured by nuclear reaction analyses as a function of film growth temperature and deposition rate. Bulk H concentrations CH in the crystalline Si layers were found tio be below detection limits, 1${\times}$1019cm-3, with no indication of significant H surface segregation at the crystalline/amorphous interface region. This is quite different than the case for growth by molecular-beam epitaxy (MBE) where strong surface segregation was observed for similar deposition conditions with average CH values of 1${\times}$1020cm-3 in the amorphous overlayer. The markedly decreased H concentrations in the present experiments are due primarily to hydrogen desorption by incident hyperthermal Si atoms. Reduced H surface coverages during growth combined with collisionally-induced filling of interisland trenches and enhanced interlayer mass transport provide an increase in critical epitaxial thicknesses by up to an order of magnitude over previous MBE results.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2001.11a
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• pp.86-90
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• 2001

Modified coaxial-slot antenna for minimally invasive microwave thermal therapy for liver tumor is studied in this paper. Minimally invasive microwave antenna in medicine are applied for hyperthermia for medical treatment for cancer, cardiac catheter ablation for ventricular arrhythmias treatments, microwave treatment of Benign prostatic hypertrophy, and so on. Microwave hyperthermal ablation for liver tumors is expected for enthusiasts as an alternative to curative surgical resection. Tumors have to heated up to 60 degree C to coagulate .cancer cells but less than 100 degree C to avoid evaporation. Temperature dependence of properties of the tissues should be considered for wide range of treatment. Electrical properties of liver tissue were measured for different temperatures. SAR distribution around the antenna into the liver are simulated using Remcom's XFDTD.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.227-227
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• 2011

최근 ECR (Electron Cyclotron Resonance) 가열에 의한 플라즈마 소스는 고밀도 플라즈마를 유지하면서 고진공 운전을 동시에 만족시켜 다양한 플라즈마 응용 분야에서 많은 관심을 받고 있다. 그 중 HNB (Hyperthermal Neutral Beam)를 이용한 플라즈마 소스에 있어서 ECR 플라즈마 소스는 고진공에서도 높은 플라즈마 밀도를 유지할 수 있기 때문에 기존의 HNB 플라즈마 소스인 ICP (Inductive Coupled Plasma)의 운전압력의 한계점을 해결하여 높은 HNB 방향성(~1mTorr이하)을 가진 고밀도플라즈마를 발생시킬 수 있을 것이라 제안되었다. ECR 플라즈마가 HNB 소스로서 적합하기 위해서는 플라즈마 소스의 대면적화와 균일화가 동시에 이루어져야 한다. 본 연구에서는 이러한 요구에 부합하여 Lisitano coil를 이용한 균일한 대면적 ECR 플라즈마 소스를 설계하였다. 최적의 설계와 진단을 위한 Lisitano Coil antenna 내의 B-field 분포 시뮬레이션과 Langmuir Probe 진단이 이루어졌다.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.190-192
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• 2007

A neutral beam system has been developed to produce hyperthermal neutral beams composed of indium, tin, and oxygen atoms. Using these hyper thermal neutral beams with energies in the range of tens of eV, high quality indium-tin oxide (ITO) thin films have been obtained on glass substrates at room temperature. The optical transmittance of the films is higher than 85% at a wavelength of 550 nm and the electrical resistivity is lower than $1{\times}10^{-3}{\Omega}cm$.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.155-155
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• 2000

Adsorption of alkali metals on a silicon surface has attracted much attention due to its importance in metal-semiconductor interface technology, In particular, the bonding nature of alkali metal to silicon substrate has been a focus of fundamental research efforts. We examined the adsorbed layer of Cs on a Si(111)-(7$\times$) surface by reactive ion scattering (RIS) of hyperthermal Cs+ beams. RIS from a Cs-adsorbed surface gives rise to Cs, representing pickup of surface Cs by Cs projectile. The Cs intensity is proportional to surface coverage of Cs at a high substrate temperature (473 K), while it varies anomalously with Cs coverage at low temperatures (130-170 K). This observation indicates that RIS selectively detects metallic Cs on surface, but discriminates ionic Cs. Transition from ionic to metallic Cs adlayer is driven by thermal diffusion of Cs and their clustering process.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.441-441
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• 2010

Hyperthermal neutral beam (HNB)은 박막 성장에 필요한 에너지와 반응 입자들을 동시에 공급할 수 있기 때문에 특히, 저온에서 박막을 성장시킬 때 매우 유용하다. 이와 같은 목적으로 race track 형태의 자기장 구조를 갖고 있는 2.45 GHz electron cyclotron resonance (ECR) plasma를 이용한 HNB 소스를 개발하였다. HNB 소스에서 인출되는 입자들은 중성 입자 뿐만 아니라 이온이나 전자와 같은 하전 입자들로 구성되어 있다. 그러나 양질의 HNB를 얻기 위해서는 하전 입자들의 구성 비율을 최소화해야 한다. HNB 소스는 하전 입자의 구성 비율을 1 % ($1{\mu}A/cm^2$) 이하가 되도록 설계되었다. 이것을 위해서 영구 자석의 자기장을 이용한 plasma limiter를 설계하였다. 대부분의 전자는 limiter 앞에 형성된 자기장의 구조와 반응하여 주로 gradient B drift와 curvature drift를 통하여 차단되고, 이온은 로렌츠 힘을 받아 빔 축으로 부터 벗어나도록 하였다. Limiter의 특성을 연구하기 위해서 정전탐침을 limiter에서 빔 축 방향으로 이동시키면서 I-V 곡선과 이온 포화 전류 및 전자 포화 전류를 측정하였다. 측정 결과를 바탕으로 plasma limiter의 성능을 검증하였고 문제점을 논의하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.436-436
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• 2010

국내 반도체 시장은 세계 1위의 시장점유율을 가지고 있지만 핵심장비의 경우 국내 장비 기술의 낙후로 인해 대부분을 선진국에 의존하는 실정이다. 따라서 국내 장비 기술의 발전 요구에 따라 연구가 진행되었으며 기존 PE-CVD (Plasma Enhanced Chemical Vapor Deposition) 장비에서의 하전입자에 의한 기판 손상 가능을 제거하고 개개의 반응 원소의 에너지와 플럭스를 조절하여 다양한 공정온도에서 증착을 구현할 수 있는 HNB-CVD(Hyperthermal Neutral Beam Chemical Vapor Deposition) 장비를 개발하였다. 고밀도 플라즈마 생성을 위한 마이크로웨이브 SLAN(Slot Antenna) 소스를 사용하였으며 대면적 공정에 적합하도록 설계하였다. 최적의 설계와 진단을 위한 마이크로웨이브 SLAN 소스내의 E-field 분포 시뮬레이션과 Langmuir Probe 진단이 이루어졌다.

• The Journal of Korean Medicine Ophthalmology and Otolaryngology and Dermatology
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• v.11 no.1
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• pp.23-39
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• 1998

The clinical data and thermographic imaging were analyzed on the 100 cases of Bell's palsy who were treated in the Kwang-Ju Oriental Medical Hospita! of Wonkwang University from February to October 1997. All the cases were taken Digital Infrared Thermograph Imaging(DITI) before treatment and 30 cases of them were taken follow up imaging again after recovery. And the following results were obtained. 1. Of 100 cases, under teenager occupied $1\%,\;teenager\;8\%,\;2nd\;decade\;14\%,\;3rd\;decade\;11\%,\;4th\;decade\;16\%,\;5th\;decade\;26\%,\;6th\;decade\;16\%,\;7th\;decade\;7\%\;and\;over\;80\;occupied\;1\%$. 2. Male occupied $48\%$ and female occupied $52\%$. 3. $42\%\;of\;male\;and\;23\%$ of female had the affected side at left side. And right facial nerve palsy occured at $29\%\;of\;male\;and\;29\%$ of female. 4. The most common cause of Bell's palsy was cold wind $18\%$, and the next were excessive labor $15\%,\;stress\;12\%,drinking\;2\%\;and\;cold\;food\;1\%$. 5. Thermal pattern were present as hyperthermal pattern in $44\%$ and hypothermal pattern in $22\%$. 6. The DITI showed hyperthermal pattern as close as to the onset day and changes to hypothermal pattern as times passed. 7. The DITI pattern and post-auricular pain, the most common prodomal syndrome, showed no significant relationship. 8. The relationship between the grade of paralysis and thermal patttern of DITI showed no significance. 9. Mean temperature of loci in affected side indicrtted $30.27^{\circ}C\;at\;Yang\;baek,\;30.02^{\circ}C\;at\;Taeyang,\;29.25^{\circ}C\;at\;Geoyo,\;29.62^{\circ}C\;at\;Jichang,\;29.78^{\circ}C\;at\;Hakwan,\;29.61^{\circ}C\;at\;Hyupgeo,\;and\;30.59^{\circ}C$at Yeopoong. 10. Mean temperature of loci in unaffected side showed $30.16^{\circ}C\;at\;Yang\;baek,\;30.02^{\circ}C\;at\;Taeyang,\;29.61^{\circ}C\;at\;Geoyo,\;29.68^{\circ}C\;at\;Jichang,\;29.70^{\circ}C\;at\;Hakwan,\;29.57^{\circ}C\;at\;Hyupgeo,\;and\;29.89^{\circ}C$at Yeopoong. 11. Of 30 cases who were taken follow up imaging again after recovery, the relationship between delta T at loci and symptoms showed no significance. It should be needed further investigation in order to apply them for clinical evaluation.

• Microbiology and Biotechnology Letters
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• v.45 no.4
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• pp.316-321
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• 2017

Hyperthermal acid hydrolysis pretreatment of Eucheuma denticulatum was carried out using 12% (w/v) seaweed slurry and 90 mM $H_3PO_4$ at $150^{\circ}C$ for 10 min. The use of Candida lusitaniae with adaptive evolution was evaluated for ethanol fermentation. The levels of ethanol production by separate hydrolysis and fermentation (SHF) at 72 h with non-adapted and adapted C. lusitaniae were 10.1 g/l with ethanol yield ($Y_{EtOH}$) of 0.23, and 18.1 g/l with $Y_{EtOH}$ of 0.45, respectively. Adaptive evolution was employed in this study to improve the efficiency of ethanol fermentation. Development of the SHF process could enhance the overall ethanol fermentation yields of the red seaweed E. denticulatum.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2002.05a
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• pp.46-46
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• 2002

It is well known that thin film growth and surface morphology can be substantially modified by ion-bombardment during the deposition. This is particularly important in case of thin-film deposition at low temperatures where the film growth occurs under highly nonequilibrium conditions. An attractive way to promote crystalline growth and surface morphology is deposition of additional energy in to the surface of the growing film by bombardment with hyperthermal particles. We were deposited crystalline Ti and TiN thin films on Si substrate by magnetron sputtering method with grid. Its thin films were highly smoothed and dense as increasing grid bias. In order explore the benefits of a bombardment of the growing film with high energetic particles. Ti and TiN films were deposited on Si substrates by an unbalanced magnetron sputter source with attached grid assembly for energetic ion extraction. Also, we have studied the variation of the plasma states by Langmuir probe and Optical Emission Spectroscopy (OES). The epitaxial orientation. microstructual characteristics. electrical and surface properties of the films were analyzed by XRD. SEM. Four point probe and AFM.