• 한국정밀공학회지
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• 제31권3호
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• pp.207-213
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• 2014

A study was carried out to fabricate the cutting tool geometry with micro/nanoscale on the single crystal diamond tool by using the FIB. The FIB technique is an ideal tool for TEM sample preparation that allows for the fabrication of electron-transparent foils. The FIB is appropriate techniques to sample and subsequently define the chemical composition and the structural state of mineral inclusion on the micro/nanoscale. The combination of FIB with a SEM allows for 3D information to be obtained from samples including 3D imaging. Cutting strategies were demonstrated to improve the performance of cutting tool geometry and to generate high aspect ratio micro cutting tool. A finely focused beam of 30keV Ga+ ions was used to mill cutting tool shapes for various micro patterns. Therefore FIB sputtering is used to shape a variety of cutting tools with dimensions in the $1-5{\mu}m$ range and cutting edge radii of curvature of under 50nm.

• 한국광학회지
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• 제32권4호
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• pp.172-179
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• 2021

높은 종횡비를 가지는 미세 패턴 시료의 하부층 구조결함에 대해 높은 민감도를 가지는 광학적 임계치수 측정 장비로서 준 수직입사 타원계를 제안한다. 이 준 수직입사 타원계에서는 입사광은 편광자와 위상지연자를 순차적으로 통과하며 반사광은 이들을 역순으로 통과한다. 하나의 편광자와 하나의 위상지연자를 입사광과 반사광이 공유하며 편광자와 위상지연자의 여러 방위각 조합에서 측정한 빛의 세기로부터 타원상수를 결정하는 이 준 수직입사 타원계의 측정원리를 검토하고 최적의 타원상수 측정방법을 제시한다.

• 한국생산제조학회지
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• 제22권2호
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• pp.263-267
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• 2013

The continuing demand for increasingly slimmer and brighter liquid crystal display (LCD) panels has led to an increased focus on the role of light guide panels (LGPs) or optical films that are used to obtain diffuse, uniform light from the backlight unit (BLU). The most basic process in the production of such BLU components is the micromachining of V-shaped grooves. Thus, given the current trend, micromachining of V-shaped grooves is expected to play increasingly important roles in today's manufacturing technology. LCD BLUs comprise various optical elements such as a LGP, diffuser sheet, prism sheet, and protector sheet with V-shaped grooves. High-aspect-ratio patterns are required to reduce the number of sheets and enhance light efficiency, but there is a limit to the aspect ratio achievable for a given material and cutting tool. Therefore, this study comprised a series of experimental evaluations conducted to determine the machining limit in microcutting V-shaped grooves on electroless nickel plated die materials when using single-crystal diamond tools with point angles of $20^{\circ}-80^{\circ}$. Cutting performance was evaluated at various cutting speeds and depths of cut using different machining methods and machine tools. The experimental results are that V-shaped patterns with angles of $80^{\circ}$ or up can be realized regardless of the machining conditions and equipment. Moreover, the feed rate has little effect on machinability, and it is thought that the fly-cut method is more efficient for shallow patterns.

• 한국기계가공학회지
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• 제12권5호
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• pp.30-35
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• 2013

In order to increase cell efficiency in crystalline silicon solar cell, reduction of light reflection is one of the essential problem. Until now silicon wafer was textured by wet etching process which has random patterns along crystal orientation. In this study, high aspect ratio patterns are manufactured by nano imprint process and reflectance could be minimized under 1%. After that, screen printed solar cell was fabricated on the textured wafer and I-V characteristics was measured by solar simulator. Consequently cell efficiency of solar cell fabricated using the wafer textured by nano imprint process increased 1.15% than reference solar cell textured by wet etching. Internal quantum efficiency was increased in the range of IR wave length but decreased in the UV wavelength. In spite of improved result, optimization between nano imprinted pattern and solar cell process should be followed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1453-1460
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• 2003

The present study investigates the effects of rib arrangements and aspect ratios of a rectangular duct simulating the cooling passage of a gas turbine blade. Two different V-shaped rib configurations are tested with the aspect ratios (W/H) of 3 to 6.82. One is the continuous V-shaped rib configuration with $60^{\circ}$ attack angle, and the other is the discrete V-shaped rib configuration with $45^{\circ}$ attack angle. The square ribs with the pitch to height ratio of 10.0 are installed on the test section in a parallel arrangement for both rib configurations. Reynolds numbers based on the hydraulic diameter are changed from 10,000 to 30,000. A naphthalene sublimation method is used to measure local heat/mass transfer coefficients. For the continuous V-shaped rib configuration, two pairs of counter-rotating vortices are generated in a duct, and high transfer region is formed at the center of the ribbed walls of the duct. However, for the discrete V-shaped rib configuration with $45^{\circ}$ attack angle, complex secondary flow patterns are generated in the duct due to its geometric feature, and more uniform heat/mass transfer distributions are obtained for all tested cases

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.167-171
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• 2021

The core-shell InGaN/GaN Multi Quantum Well-Nanowires (MQW-NWs) that were selectively grown on oxide templates with perfectly circular hole patterns were highly crystalline and were shaped as high-aspect-ratio pyramids with semi-polar facets, indicating hexagonal symmetry. The formation of the InGaN active layer was characterized at its various locations for two types of the substrates, one containing defect-free MQW-NWs with GQDs and the other containing MQW-NWs with defects by using HRTEM. The TEM of the defect-free NW showed a typical diode behavior, much larger than that of the NW with defects, resulting in stronger EL from the former device, which holds promise for the realization of high-performance nonpolar core-shell InGaN/GaN MQW-NW substrates. These results suggest that well-defined nonpolar InGaN/GaN MQW-NWs can be utilized for the realization of high-performance LEDs.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.24-29
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• 2005

Fm (Focused ion beam) system is one of the most important equipments for the nano-scale machining. Various researches have been performed, since it can etch the material and deposit 3-D structure with high-aspect-ratio in the nanometer scale. In spite of those researches, the definite method for the reliability of FIB system has not been reported. In this paper, we proposed the reliability assessment method through nano-pattern fabrication. In the fabricated nano-pattern, the characteristics of FIB system are included. Using this effect, we tried to assess the FIB reliability. First, we suggested reliability assessment items and nano-patterns. And, to know the suitableness of the proposed method, we fabricated several nano-patterns using Nova200(FEI Company) and SMI2050(SEIKO) which are FIB apparatuses. The fabricated nano-patterns are measured with SEM (Scanning Electron Microscope) and compared with designed dimensions. And the compared results showed that the proposed method is suitable for the assessment of FIB system reliability.

• 반도체디스플레이기술학회지
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• 제10권4호
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• pp.65-70
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• 2011

These days, printed electronics attract attention from electronics industry. In this paper, the fabrication of the fine patterns by Near Field Electro Spinning (NFES) was studied by using Ag ink on silicon wafer (substrate). Two types of ink, the high viscous ink Ag-200 and low viscous ink Ag-15, were used. The fine and uniform patterns were easily fabricated by using Ag-200 because jet breakup is less occurred in high viscosity solution. As increasing flow rate of solution, aspect ratio of Ag pattern decreased. And there was optimum applied voltage for fine pattern. In case of Ag-200, the optimum applied voltage was about 2.02KV. When pattern was fabricated by NFES, the pattern width and height were affected by many factors such as viscosity, flow rate of solution, applied voltage etc.

• Nuclear Engineering and Technology
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• 제52권11호
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• pp.2499-2510
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• 2020

We performed 3-D (3-dimensional) IVR (In-Vessel Retention) natural convection experiments simulating the oxide layer in the three-layer configuration, varying the aspect ratio (H/R). Mass transfer experiment was conducted based on the analogy to achieve high Ra_H's of 1.99 × 10¹²-6.90 × 10¹³ with compact facilities. Comparisons with 2-D (2-dimensional) experiments revealed different local heat transfer characteristics on upper and lower boundaries of the oxide layer depending on the H/R. For the 3-D shallow oxide layer, the multi-cell flow patterns appeared and the number of cells was considerably increased with the H/R decreases, which differs with the 2-D experiments that the number of cells was independent on H/R. Thus, the enhancement of the downward heat transfer and the mitigation of the focusing effect were more noticeable in the 3-D experiments.

• 한국정밀공학회지
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• 제30권6호
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• pp.573-577
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• 2013

The one of the most important issue in roll-to-roll gravure printing is increase of ink transfer ratio or printability. As the result of high ink transfer ratio or printability, we can assess the quality of the printed patterns. The rheological properties are the important factors for the printability of electrodes patterning. In this study, the rheological properties of conductive ink are controlled by adding the solvent. The inks with different rheological properties are used for the patterning of the electrodes of $100{\mu}m$ by gravure printing equipment. The various printing speed, which also affect the rheological properties of conductive ink, is applied and the printed patterns are compared for their width and aspect ratio. Decreasing in the ink viscosity as well as increasing in the printing speed decreases the printability in gravure patterning, which shows that the rheological properties are important factors for the printability of gravure patterning.