• Title/Summary/Keyword: Hot Carrier Stress

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Degradation of High Performance Short Channel N-type Poly-Si TFT under the Electrical Bias Caused by Self-Heating

  • Choi, Sung-Hwan;Song, In-Hyuk;Shin, Hee-Sun;Park, Sang-Geun;Han, Min-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1301-1304
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    • 2007
  • We have investigated degradation of short channel n-type poly-Si TFTs with LDD under high gate and drain voltage stress due to self-heating. We have found that the threshold voltage of short channel TFT is shifted to negative direction on the selfheating stress, whereas the threshold voltage of long channel is moved to positive direction.

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Electrical Characteristics of Poly-Si TFT`s with Improved Degradation (열화가 억제된 다결정 실리콘 박막 트랜지스터의 전기적 특성)

  • 변문기;이제혁;백희원;김동진;김영호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.457-460
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    • 1999
  • The effects of electrical positive stress on n-channel LDD and offset structured poly-Si TFT\`s have been systematically investigated in order to analyze the transfer curve\`s shift mechanism. It has been found that the LDD and offset regions behave as a series resistance that reduce the electric field near drain. Hot carrier effects are reduced because of these results. After electrical stress transfer curve’s shift and variation of the off-current are dependent upon the offset length rather than offset region’s doping concentration. Variation of the subthreshold slope is dependent upon offset region’s doping concentration as well as offset length.

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Comparative Analysis of Flicker Noise and Reliability of NMOSFETs with Plasma Nitrided Oxide and Thermally Nitrided Oxide (Plasma Nitrided Oxide와 Thermally Nitrided Oxide를 적용한 NMOSFET의 Flicker Noise와 신뢰성에 대한 비교 분석)

  • Lee, Hwan-Hee;Kwon, Hyuk-Min;Kwon, Sung-Kyu;Jang, Jae-Hyung;Kwak, Ho-Young;Lee, Song-Jae;Go, Sung-Yong;Lee, Weon-Mook;Lee, Hi-Deok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.12
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    • pp.944-948
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    • 2011
  • In this paper, flicker noise characteristic and channel hot carrier degradation of NMOSFETs with plasma nitrided oixde (PNO) and thermally nitrided oxide (TNO) are analyzed in depth. Compared with NMOSFET with TNO, flicker noise characteristic of NMOSFET with PNO is improved significantly because nitrogen density in PNO near the Si/$SiO_2$ interface is less than that in TNO. However, device degradation of NMOSFET with PNO by channel hot carrier stress is greater than that with TNO although PMOSFET with PNO showed greater immunity to NBTI degradation than that with TNO in previous study. Therefore, concurrent investigation of the reliability as well as low frequency noise characteristics of NMOSFET and PMOSFET is required for the development of high performance analog MOSFET technology.

The Antifibrotic and Antioxidant Activities of Hot Water Extract of Adventitious Root Culture of Panax ginseng (ARCP)

  • Lim, Hee-Kyoung;Kim, Youn-Woo;Lee, Dae-Ho;Cho, Somi-Kim;Cho, Moon-Jae
    • Journal of Applied Biological Chemistry
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    • v.50 no.2
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    • pp.78-84
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    • 2007
  • The anti-fibrotic effects of hot water extract of adventitious root culture of Panax ginseng (ARCP) and the possible mechanisms were investigated on $CCl_4-induced$ hepatotoxicity model mice. Fibrosis was induced by a mild treatment of $CCl_4$. Then silymarin as a positive control drug and ARCP or carrier alone as a negative control were treated. Serum GPT, GOT and ALP activity levels were lowered by 25, 21 and 11% for silymarin treated group and by 48, 39 and 14% for ARCP treated group compared to carrier treated alone. Hepatic collagen for ARCP treatment group was reduced by 18% and MDA contents decreased a little more. Pro-fibrotic gene ($TGF-{\beta}1$, TIMP-1 and ${\alpha}-SMA$) expression increased following the $CCl_4$ treatment, but both the silymarin and the ARCP treatments decreased the expressions of these genes by 20% to 50%. The antioxidant effect of ARCP was studied by DPPH free radical scavenging activity. In addition, a generation of reactive oxygen species (ROS) was also reduced in $H_2O_2-treated$ HepG2 cells upon the ARCP treatment. In summary, ARCP has antioxidant property, and can have some protection against oxidative stress; more importantly, ARCP can efficiently protect mice against $CCl_4-induced$ fibrosis.

Suppression of Gate Oxide Degradation for MOS Devices Using Deuterium Ion Implantation Method

  • Lee, Jae-Sung
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.4
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    • pp.188-191
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    • 2012
  • This paper introduces a new method regarding deuterium incorporation in the gate dielectric including deuterium implantation and post-annealing at the back-end-of-the process line. The control device and the deuterium furnace-annealed device were also prepared for comparison with the implanted device. It was observed that deuterium implantation at a light dose of $1{\times}10^{12}-1{\times}10^{14}/cm^2$ at 30 keV reduced hot-carrier injection (HCI) degradation and negative bias temperature instability (NBTI) within our device structure due to the reduction in oxide charge and interface trap. Deuterium implantation provides a possible solution to enhance the bulk and interface reliabilities of the gate oxide under the electrical stress.

Submicron CMOSFET에서 기판 방향에 대한 소자 성능 의존성 분석

  • Park, Ye-Ji;Han, In-Sik;Park, Sang-Uk;Gwon, Hyeok-Min;Bok, Jeong-Deuk;Park, Byeong-Seok;Lee, Hui-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.7-7
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    • 2009
  • In this paper, we investigated the dependence of HCI (Hot Carrier Immunity) degradation and device performance on channel orientation in sub-micron PMOSFET. Although device performance ($I_{D.sat}$ vs. $I_{Off}$) was improved as the transistor angle increased HC immunity was degraded. Therefore, consideration of reliability characteristics as well as dc device performance is highly necessary in channel stress engineering of next generation CMOSFETs.

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Reliability of Low Temperature Poly-Si TFT employing Counter-doped Lateral Body Terminal (저온 다결정 실리콘 박막 트랜지스터의 신뢰도 향상을 위한 Counter-doped Lateral Body Terminal (CLBT) 구조)

  • Kim, J.S.;Yoo, J.S.;Kim, C.H.;Lee, M.C.;Han, M.K.
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1442-1444
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    • 2001
  • A new low-temperature poly-Si TFT employing a counter-doped lateral body terminal is proposed and fabricated, in order to enhance the stability of poly-Si TFT driving circuits. The LBT structure effectively suppresses the kink effect by collecting the counter-polarity carriers and suppresses the hot carrier effect by reducing the peak lateral field at the drain junction. The proposed device is immune to dynamic stress, so that it is suitable for low voltage and high speed driving circuits of AMLCD.

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Polysilicon Thin Film Transistor for Improving Reliability using by LDD Structure

  • Jung, Eun-Sik;Jang, Won-Su;Bea, Ji-Chel;Lee, Young-Jae
    • Proceedings of the IEEK Conference
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    • 2002.07b
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    • pp.1050-1053
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    • 2002
  • In this paper, Amorphous silicon on glass substrate was recrystallized to poly-crystalline silicon by solid phase crystallization (SPC) technology. The active region of thin film transistor (TFT) was fabricated by amorphous silicon. The output and transfer characteristics of thin film transistor with lightly doped drain (LDD) structure was measured and analyzed. As a results, analyzed TFTs reliability with LDD's length by various kinds argument such as sub-threshold swing coefficient, mobility and threshold voltages were evaluated. Stress effects in TFT were able to improve to the characteristics of turn-on current and hot carrier effects by LDD's length variations.

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Polysilicon Thin Film Transistor for Improving Reliability using by U]D Structure (LDD 구조를 이용한 다결정 실리콘 박막 트랜지스터의 신뢰성 향상)

  • 정은식;장원수;배지철;이용재
    • Proceedings of the IEEK Conference
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    • 2002.06b
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    • pp.185-188
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    • 2002
  • In this paper, Amorphous silicon on glass substrate was recrytallized to poly-crystalline silicon by solid phase crystallization(SPC) technology The active region of thin film transistor(TFT) was fabricated by amorphous silicon. The output and transfer characteristics of thin film transistor with lightly doped drain(LDD) structure was measured and analyzed. As a results, analyzed TFT's reliability with LDD's length by various kinds argument such as sub-threshold swing coefficient, mobility and threshold voltages were evaluated. Stress effects in TFT were able to improve to the characteristics of turn-on current and hot carrier effects by LDD's length variations

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1/f Noise Characteristics of Sub-100 nm MOS Transistors

  • Lee, Jeong-Hyun;Kim, Sang-Yun;Cho, Il-Hyun;Hwang, Sung-Bo;Lee, Jong-Ho
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.1
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    • pp.38-42
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    • 2006
  • We report 1/f noise PSD(Power Spectrum Density) of sub-100 nm MOSFETs as a function of various parameters such as HCS (Hot Carrier Stress), bias condition, temperature, device size and types of MOSFETs. The noise spectra of sub-100 nm devices showed Lorentzian-like noise spectra. We could check roughly the position of a dominant noise source by changing $V_{DS}$. With increasing measurement temperature, the 1/f noise PSD of 50 nm PMOS device decreases, but there is no decrease in the noise of NMOS device. RTN (Random Telegraph Noise) was measured from the device that shows clearly a Lorentzian-like noise spectrum in 1/f noise spectrum.