• Journal of the Korean institute of surface engineering
• /
• v.38 no.2
• /
• pp.73-78
• /
• 2005

A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a current monitor. At the time of ICP ignition, the most distinct impurity was OH emission (308.9 nm) which was dissociated from water molecules. For reactive deposition oxygen was added to Ar and the OH emission intensity was reduced abruptly When the discharge voltage was regulated by a PID controller from 240V(metallic mode) to 120V(oxide mode), the emission intensity from Mg (285.2 nm) changed proportionally to the discharge voltage, but the intensity of Ar I(811.6 nm) was constant. At 100V of discharge voltage, Mg sputtering was almost stopped. Emissions from Ar I(420.1 nm) and Mg I were dropped down to 1/10, but Ar I(811.6 nm) didn't change. And the emission from atomic oxygen (O I, 777.3 nm) was increased to 10 times. These results are compatible with those from QMS study.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.19 no.8
• /
• pp.2022-2029
• /
• 1995

The experiment was performed by using the condenser discharge ignition device in a constant volume combustion chamber for high pressure, equivalent to the TDC of spark ignition engine, which makes the forced turbulent field possible. The conclusions obtained under various initial pressures, initial temperatures, and turbulent conditions of the methanol-air mixture are as follows : As initial pressure, initial temperature of the mixture, and the ignition energy increase, the inflammability limit expands, but the lean inflammability limit decreases as turbulence intensity increases. Combustion duration is shorter in the case of the lower initial pressure, the higher initial temperature, an equivalence ratio of 1.1-1.2, and even though turbulence intensity increases up to optimum value. Maximum combustion pressure increases in turbulent ambience under the same mixture condition, only in the case each optimum turbulence intensity exists under every condition. As the turbulence intensity increases .tau.$_{10}$ proportion increases while the .tau.$_{pr}$ proportion decreases....

• Korean Journal of Materials Research
• /
• v.21 no.9
• /
• pp.509-514
• /
• 2011

In this study, optical emission spectroscopy was used to monitor the plasma produced during the RF magnetron sputtering of a $BaTiO_3$ target. The intensities of chemical species were measured by real time monitoring with various discharge parameters such as RF power, pressure, and discharge gas. The emission lines of elemental and ionized species from $BaTiO_3$ and Ti targets were analyzed to evaluate the film composition and the optimized growth conditions for $BaTiO_3$ films. The emissions from Ar(I, II), Ba(I, II) and Ti(I) were found during sputtering of the $BaTiO_3$ target in Ar atmosphere. With increasing RF power, all the line intensities increased because the electron density increased with increasing RF power. When the Ar pressure increased, the Ba(II) and Ti(I) line intensity increased, but the $Ar^+$ line intensity decreased with increasing pressure. This result shows that high pressure is of greater benefit for the ionization of Ba than for that of Ar. Oxygen depressed the intensity of the plasma more than Ar did. When the Ar/$O_2$ ratio decreased, the intensity of Ba decreased more sharply than that of Ti. This result indicates that the plasma composition strongly depends on the discharge gas atmosphere. When the oxygen increased, the Ba/Ti ratio and the thickness of the films decreased. The emission spectra showed consistent variation with applied power to the Ti target during co-sputtering of the $BaTiO_3$ and Ti targets. The co-sputtered films showed a Ba/Ti ratio of 1.05 to 0.73 with applied power to the Ti target. The films with different Ba/Ti ratios showed changes in grain size. Ti excess films annealed at $600^{\circ}C$ did not show the second phase such as $BaTi_2O_5$ and $TiO_2$.

• Journal of the Korea Safety Management & Science
• /
• v.10 no.2
• /
• pp.53-60
• /
• 2008

A test was conducted using two high density discharge lamps, the H2D and the structurally new H4D. They were tested for luminous illumination and luminous temperature in the day and night time. The test was conducted without crippling the performance of the H2D by adding a magnetic actuator, enabling it to move left to right, and up and down. By making these modifications we constructed a sample of the H4D. We compared the H2D and the H4D sample's luminous illumination and luminous temperature by using a photometer and a digital thermometer in the day and night time. We discovered that the H2D and H4D performed similarly from the data we gathered. Now we know the H4D has potential use and extensive research needs to be made to gather more detailed data.

• The Transactions of the Korean Institute of Electrical Engineers B
• /
• v.55 no.4
• /
• pp.231-237
• /
• 2006

This paper proposes an effective drive of high intensity discharge (HID) lamp ballast for cars. All control functions of the proposed ballast are implemented using a low-cost single chip microcontroller, PIC16C73 to optimize the total system size and to minimize cost through minimization of total component number. The proposed ballast generates high open-circuit voltage to ignite the lamp and is controlled to supply effectively the power required to shorten warm-up period after the breakdown. The DC-DC converter of the DC-AC converter part of the ballast utilizes the flyback converter topology that can minimize component number. Also, because to more minimize the ballast size, the transformer size must be minimized, for this, PWM (Pulse Width Modulation) pulses are generated with high frequency using the PWM module of the microcontroller. An analysis for this is explained, briefly. As if the operation of the lamp and ballast arrives at steady-state, then the ballast must AC-control the lamp, for this, the microcontroller utilizes the other PWM module. And the part related to the igniter is explained, briefly. It is shown through experimental results that the controller of the proposed ballast has good performance for the HID lamp for cars.

• Analytical Science and Technology
• /
• v.15 no.2
• /
• pp.108-114
• /
• 2002

The new system using a glow discharge atomic emission spectrometer for the direct analysis of solid samples has been developed and characterized. The system was consisted of new glow discharge cell improved previous gas-jet boosted nozzle and radio-frequency power supply. In the case of previous type glow discharge chamber, it had been fitted trace analysis of low alloy steel with low discharge power, because it was to decrease redeposition and increase sample weight loss. But it had a problem that plasma becomes unstale due to increased sample weight loss and redeposition resulting from the high discharge power. Because of being problem of previous glow discharge, it is impossible to analyze using high power. The modified gas-jet boosted glow discharge to solve this problem would improve to be less sample loss rate of modified nozzle than sample loss rate of previous nozzle on the equal discharge condition, and improve to increase stability of plasma. The effect of discharge parameters such as discharge pressure, gas flow rate and power on the sample loss rate, emission intensity has been studied to find optimum discharge conditions. The calibration curves of Fe were obtained with 3 low-alloy samples.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.13 no.3
• /
• pp.265-272
• /
• 2000

In this paper the corona discharge in SF$_{6}$ gas used as insulating material in lots o high voltage equipment, is simulated by finite element method with Flux-Corrected Transport(FCT) method. By application of proposed method the negative corona discharge characteristics in needle to plane electrode is analyzed with time step. For the accuracy of analysis the secondary electron emission by photon and ion are also considered as well as the accuracy of analysis the secondary electron emission by photon and ion are also considered as well as townsend first ionization and electron attachment. The calculated results show that the electric field intensity between anode and ion group is decreased as times go-by according to field distortion by those space charge. Accordingly the electron density is decreased strongly by the attatchment effect of SF6 gas so that the corona discharge becomes extinguished abruptly.y.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.11a
• /
• pp.517-518
• /
• 2008

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.06a
• /
• pp.521-522
• /
• 2006

In this paper, hybrid air-water discharges were used to develop an optimal condition for providing a high level of water decomposition for hydrogen yield. Electrical and optical phenomena accompanying the discharges were investigated along with feeding gases, flow rates, and point-to-plane electrode gap distance. The primary focus of this experiment was put on the optical emission of the near UV range, with the energy threshold sufficient for water dissociation and excitation. The $OH(A^{2+},'=0\;X^2,"=0$) band's optical emission intensity indicated the presence of plasma chemical reactions involving hydrogen formation. In the gaseous atmosphere saturated with water vapor the OH(A-X) band intensity was relatively high compared to the liquid and transient phases although the optical emission strongly depended on the flow rate and type of feeding gas. In the gaseous phase discharge phenomenon for Ar carrier gas transformed into a gliding arc via the flow rate growth. OH(A-X) band's intensity increased according to the flow rate or residence time of He feeding gas. Reciprocal tendency was acquired for $N_2$ and Ar carrier gases. The peak value of OH(A-X) intensity was observed in the proximity of the water surface, however in the cases of Ar and $N_2$ with 0.5 SLM flow rate peaks shifted to the region below the water surface. Rotational temperature ($T_{rot}$) was estimated to be in the range of 900-3600 K, according to the carrier gas and flow rate, which corresponds to the arc-like-streamer discharge.

• Applied Science and Convergence Technology
• /
• v.25 no.6
• /
• pp.108-115
• /
• 2016

Even if ion pumps are widely and mostly used in ultra-high vacuum (UHV) conditions, virtually every existing ion pump has its maximum pumping speed around 1E-6 mbar (1E-4 Pa). Discharge intensity in the ion pump Penning cell is defined as the current divided by pressure (I/P). This quantity reflects the rate of cathode bombardment by ions, which underlies all of the various pumping mechanisms that occur in ion pumps (chemisorption on sputtered material, ion burial, etc.), and therefore is an indication of pumping speed. A study has been performed to evaluate the influence of magnetic fields and cell dimensions on the ion pump discharge intensity and consequently on the pumping speed at different pressures. As a result, a combination of parameters has been developed in order to design and build an ion pump with the pumping speed peak shifted towards lower pressures. Experimental results with several different test set-ups are presented and a prototype of a new 200 l/s ion pump with the maximum pumping speed in the 1E-8 mbar (1E-6 Pa) is described. A model of the system has also been developed to provide a framework for understanding the experimental observations.