• 제목/요약/키워드: High resolution transmission electron microscopy

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(ZnSe/FeSe) 초격자에 있어서 $Zn_{1-x}Fe_xSe$ 상호확산층의 미세구조 (Microstructure of Intermixed $Zn_{1-x}Fe_xSe$ Alloys in (ZnSe/FeSe) Superlattices)

  • 박경순
    • Applied Microscopy
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    • 제27권3호
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    • pp.235-241
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    • 1997
  • (001) GaAs 기판 위에 성장된 (ZnSe/FeSe) 초격자의 구성층 사이에 상호확산으로 형성된 $Zn_{1-x}Fe_xSe$ 의 미세구조가 고분해능 투과전자현미경과 컴퓨터 이미지 시뮬레이션에 의해 연구되었다. 컴퓨터 이미지 시뮬레이션은 multislice 방법으로 여러 시편 두께와 초점 거리에서 실시되었다. 컴퓨터 시뮬레이션에 의해 얻은 이미지는 실험에 의해 얻은 이미지와 비교되었다. 또한, CuAu-I 형태 규칙화가 $Zn_{1-x}Fe_xSe$ 상호화산층에서 일어났다. 이 CuAu-I 형태 규칙격자는 <100>과 <110> 방향에 따라서 ZnSe와 FeSe 층이 교대로 구성되어 있다.

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고분해능 전자현미경법을 이용한 (Bi, La)4Ti3O12 박막의 결정학적 특성 평가 (Crystallographic Characterization of the (Bi, La)4Ti3O12 Film by High-Resolution Electron Microscopy)

  • 이덕원;양준모;박태수;김남경;염승진;박주철;이순영;박성욱
    • 한국재료학회지
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    • 제13권7호
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    • pp.478-483
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    • 2003
  • The crystallographic characteristics of the $(Bi, La)_4$$Ti_3$$O_{12}$ thin film, which is considered as an applicable dielectrics in the ferroelectric RAM device due to a low crystallization temperature and a good fatigue property, were investigated at the atomic scale by high resolution transmission electron microscopy and the high resolution Z-contrast technique. The analysis showed that a (00c) preferred orientation and a crystallization of the film were enhanced with the diffraction intensity increase of the (006) and (008) plane as the annealing temperature increased. It indicated a change of the atomic arrangement in the (00c) plane. Stacking faults on the (00c) plane were also observed. Through the comparison of the high-resolution Z-contrast image and the $Bi_4$$Ti_3$$O_{12}$ atomic model, it was evaluated that the intensity of the Bi atom was different according to the atomic plane, and it was attributed to a substitution of La atom for Bi at the specific atom position.

금속 기판 위에 성장한 탄소나노튜브 특성에 관한 연구 (Growth of carbon nanotubes on metal substrates using microwave plasma-enhanced chemical vapor deposition)

  • 김현숙;박성렬;양지훈;문상현;박종윤;박래준
    • 한국진공학회지
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    • 제11권4호
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    • pp.256-260
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    • 2002
  • Carbon nanotubes on metal(SUS304) substrates were synthesized by using micro-wave plasma-enhanced chemical vapor deposition at $650^{\circ}C$ with gas mixture CH$_4$(11%) and H$_2$(89%). Their structure was investigated by scanning electron microscopy and transmission electron microscopy. Raman spectroscopy was also used to justify the structure and crystallinity of graphite sheets. High-resolution transmission electron microscopy images clearly showed carbon nanotubes to be multwalled. The measured turn-on field and current density obtained from I-V measurement were 4.4 V/$\mu \textrm{m}$ and $8.4\times10^1\mu\textrm{A}/\textrm{cm}^2$, respectively.

Atomic Resolution Scanning Transmission Electron Microscopy of Two-Dimensional Layered Transition Metal Dichalcogenides

  • Lu, Ning;Wang, Jinguo;Oviedo, uan Pablo;Lian, Guoda;Kim, Moon Jea
    • Applied Microscopy
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    • 제45권4호
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    • pp.225-229
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    • 2015
  • Transition metal dichalcogenides (TMDs) are a class of two-dimensional (2D) materials that have attracted growing interest because of their promising applications. The properties of TMDs strongly depend on the crystalline structure and the number and stacking sequence of layers in their crystals and thin films. Though electrical, mechanical, and magnetic studies of 2D materials are being conducted, there is an evident lack of direct atom-by-atom visualization, limiting insight on these highly exciting material systems. Herein, we present our recent studies on the characterization of 2D layered materials by means of aberration corrected scanning transmission electron microscopy (STEM), in particular via high angle annular dark field (HAADF) imaging. We have identified the atomic arrangements and defects in 2H stacked TMDs, 1T stacked TMDs, distorted 1T stacked TMDs, and vertically integrated heterojunctions of 2D TMDs crystals.

SOI 응용을 위한 반도체-원자 초격자 구조의 특성 (Characteristics of Semiconductor-Atomic Superlattice for SOI Applications)

  • 서용진;박성우;이경진;김기욱;박창준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.180-183
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    • 2003
  • The monolayer of oxygen atoms sandwitched between the adjacent nanocrystalline silicon layers was formed by ultra high vacuum-chemical vapor deposition (UHV-CVD). This multi-layer Si-O structure forms a new type of superlattice, semiconductor-atomic superattice (SAS). According to the experimental results, high-resolution cross-sectional transmission electron microscopy (HRTEM) shows epitaxial system. Also, the current-voltage (I-V) measurement results show the stable and good insulating behavior with high breakdown voltage. It is apparent that the system may form an epitaxially grown insulating layer as possible replacement of silicon-on-insulator (SOI), a scheme investigated as future generation of high efficient and high density CMOS on SOI.

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Chloroplasts morphology investigation with diverse microscopy approaches and inter-specific variation in Laurencia species (Rhodophyta)

  • Paradas, Wladimir Costa;Andrade, Leonardo Rodrigues;Salgado, Leonardo Tavares;Collado-Vides, Ligia;Pereira, Renato Crespo;Amado-Filho, Gilberto Menezes
    • ALGAE
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    • 제30권4호
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    • pp.291-301
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    • 2015
  • The present study described with different microscopy approaches chloroplasts lobes in Laurencia sensu latu (Rhodophyta) species and found inter-specific differences among them. Chloroplasts were investigated using confocal laser scanning microscopy (LSM), transmission electron microscopy (TEM) and high resolution scanning electron microscopy (HRSEM). Using and TEM and HRSEM images we distinguished chloroplasts with lobes than chloroplasts without lobes in Yuzurua poiteaui var. gemmifera (Harvey) M. J. Wynne and Laurencia dendroidea J. Agardh cortical cells. The LSM images showed chloroplasts lobes (CLs) with different morphologies, varying from thicker and longer undulated projections in Y. poiteaui var. and L. dendroidea to very small and thin tubules as in Laurencia translucida Fujii & Cordeiro-Marino. The diameter and length of CLs from Y. poiteaui var. and L. dendroidea were significantly higher than L. translucida CLs (p < 0.01). Based on LSM observations, we suggest that lobes morphology has a taxonomic validity only to characterize L. translucida species.

고에너지 P이온 주입한 실리콘에 형성된 격자 결함에 관한 고분해능 투과전자현미경 연구 (A High-Resolution Transmission Electron Microscopy Study on the Lattice Defects Formed in the High Energy P Ion Implanted Silicon)

  • 장기완;이정용;조남훈;노재상
    • 한국세라믹학회지
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    • 제32권12호
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    • pp.1377-1382
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    • 1995
  • A high-resolution transmission electron microscopy study on the lattice defects formed in the high energy P ion implanted silicon was carried out on an atomic level. Results show that Lomer dislocations, 60$^{\circ}$perfect dislocations, 60$^{\circ}$ dislocation dipole and extrinsic stacking fault formed in the near Rp of as-implanted specimen. In the annelaed specimens, interstitial Frank loops, 60$^{\circ}$perfect disolations, 60$^{\circ}$dislocation dipoles, stacking faults, precipitates, perfect dislocation loops and <112> rodlike defects existed exclusively near in the Rp with various annealing temperature and time. From these results, it is concluded that extended secondary defects as well as the point defect clusters could be formed without annealing. Even at low temperature annealing such as 55$0^{\circ}C$, small interstitial Frank loops could be formed and precipitates were also formed by $700^{\circ}C$ annealing. The defect band annealed at 100$0^{\circ}C$ for 1 hr could be divided into two regions depending on the distribution of the secondary defects.

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$Pb(Mg_{1/3}Nb_{2/3})O_3$ 고용체에서 고분해능 투과전자현미경을 이용한 구조 규칙화에 대한 연구 (High-resolution Transmission Electron Microscopy of Ordered Structure for Lead Magnesium Niobate Solid Solutions)

  • 박경순
    • Applied Microscopy
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    • 제27권1호
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    • pp.101-109
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    • 1997
  • La이 첨가되고 또한 첨가되지 않은 $Pb(Mg_{1/3}Nb_{2/3})O_3$ 고용체에서 Mg과 Nb의 비화학양론적인 구조 규칙화 현상이 고분해능 전자현미경과 컴퓨터 이미지 시뮬레이션에 의해 연구되었다. 고분해능 격자 이미지는 여러 이미지 형성 조건과 대물렌즈 구경에서 얻었다. 컴퓨터 이미지 시뮬레이션은 여러 시편 두께, 초점 거리, 장거리 규칙도에서 실시되었다. 규칙격자 구조를 가지는 영역의 격자 이미지는 장거리 규칙도에 크게 의존되는 것이 발견되었다. 규칙격자 구조를 가지는 영역에 있어서, 실험 격자 이미지와 컴퓨터 시뮬레이션 이미지의 비교로부터, 규칙격자 구조를 가지는 영역의 장거리 규칙도는 $0.2\sim0.7$의 간을 가지고 있는 것이 관찰되었다. 또한 규칙격자는 $(NH_4)_3FeF_6$ 결정구조를 가지고 있었다.

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MBE로 성장시킨 $GaAs/Al_{0.3}Ga_{0.7}A_{s}$층의 고분해능 투과전자현미경에 의한 연구 (A High-Resolution Transmission Electron Microscopy Study of MBE Grown $GaAs/Al_{0.3}Ga_{0.7}A_{s}$ Layers)

  • Lee, Jeong-Yong
    • 대한전자공학회논문지
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    • 제26권8호
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    • pp.1203-1210
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    • 1989
  • A cross-sectional transmission electorn microscopy study of the MBE grown GaAs/Al0.3 Ga0.7As layers was carried out at high-resolution so that the atomic arrangement of the well, barrier and the interface could be understood on an atomic level. Results show that the images reveal directly the atomic structure of the GaAs, Al0.3Ga0.3 Ga0.7 As interface is sharply defined but is not smooth on the atomic scale. The roughness arises from the presence of hills with heights of several{002} GaAs interplanar spacings. The atomic arrangement at the interface is almost completely coherent without any structural disorder. Alloy clustering at the interface was not observed.

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Al2O3 Coating and Filling of Carbon Nanotubes

  • Lee Jong-Soo;Min Byung-Don;Kim Sang-Sig
    • Transactions on Electrical and Electronic Materials
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    • 제4권4호
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    • pp.1-6
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    • 2003
  • Aluminum oxide ($Al_2O_3$) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). $Al_2O_3$ material was deposited on the MWNTs at a substrate temperature of $300^{\circ}C$ using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous $Al_2O_3$ material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.