• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.185-189
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• 2009

It is very important to control the vibration transmitted from external utilities and the transient response due to the internal sources for the precision equipment, which is very sensitive to the vibration environment. The anti-vibration tables that use air springs have been widely used due to their excellent isolation performance, but the systems with high flexibility have the critical problem of large transient response by the impulsive force of the moving mass in operation of the equipment. In this paper, the hybrid vibration control system is proposed, which is combined the air springs with the semi-active MR dampers in order to satisfy the performances of isolation and vibration reduction simutaneously.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.25-31
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• 2021

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1996.10a
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• pp.377-385
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• 1996

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. the former is accurate but requires a great deal of time and efforts while the latter lacks reliability. this paper proposes a new method to solve this problem at a time. the permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Drive by impact Test.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.195-201
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• 2004

In design stage of high precision manufacture/inspect ion FAB building, it is necessary to investigate the vibration allowable limits of high precision equipment and to study a structure dynamic characteristics of C/R and Sub-structure in order to provide a structure vibration environment to satisfy thess allowable limits. The aim of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next TFT LCD FAB through vibration measurement and analysis procedure, therefore, to provide a proper dynamic structure design for high precision manufacture/inspection work process, which satisfy thess allowable limits.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.7
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• pp.569-576
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• 2014

Sensor node means a device to include sensor, amplifier, and data acquisition (DAQ) equipment. The sensor converts physical signals to electric signals and weak signals from the sensor can be amplified through the amplifier. DAQ equipment converts analog signal to digital signal and collects converted digital signal. Since the sensor node is sensitive to the environment so that selection of mounting position and fixture design of sensor are applied differently depending on the characteristics of a target. This study is about designing and manufacturing sensor node to be used in a machine tool. The environment of machine tool is very severe due to noise, temperature fluctuation, and dust, etc. Hence, the sensor and amplifier must be designed and manufactured by considering the environmental issues. The designed and manufactured sensor node was tested for the reliability and effectiveness of the developed sensor nodes in the study.

• Progress in Medical Physics
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• v.13 no.3
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• pp.156-162
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• 2002

In this study, we attempted in preparing high precision EEG measuring equipment. To measure EEG in high efficiency, pre-amplifier should get high performance common mode rejection ratio. Also, separation amplifier is essential to eliminate common line noise. So, our study were pointed at elevating the efficiency of eliminating noise, user safety and low noise characteristics. Prepared high precision pre-amplifier for EEG was A/D converted to automatically classify $\alpha$ wave, $\beta$ wave and $\theta$ wave. And converted data were Fast Fourier Transformed with real time DSP (Digital Signal Processing). Clinical demonstrations were carried out with healthy students, aged between 20 to 26 who has no histories of illness. To recognize the efficiency of the EEG, prepared EEG were used with MS equipment in low stimulated state and high stimulated state. Then, we studied at the effect of sensitivity on brain wave. From this study, it is known that our EEG equipment is efficient in sensitivity evaluation and suitable stimulations for each psychological state are required.

• Transactions of Materials Processing
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• v.16 no.2 s.92
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• pp.132-137
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• 2007

A double roll rotary forming equipment is presented in this paper. The equipment is developed for joining the socket with the ball of a concave piston assembly with its geometrical tolerance requirements satisfied. The equipment is composed of a lathe, a double roll system and a roll pressing unit driven by the hydraulic system. The workpiece rotates by spindle chuck of the lathe while the double roll system approaches perpendicularly to the central line of the workpiece. The equipment is successfully applied to precision joining of the ball and the socket fur the concave piston assembly of a high pressure hydraulic pump.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.696-699
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• 2004

A side scan sonar system uses the towfish installed sonars, It is an equipment that search images of the bottom surface of the sea in real time. It is a typical equipment that is related to a sea investigation such as a geological survey, seabed communication cable and power line cable placing repair investigation, fish breeding ground investigation, sea purification, relic and mineral investigation, and mine and submarine search. It used to fined objects and investigate on the seabed surface. But, recently, it is used to sea purification and geological survey that require information of the correct surface of the seabed. So, it needs various filtering technique and image processing techniques development to acquire high resolution image. therefore, this research develops a side scan sonar using multi-beam sensors that supply various information with the fast scan speed and correct high resolution that is not a simple underwater investigation equipment.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.172-179
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• 2005

A high-precision centerless grinding machine has been recognized as a core equipment performing the finish outer-diameter grinding process of ferrules which are widely used as fiber optic connectors. In this study, in order to realize the high-precision centerless grinding machine, the structural characteristic analysis and evaluation are carried out on the virtual prototype consisted of the steel bed, hydrostatic GW and RW spindle systems, hydrostatic RW feed mechanism, RW swivel mechanism, and on-machine GW and RW dressers. The loop stiffnesses of centerless grinding machine are estimated based on the relative deformations between GW and RW caused by the grinding forces. And the simulated results illustrate that the concrete-filled bed has the considerable effect on the improvement of the structural stiffness of centerless grinding machine.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.290-290
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• 2009

Blu-ray Disk, the next generation optical information storing equipment used Blu-ray is the next generation leading storing equipment that has capacity is about from six times to thirty-five times bigger than the existing CDs, DVDs. Especially, we need elaborate optical pick-Up equipment to record and recognize detailed date. Moreover, Blu-ray disk has so narrow track-pitch so it is used high NA(Numerical Aperture) aspheric glass objective lens. In this research, we processed optical pick-up aspheric glass objective lens molding press core by parallel grinding method with ultra precision machining and mold core surface measured form accuracy(PV), surface roughness(Ra).