• 제목/요약/키워드: High-aspect-ratio tip

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High aspect ratio 팁의 비접촉모드에서의 측정 (Non-contact mode measurement of high aspect ratio tip)

  • 신영현;한창수
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.463-464
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    • 2006
  • This paper present experimental results by non-contact mode Atomic Force Microscopy using high aspect ratio tips (HAR-T). We fabricated the carbon nanotube tip based on dielectrophoresis and the carbon nano probe by focused ion beam after dielectrophoretic assembling. In this paper, we measure AAO sample and trench structure to estimate HAR-T's performance and compared with conventional Si tip. We confirmed that results of HAR-T's performance in non contact mode was very superior than conventional tip.

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초소형 고밀도 정보저장장치를 위한 고종횡비의 팁을 갖는 정전 구동형 폴리 실리콘 프로브 어레이 개발 (Electrostatically-Driven Polysilicon Probe Array with High-Aspect-Ratio Tip for an Application to Probe-Based Data Storage)

  • 전종업;이창수;최재준;민동기;전동렬
    • 한국정밀공학회지
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    • 제23권6호
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    • pp.166-173
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    • 2006
  • In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

하이브리드 자외선 노광법을 이용한 3차원 고종횡비 미소구조물 제작 (Hybrid UV Lithography for 3D High-Aspect-Ratio Microstructures)

  • 박성민;남경목;김종훈;윤상희
    • 대한기계학회논문집A
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    • 제40권8호
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    • pp.731-736
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    • 2016
  • 본 연구에서는 의용생체공학에 널리 사용되는 미소바늘과 같은 3차원 고종횡비 미소구조물을 용이하게 제작할 수 있는 하이브리드 자외선 노광법에 대해 기술한다. 하이브리드 자외선 노광법은 기존에 사용되고 있는 경사노광, 회전노광 및 역노광을 혼합한 방법으로, 경사 및 회전노광은 경사진 축대칭 형상을 가지는 3차원 미소구조물의 제작이 가능하도록 하고 역노광은 자외선 노광공정 중 필연적으로 발생하는 하부기판에서의 자외선 반사를 최소화 시킨다. 자체 개발한 자외선 노광시스템과 SU-8 음성감광제를 이용하여 하이브리드 자외선 노광법의 다양한 공정조건이 최종 제작된 3차원 고종횡비 미소구조물 형상(종횡비, 선단의 곡률반경 등)에 미치는 효과를 확인한다. 또한 SU-8의 소프트 베이킹(soft baking) 조건과 미소구조물 선단 형상 사이의 관계에 대해서도 논의한다.

Magnetic Force Microscopy (MFM) Study of Remagnetization Effects in Patterned Ferromagnetic Nanodots

  • Chang, Joon-Yeon;Fraerman A. A.;Han, Suk-Hee;Kim, Hi-Jung;Gusev S. A.;Mironov V. L.
    • Journal of Magnetics
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    • 제10권2호
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    • pp.58-62
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    • 2005
  • Periodic magnetic nanodot arrays were successfully produced on glass substrates by interference laser lithography and electron beam lithography methods. Magnetic force microscopy (MFM) observation was carried out on fabricated nanodot arrays. MFM tip induced magnetization effects were clearly observed in ferromagnetic elliptical nanodots varying in material and aspect ratio. Fe-Cr dots with a high aspect ratio show reversible switching of the single domain magnetization state. At the same time, Co nanomagnets with a low aspect ratio exhibit tip induced transitions between the single domain and the vortex state of magnetization. The simple nanolithography is potentially an efficient method for fabrication of patterned magnetic arrays.

고분자 전해질 막 연료전지를 위한 메탄 개질기에서 형상 변화가 개질 성능에 미치는 영향에 대한 연구 (Effect of Tip Size and Aspect Ratio on Reforming Performance in a Methane Reformer for Polymer Electrolyte Membrane Fuel Cell (PEMFC))

  • 서동균;노인규;황정호;최종균;신동훈;김형식
    • 한국수소및신에너지학회논문집
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    • 제21권5호
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    • pp.364-374
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    • 2010
  • Design of a reformer consisting of combustion chamber and reforming chamber was investigated for a 1 kW and a 5 kW polymer electrolyte membrane fuel cell (PEMFC), respectively, using the computational fluid dynamics (CFD). First, the 1kW reformer was considered to obtain the reliability of the numerical study. It was modeled, calculated and compared with experimental data. Second, the 5kW reformer was considered for a geometric study. Three tip sizes (35, 40, and 45 mm) and five aspect ratios was selected. It was found that the optimum was at tip sizes of 40 and 45 mm, at aspect ratios of -10% and -20% of the standard length.

탄소나노튜브 탐침의 나노 비선형 동역학 (Nanoscale Nonlinear Dynamics of Carbon Nanotube Probe Tips)

  • 이수일
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 춘계학술대회논문집
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    • pp.83-86
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    • 2004
  • Carbon nanotube (CNT) tips in tapping mode atomic force microscopy (AFM) enable very high-resolution imaging, measurements, and manipulation at the nanoscale. We present recent results based on experimental analysis that yield new insights into the dynamics of CNT probe tips in tapping mode AFM. Experimental measurements are presented of the frequency response and dynamic amplitude-distance data of a high-aspect-ratio multi-walled (MW) CNT tip to demonstrate the non-linear features including tip amplitude saturation preceding the dynamic buckling of the MWCNT. Surface scanning is performed using a MWCNT tip on a SiO$_2$ grating to verify the imaging instabilities associated with MWCNT buckling when used with normal control schemes in the tapping mode. Lastly, the choice of optimal setpoints for tapping mode control using CNT probe tip are discussed using the experimental results.

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전자빔 조사에 의한 탄소상 탐침의 성장 (Carbon tip growth by electron beam deposition)

  • 김성현;최영진
    • 한국진공학회지
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    • 제12권2호
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    • pp.144-149
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    • 2003
  • 주사전자현미경을 이용한 전자빔의 직접조사에 의해 실리콘 캔틸레버 위에 탄소상 탐침을 성장하였다. 오일확산 펌프의 잔류가스 분위기에서 실리콘 캔틸레버와 전자빔을 수직으로 정렬한 다음 전자현미경의 스폿 모드를 통해 전자빔을 일정시간 동안 조사시켜 탄소상 탐침을 성장시켰다. 주사전자현미경의 제어변수인 조사시간, 가속전압, 방출 전류, 전자빔 프로브 전류 등을 변화시킴으로써 다양한 종횡비를 가지는 탐침을 성장시킬 수 있었으며, 성장 위치의 표면 형상과 무관하게 탐침을 성장시킬 수 있었다. 그 결과 유효길이 0.5 $\mu\textrm{m}$, 바닥직경 90 nm,콘의 반각 $3.5^{\circ}$인 탐침을 성장시켰다. 탐침이 없는 캔틸레버에 고종횡비 탄소상 탐침을 성장시킬 수 있는 기술은 PZT 박막구동기가 집적화된 AFM 캔틸레버의 탐침 형성 과정에서 발생하는 제작과정의 번거로움을 극복하는데 적용될 수 있다.

DISTRIBUTION OF FUEL MASS AFTER WALL IMPINGEMENT OF DIESEL SPRAY

  • Ko, K.N.;Huh, J.C.;Arai, M.
    • International Journal of Automotive Technology
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    • 제7권4호
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    • pp.493-500
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    • 2006
  • Investigation on the fuel adhering on a wall was carried out experimentally to clarify the characteristics of impinging diesel sprays. Diesel sprays were injected into a high-pressure chamber of cold state and impinged to a wall having various impingement distances and ambient pressures. Photographs of both the fuel film and the post-impingement spray were taken through a transparent wall. Adhered fuel mass on a wall was measured by means of dividing into two types of fuel state: the fuel film itself; and sparsely adhered fuel droplets. Adhering fuel ratio was predicted and further the distribution of fuel mass for impinging diesel spray was analyzed as a function of time. As result, with an increase of the ambient pressure, both the maximum fuel film diameter and the adhered fuel ratio decreased. Based on some assumptions, the adhering fuel mass increased rapidly until the fuel film diameter approached the maximum value, and then increased comparatively gradually.

덕트 종횡비가 회전덕트 내 압력강하에 미치는 영향 (Effect of Duct Aspect Ratios on Pressure Drop in a Rotating Two-Pass Duct)

  • 김경민;이동현;조형희
    • 대한기계학회논문집B
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    • 제30권6호
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    • pp.505-513
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    • 2006
  • The pressure drop characteristics in a rotating two-pass duct with rib turbulators are investigated in the present study. Three ducts of different aspect ratios (W/H=0.5, 1.0 and 2.0) are employed with a fixed hydraulic diameter ($D_h$) of 26.7 mm. $90^{\circ}$-rib turbulators with $1.5mm{\times}1.5mm$ cross-section are attached on the leading and trailing surfaces. The pitch-to-rib height ratio (p/e) is 1.0. The distance between the tip of the divider and the outer wall of the duct is 1.0 W. The thickness of divider wall is 6.0 mm o. 0.225 $D_h$. The Reynolds number (Re) based on the hydraulic diameter is kept constant at 10,000 and the .elation number (Ro) is varied from 0.0 to 0.2. As duct aspect ratio increases, high friction factor ratios show in overall regions. The reason is that the rib height-to-duct height ratio (e/H) increases, but the divider wall thickness-to-duct width ($t_d/W$) decreases. The rotation of duct produces pressure drop discrepancy between the leading and trailing surfaces. However, the pressure drop discrepancy of the high duct aspect ratio (AR=2.0) is smaller than that of the low duct aspect ratio (AR=0.5) due to the decrement of duct hight (H).

The effect of needle tip position on the analgesic efficacy of pulsed radiofrequency treatment in patients with chronic lumbar radicular pain: a retrospective observational study

  • Kim, Won-Joong;Park, Hahck Soo;Park, Min Ki
    • The Korean Journal of Pain
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    • 제32권4호
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    • pp.280-285
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    • 2019
  • Background: Pulsed radiofrequency (PRF) is a treatment modality that alleviates radicular pain by intermittently applying high-frequency currents adjacent to the dorsal root ganglion. There has been no comparative study on analgesic effect according to the position of the needle tip in PRF treatment. The objective of this study is to evaluate the clinical outcomes of PRF according to the needle tip position. Methods: Patients were classified into 2 groups (group IP [group inside of pedicle] and group OP [group outside of pedicle]) based on needle tip position in the anteroposterior view of fluoroscopy. In the anteroposterior view, the needle tip was advanced medially further than the lateral aspect of the corresponding pedicle in group IP; however, in group OP, the needle tip was not advanced. The treatment outcomes and pain scores were evaluated at 4, 8, and 12 weeks after applying PRF. Results: At 4, 8, and 12 weeks, there were no significant differences between the successful response rate and numerical rating scale score ratio. Conclusions: The analgesic efficacy of PRF treatment did not differ with the needle tip position.