• 한국수소및신에너지학회논문집
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• 제16권2호
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• pp.136-141
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• 2005

Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

• Journal of Biosystems Engineering
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• 제18권3호
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• pp.252-261
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• 1993

Nuclear magnetic resonance(NMR) was used to study a feasibility test for the possibility to develop a moisture sensor applicable for agricultural products such as raw and powdered grain. Samples of wheat flour and brown rice were tested with a 200MHz hydrogen NMR. The samples were loaded into 5mm NMR glass tubes and $30^{\circ}$ pulses were supplied to get resonance signals. Hydrogen spectrum intensities of the samples were compared to moisture content measured by a drying oven method. High linear correlations were obtained between the hydrogen spectrum intensity and moisture content. Therefore, moisure contents of agricultural products could be measured nondestructively utilizing the NMR principle. A low-cost design concept of the moisture sensor with the NMR principle was proposed for a practical use.

• 전기전자학회논문지
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• 제22권2호
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• pp.356-361
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• 2018

고온에서 이용 가능한 수소 센서에 관해 연구하였다. 센서는 $Pd/Ta_2O_5/SiC$으로 구성된 MOS 구조로 제작되었으며, $Ta_2O_5$ 박막은 급속 열 산화법(RTO)법으로 형성하였다. 본 연구에서는 3가지 다른 패턴의 팔라듐(Pd) 전극으로 만든 센서를 제작하여, Pd 전극의 형태가 응답 특성에 미치는 영향을 고찰하였다. 그 결과, 센서는 Pd 전극의 채워진 면적이 클수록, 정전용량의 응답특성이 개선됨을 확인하였다.

• 한국전기전자재료학회논문지
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• 제31권2호
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• pp.69-73
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• 2018

The power law is very important in gas sensing for the determination of gas concentration. In this study, the resistance of a gas sensor based on poly (3, 4-ethylenedioxythiophene) polystyrene sulfonate+graphene oxide composite was found to exhibit a power law dependence on hydrogen concentration at $150^{\circ}C$. Experiments were carried out in the gas concentration range of 30~180 ppm at which the sensor showed a sensitivity of 6~9% with a response and recovery time of 30s.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.273.1-273.1
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• 2016

Graphene exhibits a number of unique properties that make it an intriguing candidate for use in sensor. Here, we report graphene-based gas sensor. Graphene was grown using CVD. Then, the sensor was made using standard lithography techniques. The sensor conductance increased upon exposure to NH3, whereas it decreased upon NO2, suggesting that NH3 and NO2 might be discriminated using the graphene-based sensor. To improve the sensitivity, graphene was treated with hydrogen plasma. After hydrogen treatment, the electrical properties of graphene changed from ambipolar to p-type semiconductors. In addition, the sensor performance was improved probably due to an opening of bandgap.

• 반도체공학회 논문지
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• 제1권1호
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• pp.9-13
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• 2023

본 연구에서는 SnO₂ 나노입자와 Pd 금속의 이중층으로 구성된 촉매층을 갖는 AlGaN/GaN 이종접합 기반의 상온동작 수소센서를 제작하여 해당 센서의 안정성 개선 연구를 수행하였다. 제작된 센서를 고온 환경이 아닌 상온에서 수소에 노출 및 차단을 반복하며 동작 시켰을 때 시간에 따라 대기전류가 감소하는 불안정한 전류 드리프트 (current drift) 현상이 발생하였지만, 자외선 (UV) 조사를 함께 진행하면서 반복 측정을 하였을 때 해당 불안정성의 가시적인 개선 효과를 이루었다.

• 한국수소및신에너지학회논문집
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• 제16권1호
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• pp.9-16
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• 2005

We studied the electrochromic properties of hydrated amorphous ruthenium oxide ($RuO_2{\cdot}xH_2O$) thin films using in-situ Raman spectroscopy during electrochemical charging/discharging cycles. We have found that the principal effect of hydrogen insertion into $RuO_2{\cdot}xH_2O$ is reduction of $Ru^{4+}\;to\;Ru^{3+}$, and not formation of new bonds involving hydrogen. We compared the changes in the Raman spectrum of a gasochromic $Pd/RuO_2{\cdot}xH_2O$ film as it is exposed to hydrogen gas with that of electrochemical hydrogen insertion. We tested the changes in the optical transmission of the $Pd/RuO_2{\cdot}xH_2O$ film when exposed to hydrogen gas.

• 동력기계공학회지
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• 제19권3호
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• pp.11-15
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• 2015

In this paper, the multi-point hydrogen detection system based on the combination of the hetero-core optical fiber SPR hydrogen tip sensor and interrogator by pseudorandom noise (PN) code correlation reflectometry has been developed. In a light intensity-based experiment with an LED operating at 850 nm, it has been presented that a transmitted loss change of 0.32dB was induced with a response time of 25 s for 4% $H_2$ in $N_2$ in the case of the 25-nm Au, 60-nm $Ta_2O_5$, and 5-nm Pd multi-layers film. The proposed sensor characteristic shows excellent reproducibility in terms of loss level and time response for the in- and out- $H_2$ action. In addition, in the experiment for multi-point hydrogen detection, all sensors show the real-time response for 4% hydrogen adding with reproducible working. As a result, the real-time multi-point hydrogen detection could be realized by means of the combination of interrogating system and hetero-core optical fiber SPR hydrogen tip sensors.

• 한국수소및신에너지학회논문집
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• 제15권4호
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• pp.317-323
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• 2004

We fabricated a MISFET using Pd/NiCr gate for the detecting of hydrogen gas in the air and investigated its electrical characteristics. To improve stability and high concenntration sensitivity and remove the blister generated by the penetration of hydrogen atoms Pd/NiCr catalyst gate metal are used as dual gate. To reduce the gate drift voltage caused by the inflow of hydrogen, the gate insulators of sensing and reference FFET were constructed with double insulation layers of silicon dioxide and silicon nitride. The hydrogen response of MISFET were amplified with the difference of gate voltages of both MISFET. To minimize the drift and the noise, we used a OP177 operational amplifier. The sensitivity of the Pd/NiCr gate MISFET was lower than that of Pd/Pt gate MISFET, but it showed good stability and ability to detect high concentration hydrogen up to 1000ppm.

• 센서학회지
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• 제9권2호
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• pp.113-119
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• 2000

정류수 내 수소 가스를 감지할 수 있는 Pd 박막을 가진 Pd/Pt 게이트 MISFET 수소센서를 제조하였다. 감지게이트 MISFET와 기준 게이트 MISFET의 차동형 센서로 제작하여 MOSFET 고유의 드리프트를 최소화하였다. 수소유입으로 인한 드리프트는 $Si_3N_4/SiO_2$의 이중 게이트 절연막으로 줄였고, 수소에 의한 Pd의 격자 팽창에 의해 생기는 블리스터는 Pt을 넣어서 제거하였다. Pd 박막을 수소 여과기로 사용한 Pd/Pt 게이트 MISFET 센서로 측정한 결과 $0{\sim}500\;ppm$ 사이에서 선형적인 출력 특성을 얻을 수 있었다. 30 일간 $50^{\circ}C$의 정류수 속에서 장기안정도를 측정하였다. 전체적으로 감지 FET의 게이트 전압은 35 mV 상승하였고, 기준 FET는 48 mV 상승하여 안정한 특성을 나타내었다.