• Title/Summary/Keyword: Hollow-cathode discharge

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A study of the hollow cathode discharge (HOLLOW CATHODE DISCHARGE의 방전 특성 연구)

  • Cho, S.M.;Seo, Y.W.;Kim, M.J.;Whang, K.W.
    • Proceedings of the KIEE Conference
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    • 1989.11a
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    • pp.139-141
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    • 1989
  • The characteristics of the hollow cathode discharge were investigated. Temperature distribution of the hollow cathode was investigated and I-V curves of the hollow cathode discharge were obtained. In this paper variables are chamber pressure, Ar gas flow rate injected through the cathode tube and the gap distance between cathode and anode. The inter electrode electron temperature and density were measured by Langmuir probe.

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Measurement of Optogalvanic Signal in Hollow Cathode Discharge Tube (Hollow Cathode Discharge Tube에서의 광검류 신호 측정)

  • Lee, Jun-Hoi;Yoon, Man-Young;Kim, Song-Kang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.874-877
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    • 2002
  • The optogalvanic signals were measured using hollow cathode discharge tube with argon as buffer gas at change of discharge currents. A change of ionization rate due to electron collision causes an increase or decrease of the electric conductivity. This change in electric conductivity generates the optogalvanic signal. We conclude that optogalvanic signal has close relation with the lowest metastable atoms density at low current.

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Study on Characteristics of Plasma in Hollow Cathode Discharge (Hollow Cathode Discharge에서 플라즈마 특성에 관한 연구)

  • Yoon, Man-Young;Shin, Jong-Soon
    • Journal of the Korean Graphic Arts Communication Society
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    • v.23 no.2
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    • pp.93-101
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    • 2005
  • The measured plasma temperature of Ar hollow cathode discharge for several metal cathodes are about $620\;{\sim}\;780K$ at discharge current of $7\;{\sim}\;10mA$. The optogalvanic signals were measured using hollow cathode discharge tube with argon as buffer gas at change of discharge currents. A change of ionization rate due to electron collision causes an increase or decrease of the electric conductivity. This change in electric conductivity generates the optogalvanic signal. We conclude that optogalvanic signal has close relation with the lowest metastable atoms density at low current.

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A Study on the Nitriding of Sintered Metallic Components by Hollow Cathode Discharge (할로우 캐소드 방전에 의한 금속소결부품의 질화처리에 관한 연구)

  • Kim, Y.C.;Han, C.S.
    • Journal of the Korean Society for Heat Treatment
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    • v.25 no.2
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    • pp.80-84
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    • 2012
  • An apparatus was constructed to nitrify small metallic sintered components by using a hollow-cathode discharge plasma method. A stainless steel basket, which contains a sintered part to be nitrified, is potentially grounded and serves as hollow-cathode electrode. Hollow-cathode plasma was produced by supplying the positive voltage to the anode. In this study sintered carbon iron and stainless steel were used as testing specimens. It was shown that an effective nitrifying took place by controlling the total pressure of nitrogen and hydrogen gas and applied voltage.

Measurement of Optogalvanic Signal in Hollow Cathode Discharge Tube (Hollow cathode discharge tube에서의 광검류 신호 측정)

  • 이준회;정기주
    • Journal of the Korean Vacuum Society
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    • v.11 no.2
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    • pp.119-126
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    • 2002
  • The optogalvanic signals were measured using hollow cathode discharge tube with argon as buffer gas at change of discharge currents. A change of ionization rate due to electron collision causes an increase or decrease of the electric conductivity, This change in electric conductivity generates the optogalvanic signal. We conclude that optogalvanic signal has close relation with change of the lowest metastable atoms density at low current.

Changes in the Optogalvanic Signal Amplitude in a Hollow Cathode Discharge

  • Lee, Jun-Hoi;Koo, Kyung-Wan;Lee, Ki-Sik
    • Transactions on Electrical and Electronic Materials
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    • v.10 no.6
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    • pp.212-216
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    • 2009
  • The spatial distribution of the optogalvanic (OG) signal in argon at the 801.489 nm ($1s_5-2p_8$ transition at the metastable level in Paschen notation) was investigated in the radial direction of a hollow cathode discharge tube. The results of this experiment showed that the OG signal amplitude decreases in accordance with the following two conditions; first, the level of discharge current and second, the distance from the cathode dark space. These results can be quantified by analyzing the electron density profile along the discharge regions, which can directly influence the collisional ionization induced by electron impact.

The Fundamental Studies and Development of the Modified See - Through Hollow Cathode Glow Discharge Cell for Atomic Emission Spectrochemical Analysis (원자 방출 분광 분석을 위한 개선된 관통형 속빈 음극관 글로우 방전 셀 개발 및 기초 연구)

  • Lee, Sung-Hun;Cho, Won-Bo;Jeong, Jong-Pil;Choi, Woo-Chang;Borden, Stuart;Kim, Kyu-Whan;Lee, Change-Su;Lee, Sang-Chun
    • Analytical Science and Technology
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    • v.15 no.6
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    • pp.502-508
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    • 2002
  • See-through hollow cathode glow discharge cell has been developed for the trace analysis of metal ions. The systems consists of new glow discharge cell improved the cooling system. In the case of previous type of hollow cathode glow discharge cell, it had been utilized for the trace analysis of metal ions but it had a problem that the plasma becomes unstable by air-cooled device. In this study, the modified hollow cathode glow discharge cell has been developed in order to minimize the problem associated with the air-cooled device. thus the stability of the plasma with water-cooling device has been improved and also the higher plasma temperature has been measured. The fundamental characteristics of modified systems have been investigated. And the discharge parameters, such as discharge pressure, material, and diameter of cathode, have been studied to find optimum discharge conditions.

Development of a Plasma Gun System for Ion Plating with Long Lifetime (이온 플레이팅용 장수명 플라즈마 건 장치의 개발)

  • Choi, Young-Wook
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.1
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    • pp.78-81
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    • 2008
  • A hollow cathode which has extremely stable discharge characteristic has been developed. This is composed of the two separated lanthanum hexaboride(LaB6) of a disk type in the tube as the electron emitters. The way of design is of great advantage to extend the surface discharge area of the LaB6, which is also useful for optimal fixing of the LaB6. The hollow cathode is capable of producing 30 kW(100 V, 300 A) of power continuously. Because the generated plasma beam with the high temperature(above $3000^{\circ}C$) from the hollow cathode passes through the center hole of the two intermediate electrodes, it is designed with the high temperature material of the tungsten and the suitable structure of the water cooling. The combinations of the hollow cathode and the two intermediate electrodes are practically useful for the ion plating plasma beam source.

Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

  • Lee, Jun-Hoi;Shin, Jae-Soo;Lee, Sung-Jik;Lee, Min-Soo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.4
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    • pp.381-385
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    • 2005
  • The plasma temperature of Ar gas in hollow cathode discharge were measured. This is done by measuring the line profile of the 1s/sub 8/-2p/sub 8/ transition in Ar, using a single-frequency diode laser. Low power diode lasers have been successfully used for investigation of the line profiles of Ar transitions in hollow cathode discharges. It turns out that the plasma temperature of Ar is 640∼783 K in the discharge current range at 7∼10 mA.