• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.12
• /
• pp.125-131
• /
• 2008

In the past, precision optical glass lenses were produced through multiple processes such as grinding and polishing, but mass production of aspheric lenses requiring high accuracy and having complex profile was rather difficult. In such a background, the high-precision optical GMP processes were developed with an eye to mass production of precision optical glass parts by molding press. Generally because the forming stage in a GMP process is operated at high temperature above $570^{\circ}C$, thermal stresses and deformations are generated in the aspheric glass lens mold that is used in GMP process. Thermal stresses and deformations have negative influences on the quality of a glass lens and mold, especially the height of the deformed glass lens will be different from the height of designed glass lens. To prevent the problems of a glass lens mold and the glass lens, it is very important that the thermal stresses and deformations of a glass lens mold at high forming temperature are considered at the glass molds design step. In this study as a fundamental study to develop the molds used in an aspheric glass lens fabrication, a heat transfer and a thermal stress analysis were carried out for the case of one cavity glass lens mold used in progressive GMP process. Finally using analysis results, it was predicted the height of thermally deformed guide ring and calculated the height of the guide ring to be modified, $64.5{\mu}m$. This result was referred to design the glass lens molds for GMP process in production field.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2004.05a
• /
• pp.237-242
• /
• 2004

In design stage of high precision manufacture/inspection FAB building, it is necessary to investigate the vibration allowable limits of high precision equipment and to study a structure dynamic characteristics of C/R and Sub-structure in order to provide a structure vibration environment to satisfy thess allowable limits. The aim of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next TFT LCD FAB through vibration measurement and analysis procedure, therefore, to provide a proper dynamic structure design for high precision manufacture/inspection work process, which satisfy thess allowable limits.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2006.05a
• /
• pp.266-270
• /
• 2006

Noise reduction the noise of a high precision multi-stage gearbox applied at the industrial robot is investigated by experiment such as the modal test and the signal analysis. The signal analysis performed with the waterfall plot representing the power spectrum as a function of the rotating speed. An eccentric load is installed at the gearbox in order to organize similar condition used in the industrial robot. Exciting sources are found out by the waterfall plot, and then the main factor to make the noise is distinguish. For the low-noise gearbox, the gear design parameter is modified and this gearbox is experimented in the same procedure. The results of the test show the noise level of gearbox reduced.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.4
• /
• pp.51-55
• /
• 2004

In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2004.05a
• /
• pp.195-201
• /
• 2004

In design stage of high precision manufacture/inspect ion FAB building, it is necessary to investigate the vibration allowable limits of high precision equipment and to study a structure dynamic characteristics of C/R and Sub-structure in order to provide a structure vibration environment to satisfy thess allowable limits. The aim of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next TFT LCD FAB through vibration measurement and analysis procedure, therefore, to provide a proper dynamic structure design for high precision manufacture/inspection work process, which satisfy thess allowable limits.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2002.02a
• /
• pp.274-284
• /
• 2002

Deep drawing process for rectangular drawn section is different with that for axisymmetric circular one. Therefore deep drawing process for rectangular drawn section requires several intermediate steps to generate the final configuration without any significant defect. In this study, finite element analysis for multi-stage deep drawing process for high precision rectangular cases is carried out especially for an extreme aspect ratio. The analysis is performed using rigid-plastic finite element method with an explicit time integration scheme of the commercial program, LS-DYNA3D. The sheet blank is modeled using eight-node continuum brick elements. The results of analysis show that the irregular contact condition between blank and die affects the occurrence of failure, and the difference of aspect ratio in the drawn section leads to non-uniform metal flow, which may cause failure. A series of experiments for multi-stage deep drawing process for the rectangular cases are conducted, and the deformation configuration and the thickness distribution of the drawn rectangular cases are investigated by comparing with the results of the numerical analysis. The numerical analysis with an explicit time integration scheme shows good agreement with the experimental observation.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.30 no.6 s.249
• /
• pp.622-630
• /
• 2006

This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the magnetic suspension stage adopting SR principle which can achieve high force density is proposed. The main operating principle and structure for achieving high resolution and long travel range are represented. The magnetic force analysis of each actuator, providing back data for dynamic modeling and controller design are carried out. By conducting basic experiments, the feasibility of the proposed system is shown. In addition the problems which should be improved and their solutions are represented.

• Journal of the Korean Society for Precision Engineering
• /
• v.32 no.5
• /
• pp.431-439
• /
• 2015

One of common challenges in designing modern production machines is realizing high speed motion without sacrificing accuracy. To address this challenge it is necessary to maximize the stiffness of the mechanical structure and the control system with consideration on the main disturbance input, cutting forces. This paper presents analysis technologies for realizing high stiffness in production machines. First, CAE analysis techniques to evaluate the dynamic stiffness of a machine structure and a new method to construct the physical machine model for servo controller simulations are demonstrated. Second, cutting forces generated in milling processes are analyzed to evaluate their effects on the mechatronics system. In the effort to investigate the interaction among the structure, controller, and process, a flexible multi-body dynamics simulation method is implemented on a magnetic bearing stage as an example. The presented technologies can provide better understandings on the mechatronics system and help realizing high stiffness production machines.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.17 no.3
• /
• pp.86-93
• /
• 2008

This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.29 no.3
• /
• pp.69-80
• /
• 2015

This paper is writing about developing magnet power supply. It is very important for power supply to obtain output current in high precision and high stability. As a switching noise and a power noise are the cause of disrupting the stability of output current, to remove these at the front end, low pass filter with 300Hz cutoff frequency is designed and placed. And also to minimize switching noise of the current into magnet and to stop abrupt fluctuations, output filter should be designed, when doing this, we design it by considering load has high value inductance. As power supply demands the stability of less than 5ppm, high precision 24bit(300nV/bit) analog digital converter is needed. As resolving power of 24bit(300nV/bit) analog digital converter is high, it is also very important to design the input stage of analog digital converter. To remove input noise, 4th order low pass filter is composed. Due to the limitation of clock, to minimize quantization error between 15bit DPWM and output of ADC having 24bit resolving power, ${\Sigma}-{\Delta}$ modulation is used and bit contracted DPWM is constituted. And before implementing, to maximize efficiency, simulink is used.