• Journal of Sensor Science and Technology
• /
• v.26 no.6
• /
• pp.397-401
• /
• 2017

A DC resistance type humidity sensor using conductive carbon ink was fabricated and its performance was evaluated. The humidity sensor was fabricated using a screen printing technique and have a structure that does not require additional metal electrodes to measure resistance change. To evaluate the performance of the humidity sensor, we measured the DC resistance change under various relative humidity levels. The fabricated humidity sensor showed a resistance change of about $2.5{\sim}50k{\Omega}$ in 11 ~ 95% RH environment. It also shows a linear relationship in the relative humidity versus log DC resistance graph. In comparison with commercial humidity sensor under real environment, it can be confirmed that the resistance of the humidity sensor changes to almost the same level as the measured humidity. These results show that the resistance type humidity sensor can be operated stably in actual environment.

• Journal of Mechanical Science and Technology
• /
• v.20 no.4
• /
• pp.505-512
• /
• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Proceedings of the IEEK Conference
• /
• 2000.06e
• /
• pp.163-166
• /
• 2000

This paper describes the principle of humidity sensor using high frequency resistance method for Hopper-Scale that is used in RPC(Rice processing Complex) which is spreaded out in domestic, and we also understand the principle and specificity of controller and humidity sensor. After artworking the humidity sensor and controller circuit, we measure the humidity of the designed system. In this progress, we suggested substitute parts which are easy to get in domestic and also we could propose correct method of humidity detection.

• Journal of Sensor Science and Technology
• /
• v.14 no.6
• /
• pp.395-401
• /
• 2005

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

• Current Optics and Photonics
• /
• v.7 no.1
• /
• pp.21-27
• /
• 2023

A highly sensitive optical-fiber humidity sensor is demonstrated in this paper. By using Nafion-PVA sol-gel and single-mode optical fibers, the Fabry-Perot humidity sensor is easily fabricated. In the humidity range of 29%-72%, humidity-response experiments are carried out with a cycle of rising and falling humidity to investigate humidity-response characteristics. The experimental results show 2.25 nm/%RH sensitivity and a 0.9997 linear correlation coefficient, with good consistency. The changes in optical-path difference (OPD) and free spectral range (FSR) with humidity are also discussed. The humidity sensitivities of a typical sensor are 80.3 nm/%RH (OPD) and 0.03 nm/%RH (FSR). Furthermore, many humidity sensors with different Nafion-PVA sol-gel concentration and initial cavity length are experimentally investigated for humidity response. The results show that the sensitivity increases with higher Nafion ratio of the Nafion-PVA sol-gel. The influence of changing cavity length on sensitivity is not obvious. These results are helpful to research on optical-fiber humidity sensors with good performance, easy fabrication, and low cost.

• Journal of Sensor Science and Technology
• /
• v.15 no.3
• /
• pp.205-210
• /
• 2006

Hydrophobic polymer [ex. Poly(vinylidenfluoride)] layer was coated on polyaniline (PANi) sensor to reduce the contamination humidity. The differences in sensitivity to methanol gas detection in various humidity condition between pure-PANi sensor and sensor coated with poly(vinylidenfluoride) polymer (PVDF) (coated-PANi sensor) were investigated. Considering the relation between the density of pore, which was coated on the layer of the PANi sensor, and sensitivity was investigated. To fabricate the porous PVDF layer on PANi sensor, poly(vinylalcohol) (PVA), which is water-soluble polymer, was used. Coated-PANi sensor was less affected by humidity compared with pure-PANi sensor. And higher density of pore on PVDF layer led to higher sensitivity.

• Journal of Sensor Science and Technology
• /
• v.18 no.5
• /
• pp.343-348
• /
• 2009

$NiO{\cdot}(Co_{0.25}Mn_{0.75})_2O_3$(Mn-Ni-Co) and $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thick films were screen printed on Pt patterned alumina substrate to investigate the effects of sintering temperature on humidity and temperature sensing properties of ceramic sensors. A raise in sintering temperature increased resistance and B constant of the Mn-Ni-Co temperature sensor. This may have derived from the synergic effects of the reduction in charge carriers caused by the substitution of Co for Mn as well as the formation of microcracks from the difference in thermal expansion coefficients. Dependence of resistance on humidity of the Mn-Ni-Co temperature sensor, however, was not found. BST films sintered at temperatures in the range of $1100^{\circ}C$ to $1150^{\circ}C$ showed excellent humidity sensing properties. The BST humidity sensor was faster in its response than the Mn-Ni-Co temperature sensor. The humidity sensor, however, proved to be unstable under various temperatures, suggesting a need for a temperature stabilizing device. In contrast, the Mn-Ni-Co temperature sensor was stable under humid conditions.

• Journal of Sensor Science and Technology
• /
• v.30 no.4
• /
• pp.243-249
• /
• 2021

Humidity is an important physical quantity that is closely related with the quality of everyday life as well as the quality control of products in various industries. Here, we have developed a divided-flow type humidity generator of which humidity generation is faster than the saturator-based humidity generator in ppm level. The operation principle of the divided-flow humidity generator is first introduced. Then, the performance of the divided-flow humidity generator is verified by testing the radiosonde humidity sensor at low temperature. As a result, the humidity generated from the divided-flow humidity generator is consistent with the saturator-based precision humidity generator within 1.6% relative humidity in the range from 10% to 40% at -45 ℃. It is also found that the radiosonde humidity sensor shows measurement errors by 3% - 5% at -45 ℃ when it is only calibrated at room temperature. The response times of radiosonde humidity sensor using the divided-flow humidity generator are between about 2 and 9 minutes, whereas those by the saturator-based humidity generator are about 20 minutes. In this regard, the divided-flow humidity generator has a merit in terms of fast humidity changes for the calibration of radiosonde humidity sensors at low-temperatures.

• Journal of Sensor Science and Technology
• /
• v.32 no.1
• /
• pp.51-54
• /
• 2023

We investigated a humidity sensor based on a polyimide-coated side-polished optical fiber. The polyimide film absorbed moisture, causing the resonant wavelength of the sensor to shift to a longer wavelength owing to the changes in the optical properties of the film. The experimental results showed that the resonant wavelength of the device shifted by 17-18 nm when relative humidity changed from 30% to 90%.

• Journal of Sensor Science and Technology
• /
• v.21 no.2
• /
• pp.83-89
• /
• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.