• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.55-59
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• 2000

Nonlinearity is one of the primary causes of error in precision length measurement using laser interferometer. It arises periodically. The periodical nonlinearity usually ranges from sub-naometre to several namertres. In the homodyne interferometer, it results from a number of factors including polarization mixing, imperfect optical clement, unequal gain of detectors, misalignment of axes between input beam and beam splitter. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical least-square fitting technique associated with electric method and experimental results in one frequency polarization interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.9
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• pp.171-178
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• 2001

The nonlinearity of a laser interferometer usually ranges from sub-nanometer to several manometers. This nonlinearity, which has periodic characteristics, limits the accuracy of the interferometer at the sub-nanometer level. The nonlinearity error of the one-frequency homodyne interferometer with quadrature fringe detection results from a number of factors including polarization mixing by imperfect optical elements, unequal gain of photo detectors, lack of quadrature between two signals and misalignment. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical fitting technique with least-square method. Experimental results demonstrate that $^\pm$3.5 nm nonlinearity can be reduced to $^\pm$0.2 nm level.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.397-402
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• 2003

The FM demodulation method for a bulk homodyne laser interferometer is presented. The Doppler frequency that represents the surface velocity of a vibrating object is obtained by using the bulk homodyne laser interferometer, and converted to the voltage signal by using the proposed analogue FM demodulation circuit. The DC offsets of the interferent signals that are obtained from the bulk homodyne interferometer are eliminated by using a simple subtraction. The new method for compensation of the asymmetry of each channels is presented. The light power variation of the interferometer is normalized by using the Auto Gain Controller(AGC). The proposed FM demodulation algorithm is proved by the theoretical method, and validated by the experimental results. In experiments, the proposed FM demodulation algorithm is compared with the conventional demodulation methods.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.373-378
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• 2007

On the homodyne interferometers, high pass filter(HPF) is usually used to remove the electrical noise in the interferent signal. Heterodyne interferometer has modulating frequency is shifted in the frequency region where the electrical noise effect is minimized by HPF effect. However, on the homodyne interferometer, the interferent DC-component of homodyne interferometer is unfortunately eliminated by using a HPF because its shifted frequency does not exist. Moreover, this effect is more serious the vibration amplitude is smaller. So, when unstable interferent signals via HPF are demodulated, a velocity is distorted. In this work, the mathematical explanation for the distortion of the homodyne interferent signal using the HPF is given. New synthetic heterodyne LDV based on the homodyne interferometer by exciting the reference mirror is proposed for the cancellation of the distortion. The optimum excitation condition of the mirror to compensate the distortion is discussed. The numerical simulation using the commercial MATLAB code is provided to show the effect of the proposed synthetic heterodyne LDV. The experimental results are also given and the effect of the proposed LDV is discussed.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.242-247
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• 1990

By self-homodyne method we measured the relative phase fluctuation of a light wave. Balanced detection system can eliminate local oscillator excess noise and multiport detection makes it possible ot measure the phase change of the signal beam. Deriving the SB(Signal Beam) and the LO(Local Oscillator) from the same laser source, we find the SB maintain constant phase relative to that of the LO. We have introduced a phase fluctuation in the SB by modulating the beam path of the SB. The measured phase fluctuation agreed well with the predicted one, thereby we confirmed the reliability of our system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.249-250
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.367-368
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• 2006

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.80-84
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• 2007

We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.297-298
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• 2008

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.381-382
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• 2006