• 한국정밀공학회지
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• 제12권2호
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• pp.79-86
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• 1995

Frequency response method is used to design hydraulic servo systems and improve its performance. In this study a method is proposed to get simply the frequency response of the electro-hydraulic servo system which use PWM controlled high-speed on-off valves. Firstly, the describing function of the PWM element is derived and tested. It is found that the character- istic of PWM element could be approximated to a saturation characteristic in the range of allowable frequency. And the dynamic characteristic of the valve-cylinder system could be negligible. The working characteristic of high-speed on-off valve is considered as time delay. So simulation is performed in the basis of the reconstructed block diagram. And this method is verified by experiments.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.371-372
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• 2006

In this paper, we propose a method that measures quality of digital correlator. Quality of digital correlator in field of image composition of radio astronomy have as important position for acquisition of radio wave image with high precision. Digital correlator should have wide bandwidth and high precision to study on deep space. Digital correlator, therefore, should be designed to have high speed processing and high precision. But, real time measurement of quality of digital correlator using acquisition data is difficult to compare accuracy of result because digital correlator should process a large quantity of data with high speed. Measurement method of quality, also, has intricate implementation of experiment equipment. this paper present methods that compose experiment equipment without external installation easily and verify quality of digital correlator perfectly.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.311-314
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• 1997

According to the development of industrial equipment such as semiconductor manufacturing machines, optical device, and precision machine tool, a high-precision translation system with wide range has been required. This paper describes a high-precision 2-axis translation system, which consists of microstage and global stage. In order to achieve the highresolution in the long range, some engineering techniques are used. Three linear guides with flexible coupling are adopted to reduce the motor vibration in the global stage. A simple elastic hinge structure activated by five PZT is applied to reduce the angular dev~atlon. As the result of combination of microstage and global stage associated with some engineering techniques, the 2-axis translation system can measure the 200 X 200 mrn range with the nanometer accuracy.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.362-369
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be expressed in the form of 'exactness' and 'accuracy', because this is made basic data in the use of building structure design. This paper made a study on the specification of high sensitive equipment and proposed a contents of the specification.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2019년도 춘계 학술논문 발표대회
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• pp.133-134
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• 2019

As information and construction technology increases, the demand for sophisticated geometric design grows. Design of buildings is becoming more larger, higher, and complicated every day, requiring much new construction technology to bring the design into reality. Nonetheless, the speed of construction technology development is not as rapid. This study concerns the difficulties of realization of sophisticated geometric design. It aims to suggest using BIM and precision survey equipment during the construction stage of the project is a way to resolve. The study will list how to use BIM as an engineering platform incorporating a photo scanner, a scanner drone, and a 3D scanner in the construction stage of projects, how these progressive projects were able to benefit from the high-construction technology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1651-1654
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• 2003

The process equipment for handling high level radioactive materials, such as spent nuclear fuel, is operated within a sealed facility, called a hot cell, due to high radioactivity. Thus, this equipment should be maintained and repaired by remotely operated manipulator. In this study, to carry out the sale and effective maintenance of the process equipment installed in the hot cell by a servo type manipulator, a collision free motion planning method of the manipulator using virtual prototyping technology is suggested. To do this, the parts are modelled in 3-D graphics, assembled, and kinematics are assigned and the virtual workcell is implemented in the graphical environment which is the same as the real environment. The method proposed in this paper is to find the optimal path of the manipulator using the function of the collision detection in the graphic simulator. The proposed path planning method and this graphic simulator of manipulator can be effectively used in designing of the maintenance processes for the hot cell equipment and enhancing the reliability of the spent fuel management.

• 소음진동
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• 제7권2호
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• pp.247-254
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Driver by Impact Test.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.493-494
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.441-442
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• 2007