• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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• pp.25-28
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• 2000

A capacitance-type humidity sensors in which porous silicon layer is used as humidity-sensing material was developed. This sensors was fabricated monolithically to be compatible with the typical IC process technology except for the formation of porous silicon layer. As the sensors is made as a mesa structure, the correct measurement of capacitance is expected because it can remove the effect of the parasitic capacitance from the bottom layer and another junctions. To do this, the sensor was fabricated using process steps such as localized formation of porous silicon, oxidation of porous silicon layer and etching of oxidized porous silicon layer. From completed sensors, capacitance response was measured on the relative humidity of 25 to 95% at room temperature. As the result the measured capacitance showed the increase over 300% at the low frequency of 120Hz, and showed little dependence on the temperature between 10 to $40^{\circ}C$.

• 한국전기전자재료학회논문지
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• 제37권4호
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• pp.347-357
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• 2024

Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

• 센서학회지
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• 제14권6호
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• pp.395-401
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• 2005

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

• 산업기술연구
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• 제34권
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• pp.39-43
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• 2014

This paper represents a highly porous MWCNT film electrode with interconnected open pores and demonstrated the possibility of using an MWCNT network film as the top electrode for polyimide capacitive humidity sensors. Polyimide humidity sensors with MWCNT electrodes exhibited about 6 times faster response than equivalent Cr electrode sensors. This result may be due to their percolated pore structures, which make water molecules accessible to all polyimide surfaces. The much faster response times of MWCNT electrode sensors is attributed to the percolated pore network, which allows more water molecules to be accessible to polyimide surfaces.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권6호
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• pp.335-340
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• 2000

We report the results of a preliminary investigation on capacitive humidity sensors using iodine-doped polyphenylacetylene(PPA) thin films. PPA was prepared from phenylacetylene(PA), chemically doped with iodine, and characterized by DSC, $^1H$-NMR and FTIR spectra. The iodine-doped PPA sensors showed a sensitivity of 0.20pF/%RH, a linearity of 3.8%FS, a negligible hysteresis, and a low temperature coefficients of $0.043~0.067pF/^{\circ}C$ over a wide range of relative humidity. These results are expected to open up the possibility of iodine-doped PPA thin films as relative humidity sensors.

• 센서학회지
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• 제8권6호
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• pp.434-439
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• 1999

집적형 습도센서를 위해 이중게이트 금속을 증착한 차동형 전계효과 트랜지스터를 제조하고 상대습도에 따른 드레인전류 드리프트특성을 조사하였다. 감지소자와 비감지소자의 전류차를 얻기 위해 두 트랜지스터의 종횡비는 250/50으로 같게 하였다. 제조된 습도감지 전계효과 트랜지스터의 표준화된 드레인전류는 상대습도가 30%에서 90%로 증가함에 따라 0.12에서 0.3으로 증가하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.464-467
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• 2002

$TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.

• Macromolecular Research
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• 제13권2호
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• pp.96-101
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• 2005

Thin-film humidity sensors were prepared using inorganic/organic hybrid polyelectrolytes, which were prepared from the sol-gel reaction of copolymers of [2-(methacryloyloxy)ethyl]dimethylpropylammonium bromide (MEPAB), n-butyl methacrylate (BMA), and 3-(trimethoxysilyl)propyl methacrylate (TSPM) with tetraethyl ortho-silicate (TEOS). The humidity-sensitive polyelectrolytes were composed of the copolymers having the following mole ratios of MEPAB, BMA, and TSPM: 60/30/10, 55/30/15, and 50/30/20. We found that the impedance varied with the content of MEPAB or TEOS; it ranged from $10^{7} to 10^{3}\Omega$ between 20 and $95\%$ relative humidity, which is the range required for a humidity sensor operating at ambient humidity. In addition we investigated a number of characteristics of these humidity sensors, such as their hysteresis, response time, temperature dependence, frequency dependence, water durability, and long-term stability.

• 전자공학회논문지 IE
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• 제43권3호
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• pp.1-5
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• 2006

고상반응법을 이용하여 $CaZrO_3$ 습도센서를 제작하였으며 그의 감습특성에 대하여 연구하였다. 습도센서의 임피던스는 상대습도가 증가함에 따라 감소하며 감습도는 주파수에 의존하였다. 센서의 감습도는 열처리에 안정되고 흡습 탈습에 따른 히스테리시스 현상이 거의 나타나지 않았으며 전기전도 활성화에너지는 흡습에 따라 감소하였다.

• 한국의류산업학회지
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• 제21권6호
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• pp.697-707
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• 2019

This review paper deals with materials, classification, and a current article investigation on smart textile sensors for wearable vital signs monitoring (WVSM). Smart textile sensors can lose electrical conductivity during vital signs monitoring when applying them to clothing. Because they should have to endure severe conditions (bending, folding, and distortion) when wearing. Imparting electrical conductivity for application is a critical consideration when manufacturing smart textile sensors. Smart textile sensors fabricate by utilizing electro-conductive materials such as metals, allotrope of carbon, and intrinsically conductive polymers (ICPs). It classifies as performance level, fabric structure, intrinsic/extrinsic modification, and sensing mechanism. The classification of smart textile sensors by sensing mechanism includes pressure/force sensors, strain sensors, electrodes, optical sensors, biosensors, and temperature/humidity sensors. In the previous study, pressure/force sensors perform well despite the small capacitance changes of 1-2 pF. Strain sensors work reliably at 1 ㏀/cm or lower. Electrodes require an electrical resistance of less than 10 Ω/cm. Optical sensors using plastic optical fibers (POF) coupled with light sources need light in-coupling efficiency values that are over 40%. Biosensors can quantify by wicking rate and/or colorimetry as the reactivity between the bioreceptor and transducer. Temperature/humidity sensors require actuating triggers that show the flap opening of shape memory polymer or with a color-changing time of thermochromic pigment lower than 17 seconds.