• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• 한국정밀공학회지
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• 제30권12호
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1469-1474
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.60-67
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• 2004

For improving the motion accuracy of hydrostatic tables, a corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. The reverse analysis is performed firstly to estimate the rail profile from the measured linear and angular motion error, in the algorithm. For the next step, the corrective machining information is obtained based upon the estimated rail pronto. Finally, the motion errors on the correctively machined rail are analyzed by using the motion error analysis method. These processes are iterated until the analyzed motion errors are satisfactory within the target accuracy. In order to verify the validity of the algorithm theoretically, the motion errors calculated by the estimated rail after the corrective machining process, are compared with those by the true rail which is previously assumed as the initially measured value. The motion errors calculated using the estimated rail show good agreement with the assumed values, and it is shown that the algorithm is effective in acquiring the corrective machining information to improve the accuracy of hydrostatic tables.

• 한국정밀공학회지
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• 제29권2호
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• pp.129-138
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• 2012

In this study, three types of large scale multi-tasking machine tools together with core technologies involved have been developed and introduced; a multi-tasking machine tool for large scale marine engine crankshafts, a multi-tasking vertical lathe for windmill parts, and a large scale 5-axis machine tool of gantry type. Several special purpose devices has been necessarily developed for the purpose of handling and machining big and heavy workpieces accurately, such as PTD (Pin Turning Device) with revolving ring spindle for machining eccentric crankshaft pins, hydrostatic rotary table and steady rest for supporting and resting heavy workpieces, and 2-axis automatic swiveling head for high-quality free surface machining. Core technologies have been also developed and adopted on their detail design stage; 1) structural design optimization with FEM structural analysis, 2) theoretical hydrostatic analysis for the PTD and rotary table bearings, 3) box-in-box type cross-rail and octagonal ram design to secure machine rigidity and accuracy, 4) constant spindle rpm control against gravitational torque due to unbalanced workpiece.

• 한국정밀공학회지
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• 제29권2호
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• pp.147-155
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• 2012

Wind power, which is one of the promising renewable energies, has shown the high growth rate of 35 % of the annual average in the recent 5 years and also windmill related equipment market has been fast-growing. Yaw & Pitch bearing are the key parts of windmill and are machined by huge vertical lathe which is monopolized by the advanced countries. The purpose of this study is to develop the multi-tasking vertical lathe for 5 MW grade windmill bearings, which might be mass produced 3 or 5 years later. In this study, the structure of the crossrail and rotary table, which are the key units of the huge multi-tasking vertical lathe, were optimized through the finite element analysis. Also the basic performance of the rotary table has been evaluated.

• 대한기계학회논문집A
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• 제31권12호
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• pp.1173-1179
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.792-795
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• 2005

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.

• 한국정밀공학회지
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• 제28권3호
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.