• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.253-259
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• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.291-291
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• 2010

Electron-beam lithography (EBL) process is a versatile tool for a fabrication of nanostructures, nano-gap electrodes or molecular arrays and its application to nano-device. However, it is not appropriate for the fabrication of sub-5 nm features and high-aspect-ratio nanostructures due to the limitation of EBL resolution. In this study, the precision assembly and alignment of DNA molecule was demonstrated using sub-5 nm nanostructures formed by a combination of conventional electron-beam lithography (EBL) and plasma ashing processes. The ma-N2401 (EBL-negative tone resist) nanostructures were patterned by EBL process at a dose of $200\;{\mu}C/cm2$ with 25 kV and then were ashed by a chemical dry etcher at microwave (${\mu}W$) power of 50 W. We confirmed that this method was useful for sub-5 nm patterning of high-aspect-ratio nanostructures. In addition, we also utilized the surface-patterning technique to create the molecular pattern comprised 3-(aminopropyl) triethoxysilane (APS) as adhesion layer and octadecyltrichlorosilane (OTS) as passivation layer. DNA-templated gold nanoparticle chain was attached only on the sub-5 nm APS region defined by the amine groups, but not on surface of the OTS region. We were able to obtain DNA molecules aligned selectively on a SiO2/Si substrate using atomic force microscopy (AFM).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• 한국항공우주학회지
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• 제34권3호
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• pp.31-36
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• 2006

본 연구에서는 천음속미소교란 및 대변형 보 이론을 이용하여 대변형이 발생되는 가로세로비가 큰 날개의 비선형 정적 공탄성 해석 시스템을 개발하고 검증하였다. 유체/구조간 직접 연계를 위하여 구조 격자에서 유체 격자로의 변위의 변환은 보 유한 요소 모델에 사용된 형상 함수를 유체 격자에서 구조 격자로의 힘의 변환은 일 등가 하중의 개념을 사용하였다. 그리고 이러한 날개의 정적 공탄성 해석 시, 이론적으로 TSD 공기력 사용의 타당성을 보였다. 또한 본 연구에서의 검증은 직접 연계된 공탄성 시스템의 효율적인 힘/변위 변환 기법의 검증을 포함한다.

• Journal of the Optical Society of Korea
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• 제18권5호
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• 한국정밀공학회지
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• 제31권3호
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• pp.207-213
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• 2014

A study was carried out to fabricate the cutting tool geometry with micro/nanoscale on the single crystal diamond tool by using the FIB. The FIB technique is an ideal tool for TEM sample preparation that allows for the fabrication of electron-transparent foils. The FIB is appropriate techniques to sample and subsequently define the chemical composition and the structural state of mineral inclusion on the micro/nanoscale. The combination of FIB with a SEM allows for 3D information to be obtained from samples including 3D imaging. Cutting strategies were demonstrated to improve the performance of cutting tool geometry and to generate high aspect ratio micro cutting tool. A finely focused beam of 30keV Ga+ ions was used to mill cutting tool shapes for various micro patterns. Therefore FIB sputtering is used to shape a variety of cutting tools with dimensions in the $1-5{\mu}m$ range and cutting edge radii of curvature of under 50nm.

• 한국광학회지
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• 제32권4호
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• pp.172-179
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• 2021

높은 종횡비를 가지는 미세 패턴 시료의 하부층 구조결함에 대해 높은 민감도를 가지는 광학적 임계치수 측정 장비로서 준 수직입사 타원계를 제안한다. 이 준 수직입사 타원계에서는 입사광은 편광자와 위상지연자를 순차적으로 통과하며 반사광은 이들을 역순으로 통과한다. 하나의 편광자와 하나의 위상지연자를 입사광과 반사광이 공유하며 편광자와 위상지연자의 여러 방위각 조합에서 측정한 빛의 세기로부터 타원상수를 결정하는 이 준 수직입사 타원계의 측정원리를 검토하고 최적의 타원상수 측정방법을 제시한다.

• 한국포장학회지
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• 제19권2호
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• pp.95-102
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• 2013

고밀도 폴리에틸렌(High density polyethylene, HDPE)을 수분에 민감한 전기전자제품, 의약품 등을 위한 하이배리어 패키징 소재로써 적용하기 위해서 높은 가로세로비(High aspect ratio)를 가진 Exfoliated graphite (이하 EFG)를 필러로 도입하였다. 또한, 효과적인 분산성과 혼화성을 위해서 상용화제를 첨가하여 HDPE/EFG 나노복합필름을 제조하였다. HDPE/EFG 나노복합필름의 EFG 함량에 따른 화학적 특성, 모폴로지(Morphology), 열적 특성 및 수분차단 특성을 조사하였다. HDPE와 EFG 사이에 화학적 결합이나 상호작용이 약하지만, EFG를 첨가함에 따라 수증기 투과도는 127에서 78 (70 ${\mu}m{\cdot}g/m^2$, $day{\cdot}atm$)까지 감소되었다. 특히, HDPE/EFG 나노복합필름은 EFG의 함량이 0.5%일 때 가장 효과적이며, 그 이상의 함량에서는 물성이 향상되지 않았다. 따라서, 물성의 극대화를 위해서는 EFG의 분산성 향상 및 HDPE와 EFG의 화학적 결합 등의 혼화성 개선에 관한 추가적인 연구가 필요하다.

• 한국산학기술학회논문지
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• 제18권12호
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• pp.697-704
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• 2017

고성능 섬유보강 시멘트 복합체(High-Performance Fiber-Reinforced Cement Composites, HPFRCC)는 내구성 및 연성이 우수할 뿐만 아니라, 강도발현이 뛰어나 구조부재 적용 시 단면을 상당히 감소시켜 자중을 줄일 수 있는 재료로 관심을 받고 있다. 이에 본 연구에서는 HPFRCC에 사용 가능한 다양한 강섬유 종류 및 강섬유의 특성에 따라 휨 실험을 수행하였으며, 휨 성능 분석을 통해 효율적인 섬유보강 방법을 모색하여 경제성을 향상시키고자 하였다. 따라서 보다 효율적인 섬유보강 방법을 찾기 위해 기존길이 13 mm 보다 긴 강섬유를 소성 변형시킨 갈고리형 강섬유, 비틀림 강섬유를 사용하여 섬유의 모양(shape), 형상비(aspect ratio) 혼입율에 대한 휨 특성을 평가하고 분석하고자 하였다. 실험결과 HPFRCC에 일자형태를 가지는 길이 19.5 mm의 강섬유를 1.5%만큼 혼입할 경우 기존에 많이 사용되고 있는 길이 13 mm의 일자형 강섬유를 2.0% 혼입하였을 때 보다 뛰어난 휨 성능을 나타내었다. 따라서 섬유량을 줄여줄 수 있기 때문에 보다 경제성이 우수한 강섬유 보강 HPFRCC를 제조할 수 있을 것으로 판단되었다.

• Journal of Advanced Marine Engineering and Technology
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• 제22권6호
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• pp.935-941
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• 1998

Experiments were carried out for a cubic cavity flow. Contrinuous shear stress is supplied by driven flow for high Reynolds number and three kinds of aspect ratios. Velocity vectors are obtained by PIV and they are used as velocity components for Poisson equation for pressure, Related boundary conditions and no-slip condition at solid wall and the linear velocity extrapolation on the upper side of cavity are well examined for the present study. For calculation of pressure resolution of grid is basically $40{\times}40$ and 2-dimensional uniform mesh using MSC staggered grid is adopted. The flow field within the cavity maintains a forced-vortex formation and almost of the shear stress from the driving inflow is transformed into rotating flow energy and the size of the distorted forced-vortex increases with increment of Reynolds number