• 전자공학회논문지A
• /
• 제33A권6호
• /
• pp.114-119
• /
• 1996

The use of holographic interference lithography and removal techniques to corrugate GaAs substrate have been studied. The periodic photoresist structure, which serves as a protective mask during etching, is holographically prepared. Subsequently periodic V-grooved pattern is formed on the GaAs substrate by conventional a H$_{2}$SO$_{4}$-H$_{2}$O$_{2}$-H$_{2}$O wet etching. The linewidth of a GaAs pattern is about 0.4$\mu$m and the depth is 0.5$\mu$m A quantum wires(QWRs) array is well formed on the V-grooved substrate by MOCVD (metalorganic chemical vapor deposition) growth of GaAs/Al$_{0.5}$Ga$_{0.5}$As (50$\AA$/300$\AA$) quantum wells. The formation of QWR array is confirmed by the temperature dependent photoluminescence (PL) measurement. The intensive PL peak with a FWHM of 6meV at 21K shows the high quality of the QWR array.

• 소성∙가공
• /
• 제14권5호
• /
• pp.473-476
• /
• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
• /
• pp.676-678
• /
• 2005

Future Mobile displays and the emerging systems on Glass for the upcoming TFT_LCDs or Active-OLEDs based on LTPS, and the exciting c-Si critically require very-high resolution lithography. We report the methodology and latest results on the alignment, magnification control and stitching systems on a HMA500 holographic mask aligner for printing $0.5{\mu}m-resolution$ display patterns onto glass substrates of dimensions up to $500mm{\times}400mm$.

• 한국정보통신학회논문지
• /
• 제14권7호
• /
• pp.1680-1686
• /
• 2010

가우스 광분포를 가지는 248nm 파장의 KrF 엑시머 레이저 빔과 1.072um 주기를 가지는 위상마스크를 이용하여 최저 투과율 파장이 1549.9nm 인 광섬유 브래그 격자(Fiber Bragg Grating)를 제작하였다. 레이저 빔과 마스크 그리고 광섬유의 최적 정렬 과정을 조사하기 위해 평행 정렬 오차와 각 정렬 오차가 조사되었고 또한 엑시머 레이저의 투과 에너지와 발진 주파수의 변화에 따른 영향도 조사되었다. 실험 결과 얻어진 최적 정렬 조건 하에서 제작된 광섬유 격자의 광 투과 스펙트럼 형성 과정을 측정하여 특성이 분석되었고 이 같이 사용된 제작 조건의 안정성을 확인하기 위해 재현성 실험이 수행되었다.

• 한국광학회지
• /
• 제18권5호
• /
• pp.303-308
• /
• 2007

디지털 홀로그래피 현미경을 이용하여 반도체 공정에 사용되는 위상차 포토마스크의 결함을 측정하였다. 이러한 위상차 포토마스크는 위상차를 이용하여 반도체 문양을 만들기 때문에 일반 현미경으로는 패턴을 알 수 없을 뿐 아니라 위상마스크의 결함은 더욱더 찾기 어렵다. 디지털 홀로그래피 현미경을 이용하면 한 장의 홀로그램을 이용하여 위상차 포토마스크의 3차원 구조와 결함을 동시에 측정할 수 있다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.1885-1888
• /
• 2003

As high technology industries such as IT and display have developed, demand for application parts of micro lens and lens array has been extremely increasing. According to these trends, many researchers are studying on the fabrication technology for parts of the micro lens by a variety of methods such as MEMS, Lithography, LIGA and so on. In this paper, we have performed researches related to ultra precision micro lens, lens array mold and fabrication of Lenticular lens mold for three-dimensional display by using mechanical micro end-milling and fly-cutting fabrication method. Tools used in this research were a diamond tool of R 150$\mu\textrm{m}$. Cutting conditions set up feed rate, spindle revolution. depth of cut and dwell time as variables. And we analyzed surface quality variation of the processed products according to the cutting conditions, and then carried out experiments to search the optimum conditions. Through this research, we have confirmed that we can fabricate the ultra precision micro lens mold with surface roughness Ra=20nm and the holographic lens mold by using micro end-milling and fly-cutting fabrication method. Furthermore, we demonstrated problems happened in the fabrication of the micro lens and established the foundation of experimental study for formulating its improvement plan.

• Korean Chemical Engineering Research
• /
• 제46권4호
• /
• pp.647-659
• /
• 2008

콜로이드는 거시적으로 균일한 성질을 갖는 입자분산계이다. 콜로이드 입자는 다양한 입자분산계의 모델로서 많은 기초연구가 이루어져 왔을 뿐만 아니라, 산업적으로 다양하게 응용이 되었다. 최근에는 나노-바이오 관련 연구에 적용되어 새롭게 각광을 받고 있는 나노 소재중 하나이다. 본 총설에서는 입자 분산계의 정의 및 분류에 대해 간략히 기술하고, 나노-바이오 응용을 위한 표면 성질 및 표면 개질방법에 대해 다룰 것이다. 또한, 기존의 구형의 입자분산계에서 더 나아가, 모양과 크기가 제어된 입자 분산계의 합성에 관한 최근 결과를 소개하였다. 마지막으로, 콜로이드 입자의 나노-바이오 응용분야로서, 금속 콜로이드 잉크와, 3차원 콜로이드 결정을 활용한 나노-바이오 센서, 및 2차원 콜로이드 구조를 이용한 패턴제작과 응용 연구에 대해 살펴보았다.

• 한국근적외분광분석학회:학술대회논문집
• /
• 한국근적외분광분석학회 2001년도 NIR-2001
• /
• pp.1210-1210
• /
• 2001

On farm analysis of protein, moisture and oil in cereals and oil seeds is quickly being adopted by Australian farmers. The benefits of being able to measure protein and oil in grains and oil seeds are several : $\square$ Optimize crop payments $\square$ Monitor effects of fertilization $\square$ Blend on farm to meet market requirements $\square$ Off farm marketing - sell crop with load by load analysis However farmers are not NIR spectroscopists and the process of calibrating instruments has to the duty of the supplier. With the potential number of On Farm analyser being in the thousands, then the task of calibrating each instrument would be impossible, let alone the problems encountered with updating calibrations from season to season. As such, NIR technology Australia has developed a mechanism for \ulcorner\ulcorner\ulcorner their range of Cropscan 2000G NIR analysers so that a single calibration can be transferred from the master instrument to every slave instrument. Whole grain analysis has been developed over the last 10 years using Near Infrared Transmission through a sample of grain with a pathlength varying from 5-30mm. A continuous spectrum from 800-1100nm is the optimal wavelength coverage fro these applications and a grating based spectrophotometer has proven to provide the best means of producing this spectrum. The most important aspect of standardizing NIB instruments is to duplicate the spectral information. The task is to align spectrum from the slave instruments to the master instrument in terms of wavelength positioning and then to adjust the spectral response at each wavelength in order that the slave instruments mimic the master instrument. The Cropscan 2000G and 2000B Whole Grain Analyser use flat field spectrographs to produce a spectrum from 720-1100nm and a silicon photodiode array detector to collect the spectrum at approximately 10nm intervals. The concave holographic gratings used in the flat field spectrographs are produced by a process of photo lithography. As such each grating is an exact replica of the original. To align wavelengths in these instruments, NIR wheat sample scanned on the master and the slave instruments provides three check points in the spectrum to make a more exact alignment. Once the wavelengths are matched then many samples of wheat, approximately 10, exhibiting absorbances from 2 to 4.5 Abu, are scanned on the master and then on each slave. Using a simple linear regression technique, a slope and bias adjustment is made for each pixel of the detector. This process corrects the spectral response at each wavelength so that the slave instruments produce the same spectra as the master instrument. It is important to use as broad a range of absorbances in the samples so that a good slope and bias estimate can be calculated. These Slope and Bias (S'||'&'||'B) factors are then downloaded into the slave instruments. Calibrations developed on the master instrument can then be downloaded onto the slave instruments and perform similarly to the master instrument. The data shown in this paper illustrates the process of calculating these S'||'&'||'B factors and the transfer of calibrations for wheat, barley and sorghum between several instruments.