• 한국정밀공학회지
• /
• 제31권7호
• /
• pp.569-576
• /
• 2014

Sensor node means a device to include sensor, amplifier, and data acquisition (DAQ) equipment. The sensor converts physical signals to electric signals and weak signals from the sensor can be amplified through the amplifier. DAQ equipment converts analog signal to digital signal and collects converted digital signal. Since the sensor node is sensitive to the environment so that selection of mounting position and fixture design of sensor are applied differently depending on the characteristics of a target. This study is about designing and manufacturing sensor node to be used in a machine tool. The environment of machine tool is very severe due to noise, temperature fluctuation, and dust, etc. Hence, the sensor and amplifier must be designed and manufactured by considering the environmental issues. The designed and manufactured sensor node was tested for the reliability and effectiveness of the developed sensor nodes in the study.

• 한국전기전자재료학회논문지
• /
• 제14권6호
• /
• pp.470-474
• /
• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pressure sensors, in which the sensing elements were deposited on SuS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition(300$\^{C}$, 3 hr) in Ar-10%N$_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, ρ=1147.65 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=186ppm/$\^{C}$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20nA and the maximum non-linearity is 0.4%FS and hysteresis is less than 0.2%FS.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2000년도 하계학술대회 논문집 C
• /
• pp.2186-2188
• /
• 2000

A fiberoptic sensor using an SLD as a light source has been studied. The sensor system employs an intrinsic fiber Fabry-Perot interferometer as a sensing tip and a fiber Mach-Zehnder interferometer as a processing one. A free loading test for temperature application shows that the fiberoptic sensor has a wide-dynamic range as well as high resolution. Due to the inherent property of the optical fiber itself and the intrinsic Fabry-Perot interferometer. the fiberoptic sensor gives obvious benefits when it is applied to harsh environments to monitor some physical parameters such as temperature, strain, pressure and vibration.

• 센서학회지
• /
• 제18권2호
• /
• pp.116-121
• /
• 2009

Pressure-controlled sodium heat pipe furnace was designed and fabricated, and its characteristics was investigated. Pressure control system was controlled within ${\pm}0.5\;Pa$ at 150 kPa and the stability of pressure was decreased to ${\pm}2.5\;Pa$, when the pressure-controlled system connected with the heat pipe. The melting curve of Ag fixed-point realized well by the adiabatic method using the pressure-controlled sodium heat pipe furnace and its accuracy showed ${\pm}2.27\;mK$ from the calculation of 20% to 80% at the plateau. The freezing curve of Ag fixed-point also realized and its plateau value was 2.23 mK lower than that of the melting curve.

• 한국압력기기공학회 논문집
• /
• 제6권2호
• /
• pp.47-53
• /
• 2010

In this research project, development of methodology to measure the thickness of pipes in the wide range using magnetic field. The magnetic field spreading in the sensor and the plate was modeled in the cases of the various thicknesses in plate. Based on the analysis, sensors were designed, manufactured and tested to optimize the specifications of the sensor. The sensor can be used in high temperature through calibration. And the uncertainty of the sensor was estimated.

• 센서학회지
• /
• 제27권3호
• /
• pp.186-191
• /
• 2018

Smart textile industries have been precipitously developed and extended to electronic textiles and wearable devices in recent years. In particular, owing to an increasingly aging society, the elderly healthcare field has been highlighted in the smart device industries, and pressure sensors can be utilized in various elderly healthcare products such as flooring, mattress, and vital-sign measuring devices. Furthermore, elderly healthcare products need to be more lightweight and flexible. To fulfill those needs, textile-based pressure sensors is considered to be an attractive solution. In this research, to apply a textile to the second layer using a pressure sensing device, a novel type of conductive textile was fabricated using vapor phase polymerization of poly(3,4-ethylenedioxythiophene) (PEDOT). Vapor phase polymerization is suitable for preparing the conductive textile because the reaction can be controlled simply under various conditions and does not need high-temperature processing. The morphology of the obtained PEDOT-conductive textile was observed through the Field Emission Scanning Electron Microscope (FESEM). Moreover, the resistance was measured using an ohmmeter and was confirmed to be adjustable to various resistance ranges depending on the concentration of the oxidant solution and polymerization conditions. A 3-layer 81-point multi-pressure sensor was fabricated using the PEDOT-conductive textile prepared herein. A 3D-viewer program was developed to evaluate the sensitivity and multi-pressure recognition of the textile-based multi-pressure sensor. Finally, we confirmed the possibility that PEDOT-conductive textiles could be utilized by pressure sensors.

• 한국광학회지
• /
• 제10권4호
• /
• pp.273-278
• /
• 1999

광섬유 Fabry-Perot 간섭계를 센서로 하는 TDM 다중화 광섬유 압력/온도 센서시스템을 개발하고, 이 시스템을 이용하여 수위와 온도 측정실험을 행하였다. 측정시스템의 측정속도는 측정데이타를 저장하지 않는 경우 최대 초당 4500회이며, 센서의 응답속도는 ~1 ms로 추정된다. 압력센서와 온도센서의 특성은 이론적 추정치와 비교하여 각각 +13.7%,-18%의 차이를 보였으며, 반복실험을 통하여 선형화한 후의 선형화 오차는 1%이내, 온도의 변화가 $<0.1>^{\circ}C$이내 일 때 수위측정의 오차는 $\pm$0.3cm이며, 수위측정에 대한 시스템 잡음은 측정하지 않았다. 온도센서의 시스템 잡음은 0.1$^{\circ}C$이내였으며, 이 시스템을 이용하여 수위 및 온도 변화량에 대한 고속 측정실험을 수행할 결과 예상된 결과를 얻을 수 있었다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 하계학술대회 논문집
• /
• pp.737-740
• /
• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500${\AA}$ and annealing condition(300$^{\circ}C$, 3 hr) in Ar-10 %N$_2$deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS.

• 한국정밀공학회지
• /
• 제31권7호
• /
• pp.561-567
• /
• 2014

Precision injection mold is an essential element in order to manufacture small and precision plastic lenses used for phone camera. There are many critical factors to meet the requested specifications of high quality plastic lenses. One of the main issues to realize high quality is minimizing decenter value, which becomes more critical as pixel numbers increases. This study suggests the method to minimize decenter value by modifying ejecting structure of the mold. Decenter value of injection-molded lens decreased to 1 ${\mu}m$ level from 5 ${\mu}m$ by applying suggested ejecting method. Also, we also developed BIS (Built-in Sensor) based smart mold system, which has pressure and temperature sensors inside of the mold. Pressure and temperature profiles from cavities are obtained and can be used for deduction of optimal injection molding condition, filling imbalance evaluation, status monitoring of injection molding and prediction of lens quality.

• 반도체디스플레이기술학회지
• /
• 제2권4호
• /
• pp.19-22
• /
• 2003

In this paper, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ammonium persulfate (AP) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-uniformity exists on the etched surface because of formation of hillocks on the <100> surface. With the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square diaphragms of 20$\mu\textrm{m}$ thickness and 100-400 $\mu\textrm{m}$ one-side length were fabricated successfully by adding AP of (5/6)g to 800 ml TMAH solution every 10 minutes.