• 한국정밀공학회지
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• 제26권6호
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• pp.106-113
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• 2009

A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.

• 한국정밀공학회지
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• 제27권3호
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.742-745
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• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• 제어로봇시스템학회논문지
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• 제19권1호
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• pp.10-14
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• 2013

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decision. Though ball-screw driven linear stages equipped linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decision if they have not equipped the accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a magnetic sensor as a home switch of ball-screw driven linear stage by using capacitance probe.

• 제어로봇시스템학회논문지
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• 제21권2호
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• pp.157-161
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• 2015

For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decisions. Though ball-screw driven linear stages equipped with encoders have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped accurate home sensors. High precision machining technology has become one of the most important aspects of the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. This study is performed to experimentally compare the repeatability for home position decisions in the case of photo sensors and hall sensors as a home switch of the ball-screw driven linear stage.

• 제어로봇시스템학회논문지
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• 제20권4호
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• pp.463-467
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• 2014

High precision machining technology has become one of the most important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though ball-screw driven linear stages equipped with linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a photo micro sensor as a home switch of a ball-screw driven linear stage by using a capacitance probe.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.615-616
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• 2007

• 한국정밀공학회지
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• 제19권12호
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of Mechanical Science and Technology
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• 제17권5호
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• pp.708-717
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• 2003

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.