• 한국정밀공학회지
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• 제29권6호
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• pp.640-647
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• 2012

Current electronic products are dominated by the laser processing and the application will be extended this time. Especially, demands for high precision laser processing with a large area has been increasing for a number of applications such as in solar cell battery, display parts, electronic component and automobile industry. In this paper we designed an on-the-fly system for ultrafast/high precision/large area laser processing. In addition, we have developed the path algorithm for large area. Expansion of the area in which laser processing is an important factor to handle the ultrafast/wide area processing, it will require a processing path. Processing path is path of 2- axis stage and stage of change in velocity can be smooth as possible. We proposed a path of the user concept using NURBS(Non-Uniform Rational B-Spline)method. Through our experiment with the chopper, was to prove the continuity of edge parts. Through basic shape experiments, we proved that large area can be processed using laser. We developed a simulation tool using Visual C++.

• 대한기계학회논문집A
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• 제22권2호
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Journal of Mechanical Science and Technology
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• 제19권12호
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• pp.2303-2311
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• 2005

Super low temperature has many applications nowadays, from the chemical processing, automotives manufacturing, plastic recycling, etc. Considering of its wide application in the present and the future, study of the super-low temperature refrigeration system should be actively carried out. Super low state temperature can be achieved by using multi-stage refrigeration system. This paper present the development and testing of cascade refrigerator system for achieving super-low temperature. On this experiment, two different types of HCFCs refrigerants are utilized, R-22 and R-23 were applied for the high stage and the low-pressure stage respectively. The lowest temperature in the low-pressure evaporator that can be achieved by this cascade refrigeration system is down to $-85^{\circ}C$. This experiment is aimed to study the effect of inlet pressure of the low-pressure stage evaporator and low-pressure stage compressors inlet pressure characteristics to the overall temperature characteristics of cascade refrigeration system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.902-907
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• 2004

In this paper, a multi-step optimization using a G.A. (Genetic Algorithm) with variable penalty function is introduced to the structural design optimization of a 5-head route machine. Our design procedure consist of two design optimization stage. The first stage of the design optimization is static design optimization. The following stage is dynamic design optimization stage. In the static optimization stage, the static compliance and weight of the structure are minimized simultaneously under some dimensional constraints and deflection limits. On the other hand, the dynamic compliance and the weight of the machine structure are minimized simultaneously in the dynamic design optimization stage. As the results, dynamic compliance of the 5-head router machine was decreased by about 37％ and the weight of the structure was decreased by 4.48％ respectively compared with the simplified structure model.

• 대한기계학회논문집A
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• 제25권11호
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• 한국산학기술학회논문지
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• 제20권4호
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• pp.35-42
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• 2019

현재 자동차 산업과 함께 발전하고 있는 전자제품을 포함하는 전반적인 제조업 분야에서 초정밀 제어를 요하는 너트 체결기가 요구되고 있고 너트 체결시의 중요한 성능 요소는 체결력 부족에 의한 풀림과 과도한 체결에 의한 파손 및 강한 진동이나 외부 충격에 강건한 체결력 유지 등 조립 품질의 유지와 향상 및 제품 수명 보장을 위해 정확한 조임 토크, 각도 등이 요구된다. 현재 너트런너라는 제품명으로 판매되는 너트 체결기는 고토크 및 정밀토크제어, 정밀 각도제어 그리고 생산량 증대를 위한 고속운전 등의 특성들이 필요하며 고출력이 가능한 BLDC모터 및 너트체결기 전용의 정교한 토크제어에 필요한 고정밀 토크제어드라이버와 고속, 저속, 고응답의 정밀 속도 제어시스템의 개발이 요청되고 있으나 현재 고객이 요구하는 고정밀, 고토크 및 고속 작업특성을 만족시키지 못하고 있다. 따라서 본 논문에서는 정확한 체결 토크 및 고속 회전에서도 저진동 및 저소음을 구현할 수 있는 d축, q축의 좌표변환에 의한 벡터제어와 토크제어기반의 BLDC모터 가변속 제어와 너트런너의 제어 기술을 제안하고 여러 실험을 통해 성능 결과를 분석하여 제안한 제어가 너트런너 성능을 만족하는지를 확인 하였다. 또한 일단 운전 체결 방식(One Stage 운전 체결 방식)으로 패턴을 프로그램하여 10,000[rpm] 고속 운전 후 목표 토크로 정확히 체결됨을 확인하였으며 토크 리플에 의한 가체결 토크 검출의 문제점도 외란관측기을 사용하여 해결하였고 실험을 통해 검증하였다.

• 한국정밀공학회지
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• 제22권12호
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1075-1079
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• 1995

It is difficult to machine microparts, such as microshaft and microholes, by conventional machining. Such micropart can be easily machined by EDM because it's machining force is very low. In micro-EDM, the precise electrode movement and discharge energy control are important. Therefore, high precision motion stage and EDM device with high performance is necessary. In this research, a new EDM machine was developed and microshaft and microhole, with various shape and size, was machined.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1514-1517
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• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.