• 반도체디스플레이기술학회지
• /
• 제20권4호
• /
• pp.119-124
• /
• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• 한국정밀공학회지
• /
• 제19권10호
• /
• pp.120-129
• /
• 2002

An integrated structure and controller design approach for rotating cantilever beam is presented. An optimization method is developed for improving positioning performance considering the elastic deformations during high speed rotation and adopting the beam shape and the control gains as design variables. For this end, a dynamic model is setup by the finite element method according to the shape of the beam. The mass and stiffness of the beam are distributed in such a way that the closed-loop poles of the control system should be located leftmost in the complex s-plane. For optimization method, the simulated annealing method is employed which has higher probability to find the global minimum than the gradient-based down-hill methods. Sequential design and simultaneous design methods are proposed to obtain the optimal shape and controller. Simulations are performed with new designs by the two methods to verify the effectiveness of the approach and the results show that the settling time is improved for point-to-point position controls.

• International Journal of Control, Automation, and Systems
• /
• 제1권1호
• /
• pp.1-10
• /
• 2003

This paper presents a high-precision magnetically levitated (maglev) stage to meet demanding motion specifications in the next-generation precision manufacturing and nanotechnology. Characterization of dynamic behaviors of such a motion stage is a crucial task. In this paper, we address the issues related to the stochastic modeling of the stage including transfer function identification, and noise/disturbance analysis and prediction. Provided are test results on precision dynamics, such as fine settling, effect of optical table oscillation, and position ripple. To deal with the dynamic coupling in the platen, we designed and implemented a multivariable linear quadratic regulator, and performed time-optimal control. We demonstrated how the performance of the current maglev stage can be improved with these analyses and experimental results. The maglev stage operates with positioning noise of 5 nm rms in $\chi$ and y, acceleration capabilities in excess of 2g(20 $m/s^2$), and closed-loop crossover frequency of 100 Hz.

• Journal of Power Electronics
• /
• 제6권3호
• /
• pp.264-270
• /
• 2006

Magnetic levitation transfer systems are useful for transfer tools in clean rooms and positioning control systems with high precision because of frictionless characteristics. In this paper, the new method is proposed which is a sensorless position. At first, the magnetic levitation is performed by state feedback control with a disturbance observer for each of six axes of the movement of a levitated vehicle. The position of the vehicle is then estimated as the disturbance term of a disturbance observer for a pitch angle which is one of the control axes for the magnetic levitation. In addition, the positioning force is generated by the pitch angle control which gives a tilt to the levitated vehicle so that it generates the horizontal component of force.

• 한국기계가공학회지
• /
• 제21권7호
• /
• pp.43-52
• /
• 2022

Design of a controller for a high-precision servo control system has been a popular topic while finding optimal parameters for multiple controllers is still a challenging subject. In this paper, we propose a practical scheme to optimize multi-parameters for the robust servo controller design by introducing a new cost function and optimization scheme. The proposed design method provides a simple and practical tool for the systematic servo design to reduce the control error with guaranteeing robust stability of the overall system. The reduction of the position error by 24% along with a faster convergence rate is demonstrated using a typical hard disk drive servo controller with 41 parameters.

• 동력기계공학회지
• /
• 제20권6호
• /
• pp.27-33
• /
• 2016

BLDC motors have the strong point of allowing high-efficiency operation, yet with the weak point of requiring position information for operation. Moreover, there have recently been frequent cases where the product differentiation of even a cheap BLDC motor demanded a high level of control performance similar to that of a controller using a high-precision position sensor. This paper proposes low cost position sensor that enables the acquisition of rotor position information based on index and incremental PWM, using a single position sensor instead of an expensive incremental encoder or a cheap 3 phase hall sensor. The characteristic of the proposed encoder is that index information at every $60^{\circ}$ of electrical angle is inscribed on the encoder disk, as well as a multiple number of values representing information about PWM, which is obtained by modulating information about the electrical angle of the rotor that has the resolution of $60^{\circ}$. Such a method has the characteristic of enabling the acquisition of high-precision position information based on the information about a multiple number of PWM waveforms and counter values that have all been inscribed on the encoder disk for each $60^{\circ}$ range. The feasibility of the proposed new encoder was verified by fabricating a prototype encoder generating 240 pulses, followed by confirming its performance using Micom's capture and software counter functions.

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
• /
• pp.125-128
• /
• 2005

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 추계학술대회 논문집
• /
• pp.361-365
• /
• 2002

In this paper, a magnetic suspension system with inductive sensors fur a high vacuum turbomolecular pump(TMP) is discussed. The performance of designed inductive position sensor is evaluated by static and dynamic test, and the test results show sensitivity of about 6,000 V/m and dynamic bandwidth of 750 ㎐. The protype of magnetic suspension system is designed and constructed with 5-axis magnetic bearing, inductive sensor and BLDC internal motor. With DSP based digital PID control system, the prototype is examined its high damping ratio and stable operation up to 20,000 rpm of rotation.

• 한국생산제조학회지
• /
• 제5권2호
• /
• pp.90-97
• /
• 1996

The purpose of this study is the development of a lathe which can cut any pistons of oval shape with high speed, accuracy and precision by CNC (Computer Numerical Control) method. Yaxis which is the mechanism of position determination with high speed response has been added to the CNC lathe and ovality and profile has been cut under the synchronous control of C-Y-Z axes. In the case of ovality of ø 0.5mm. the productivity can be improved up to 1500rpm by high speed cutting than modeling method.

• 한국정밀공학회지
• /
• 제28권12호
• /
• pp.1379-1387
• /
• 2011

A PID-feedforward controller and Robust Internal-loop Compensator (RIC) based on reinforcement learning using random variable sequences are provided to auto-tune parameters for each controller in the high-precision position control of PMLSM (Permanent Magnet Linear Synchronous Motor). Experiments prove the well-tuned controller could be reduced up to one-fifth level of tracking errors before learning by reinforcement learning. The RIC compared to the PID-feedforward controller showed approximately twice the performance in reducing tracking error and disturbance rejection.