• 한국재료학회지
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• 제28권4호
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• pp.247-253
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• 2018

We examined the characteristics of indium tin zinc oxide (ITZO) thin film transistors (TFTs) on polyimide (PI) substrates for next-generation flexible display application. In this study, the ITZO TFT was fabricated and analyzed with a SiOx/SiNx gate insulator deposited using plasma enhanced chemical vapor deposition (PECVD) below $350^{\circ}C$. X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectroscopy (SIMS) results revealed that the oxygen vacancies and impurities such as H, OH and $H_2O$ increased at ITZO/gate insulator interface. Our study suggests that the hydrogen related impurities existing in the PI and gate insulator were diffused into the channel during the fabrication process. We demonstrate that these impurities and oxygen vacancies in the ITZO channel/gate insulator may cause degradation of the electrical characteristics and bias stability. Therefore, in order to realize high performance oxide TFTs for flexible displays, it is necessary to develop a buffer layer (e.g., $Al_2O_3$) that can sufficiently prevent the diffusion of impurities into the channel.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.773-776
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• 2009

In this paper, new concept of the diesel fuel processing is introduced for the stable operation of solid oxide fuel cells (SOFCs). Heavier hydrocarbons than $CH_4$, such as ethylene, ethane, propane, and etc., induce the carbon deposition on anode of SOFCs. In the reformate of heavy hydrocarbons (diesel, gasoline, kerosene, and JP-8), concentration of ethylene is usually higher than low hydrocarbons such as ethane, propane, and butane. So, removal of low hydrocarbons (over C1-hydrocarbons), especially ethylene, at the reformate gases is important for stable operation of SOFCs. New methodology as named "post-reformer" is introduced for removing the low hydrocarbons at the reformate gas stream. Catalyst of the NECS-PR4 is selected for post-reforming catalyst because the catalyst of NECS-PR4 shows the high selectivity for removing low hydrocarbons and achieving the high reforming efficiency. The diesel reformer and post-reformer are continuously operated for about 200 hours as integrated mode. The reforming performance is not degraded and low hydrocarbons in the diesel reformate are completely removed.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2004년도 제28회 KOSCO SYMPOSIUM 논문집
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• pp.227-234
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• 2004

For gaseous fuel combustion with inherent $CO_2$ capture and low NOx emission, chemical-looping combustion(CLC) may yield great advantages of savings of energy to $CO_2$ separation and suppressing the effect on environment. In chemical-looping combustor, fuel is oxidized by metal oxide medium (oxygen carrier particle) in a reduction reactor. Reduced particles are transported to oxidation reactor and oxidized by air and recycled to reduction reactor. The fuel and the air are never mixed, and the gases from reduction reactor, $CO_2$ and $H_2O$, leave the system as separate stream. The $H_2O$ can be easily separated by condensation and pure $CO_2$ is obtained without any loss of energy for separation. The purpose of this study is to demonstrate inherent $CO_2$ separation and no NOx emission and to confirm high $CO_2$ selectivity, no side reaction (i.e., carbon deposition, hydrogen generation) by continuous reduction and oxidation experiment in a 50kWtb chemical-looping combustor. NiO/bentonite particle was used as a bed material and $CH_4$ and air were used as reacting gases for reduction and oxidation respectively.

• Bulletin of the Korean Chemical Society
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• 제35권11호
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• pp.3261-3266
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• 2014

A pellet of polycrystalline $CuGaO_2$ with a delafossite structure was prepared from $Ga_2O_3$ and CuO by high-temperature solid-state synthesis. The $CuGaO_2$ pellet was a p-type semiconductor for which the electrical conductivity, carrier density, carrier mobility and Seebeck coefficient were $5.34{\times}10^{-2}{\Omega}^{-1}cm^{-1}$, $3.5{\times}10^{20}cm^{-3}$, $9.5{\times}10^{-4}cm^2V^{-1}s^{-1}$ at room temperature, and $+360{\mu}V/K$, respectively. It also exhibited two optical transitions at about 2.7 and 3.6 eV. The photoelectrochemical properties of the $CuGaO_2$ pellet electrode were investigated in aqueous electrolyte solutions. The flat-band potential of this electrode, determined using a Mott-Schottky plot, was +0.18 V vs SCE at pH 4.8 and followed the Nernst equation with respect to pH. Under UV light illumination, a cathodic photocurrent developed, and molecular hydrogen simultaneously evolved on the surface of the electrode due to the direct reduction of water without deposition of any metal catalyst.

• 한국군사과학기술학회지
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• 제12권4호
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• pp.483-490
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• 2009

In this paper, a novel low-damage silicon nitride passivation for 100nm InAlAs/InGaAs MHEMTs has been developed using remote ICPCVD. The silicon nitride deposited by ICPCVD showed higher quality, higher density, and lower hydrogen concentration than those of silicon nitride deposited by PECVD. In particular, we successfully minimized the plasma damage by separating the silicon nitride deposition region remotely from ICP generation region, typically with distance of 34cm. The silicon nitride passivation with remote ICPCVD has been successfully demonstrated on GaAs MHEMTs with minimized damage. The passivated devices showed considerable improvement in DC characteristics and also exhibited excellent RF characteristics($f_T$of 200GHz).The devices with remote ICPCVD passivation of 50nm silicon nitride exhibited 22% improvement(535mS/mm to 654mS/mm) of a maximum extrinsic transconductance($g_{m.max}$) and 20% improvement(551mA/mm to 662mA/mm) of a maximum saturation drain current ($I_{DS.max}$) compared to those of unpassivated ones, respectively. The results achieved in this work demonstrate that remote ICPCVD is a suitable candidate for the next-generation MHEMT passivation technique.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2007년도 추계학술대회 논문집
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• pp.75-78
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• 2007

천연가스의 수증기 및 이산화탄소 복합 개질은 탄화수소화합물과 이산화탄소를 원료로 사용하여 수소를 생산하는 공정으로, 온실가스로 지목되고 있는 주요 화합물을 수소와 일산화탄소 혼합 가스로 전환시켜 합성 반응 또는 연료전지에 사용할 수 있도록 해준다. 본 연구에서는 $MgAl_2O_4$를 지지체로 하는 니켈계 촉매를 제조하여 수증기 및 이산화탄소 복합 개질 반응에 사용하였으며, 기존의 수증기 개질촉매 적용 시 문제가 되었던 탄소 침적에 의한 촉매 비활성화를 피할 수 있었다. 개발된 촉매 레시피를 바탕으로 펠릿 촉매를 제조하여 0.1 bpd규모의 Fischer-Tropsch 합성 반응에 적용 가능한 튜브형 반응기에 적용하여 수증기 및 이산화탄소 복합 개질 반응을 실시하였으며, 반응기의 온도 구배, 가스 조성 변화를 관찰하였다. 반응 조건에 따른 촉매 및 반응기의 성능 최적화를 실시하여 최적 촉매 및 반응기 성능을 모색하고자 하였다.

• 한국전기전자재료학회논문지
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• 제27권1호
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• pp.39-44
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• 2014

Silicon nitride thin film deposited with Plasma Enhanced Chemical Vapor Deposition was treated by a nitrogen plasma generated by Inductively Coupled Plasma at room temperature. The treatment was investigated by Fourier Transform Infrared Spectroscopy and Atomic Force Microscopy on the surface at various RF source powers at two RF bias powers. The amount of hydrogen was reduced and the surface roughness of the films was decreased remarkably after the plasma treatment. In order to understand the causes, we analyzed the plasma diagnostics by Optical Emission Spectroscopy and Double Langmuir Probe. Based on these analysis results, we show that the nitrogen plasma treatment was effective in the improving of the properties silicon nitride thin film for flexible display.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.242.2-242.2
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• 2014

Plasma-polymer thin films (PPTF) have been deposited on a Si(100) wafer and glass under several conditions such as different RF power by using plasma-enhanced chemical vapor deposition (PECVD) system. Ethylcyclohexane, ammonia gas, hydrogen and argon were utilized as organic precursor, doping gas, bubbler gas and carrier gases, respectively. PPTFs were grown up with RF (ratio frequency using 13.56 MHz) powers in the range of 20~60 watt. PPTFs were characterized by FT-IR (Fourier Transform Infrared), FE-SEM (Scanning Electron Microscope), AFM (Atomic Force Microscope), Contact angle and Probe station. The result of FT-IR measurement showed that the PPTFs have high cross-link density nitrogen doping ratio was also changed with a RF power increasing. AFM and FE-SEM also showed that the PPTFs have smooth surface and thickness. Impedance analyzer was utilized for the measurements of C-V curves having different dielectric constant as RF power.

• 한국통신학회논문지
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• 제35권11A호
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• pp.1091-1096
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• 2010

Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.261-262
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• 2011

본 연구는 HMDS/$O_2$/He/Ar의 gas mixture를 이용하여 remote-type의 DBD source를 통한 APPECVD를 통한 SiOx 양질의 무기막 증착 공정을 개발하였다. 이때 기판에 바이어스를 인가 하거나 혹은 접지를 하여 대기압 플라즈마의 환경 내에서도 바이어스 효과를 확인할 수 있도록 double discharge system을 구축하였다. 그리고 이 double discharge system의 다양한 특성과 기존의 전형적인 DBD와 비교 하였을 때 어떠한 차이점을 가지는지에 대해서도 관찰하였다. 그리하여 전형적인 DBD system과 double discharge를 통해 증착된 SiOx 무기막의 특성을 역시 비교 관찰하였다. Gas mixture 중 HMDS의 유량이 증가함에 따라, 그리고 $O_2$ gas의 유량이 감소함에 따라 SiOx 무기막의 증착률은 감소하였다. 그러나, SiOx 무기막 내의 불순물들, 예를 들어, carbon 혹은 hydrogen 계열의 chemical bond에 대한 정성적인 양은 HMDS 의 유량이 증가하거나 혹은 $O_2$ gas의 양이 감소함에 따라 오히려 증가함을 관찰할 수 있었다. 그리고 기판에 바이어스를 인가하는 double discharge system을 사용하였을 경우, 같은 HMDS, $O_2$ gas 유량을 사용한 전형적인 DBD type의 증착 공정 보다 더 높은 공정 효율을 나타냄과 동시에 더 낮은 불순물 함량을 가짐을 알 수 있었다. 이러한 double discharge system을 통해 증착된 양질의 SiOx 무기막이 증착 되었음을 FT-IR을 통한 막질 분석을 통해 확인 할 수 있었다. 이러한 double discharge system의 증착 공정에 대한 긍정적인 효과들은 atmospheric discharge의 효율 향상에 따른 gas dissociation efficiency 증가와 이를 통한 HMDS 분해 및 산소와의 recombination 효율의 증가에 따른 결과로 사료된다.