• 제목/요약/키워드: High Temperature Dielectric Properties

검색결과 494건 처리시간 0.029초

솔-젤법으로 제조한 PZT박막의 유전 및 전기적 특성 (Dielectric and electric properties of sol-gel derived PZT thin Films)

  • 홍권;김병호
    • E2M - 전기 전자와 첨단 소재
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    • 제9권3호
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    • pp.251-258
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    • 1996
  • Sol-Gel derived ferroelectric Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ thin films have been fabricated on Pt/Ti/ $SiO_{2}$/Si substrate. Two kinds of fast annealing methods, F-I (six times of intermediate and final annealing) and F-II(one final annealing after six times of intermediate annealing) were used for preparation of multi-coated PZT thin films. As the annealing temperature was increased, high capacitance could be obtained, for instance, 2700.angs.-thick PZT thin film annealed at 680.deg. C had a capacitance value of approximately 20nF at 1kHz. In addition, it is found that the dielectric constant is a function of the perovskite phase fraction. In case of F-I method, PZT thin film had a remanent polarization(Pr) of 8-15.mu.C/c $m^{2}$ and a coercive field( $E_{c}$) of 35-44kV/cm according to annealing temperature, whereas PZT film fabricated by F-II method had as high as 24-25.mu.C/c $m^{2}$ and 48-59kV/cm, respectively. As a result of measuring Curie temperature, PZT thin film had a range of 460-480.deg. C by F-I method and more or less higher range of 525-530.deg. C by F-II method, which implied that different microstructures could cause the different Curie temperature. Through I-V measurement, leakage current of PZT thin film fabricated by F-I and F-II methods was 64nA/c $m^{2}$ and 2.2.mu.A/c $m^{2}$ in the electric field of 100kV/cm, respectively.y.y.y.

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글로벌 배선 적용을 위한 UV 패턴성과 UV 경화성을 가진 폴리실록산 (Organic-inorganic Hybrid Dielectric with UV Patterning and UV Curing for Global Interconnect Applications)

  • 송창민;박해성;서한결;김사라은경
    • 마이크로전자및패키징학회지
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    • 제25권4호
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    • pp.1-7
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    • 2018
  • As the performance and density of IC (integrated circuit) devices increase, power and signal integrities in the global interconnects of advanced packaging technologies are becoming more difficult. Thus, the global interconnect technologies should be designed to accommodate increased input/output (I/O) counts, improved power grid network integrity, reduced RC delay, and improved electrical crosstalk stability. This requirement resulted in the fine-pitch interconnects with a low-k dielectric in 3D packaging or wafer level packaging structure. This paper reviews an organic-inorganic hybrid material as a potential dielectric candidate for the global interconnects. An organic-inorganic hybrid material called polysiloxane can provide spin process without high temperature curing, an excellent dielectric constant, and good mechanical properties.

Dielectric Properties in the Pb1-3x/2Lax[(Mg1/3Ta2/3)0.66Zr0.34]O3 Systems

  • Kim, Yeon Jung
    • Applied Science and Convergence Technology
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    • 제26권4호
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    • pp.70-73
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    • 2017
  • The dielectric constant and loss of poling/non-poling was measured in the $Pb_{1-3x/2}La_x[(Mg_{1/3}Ta_{2/3})_{0.66}Zr_{0.34}]O_3$ samples. The addition of $La^{3+}$ to the $Pb_{1-3x/2}La_x[(Mg_{1/3}Ta_{2/3})_{0.66}Zr_{0.34}]O_3$ did not cause a large change in grain size. But the addition of $La^{3+}$ did show transition temperature, which shifted toward low temperature in the $Pb[(Mg_{1/3}Ta_{2/3})Zr]O_3$ systems. In addition, the dielectric and pyroelectric properties (${\varepsilon}{\sim}20000$, $p{\sim}0.03C/m^2K$) of this system using $La^{3+}$ have been greatly improved. Pyroelectrics $Pb_{0.97}La_{0.02}(Mg_{1/3}Ta_{2/3})_{0.66}Zr_{0.34}]O_3$ system was found to have a relatively high ferroelectric FOMs ($F_V{\sim}0.035m^2/C$, $F_D{\sim}0.52{\times}10^{-4}Pa^{-1/2}$) at room temperature. Spontaneous polarization showed a value of $0.27{\sim}0.35C/m^2$ in the composition added to $La^{3+}$. The piezoelectric constant ($d_{33}=350{\sim}490pC/N$) and electromechanical coupling factor ($k_P=0.25{\sim}0.35$) are obtained in $Pb_{1-3x/2}La_x[(Mg_{1/3}Ta_{2/3})_{0.66}Zr_{0.34}]O_3$ compositions with $La^{3+}$ dopant.

Detecting and predicting the crude oil type inside composite pipes using ECS and ANN

  • Altabey, Wael A.
    • Structural Monitoring and Maintenance
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    • 제3권4호
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    • pp.377-393
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    • 2016
  • The present work develops an expert system for detecting and predicting the crude oil types and properties at normal temperature ${\theta}=25^{\circ}C$, by evaluating the dielectric properties of the fluid transfused inside glass fiber reinforced epoxy (GFRE) composite pipelines, by using electrical capacitance sensor (ECS) technique, then used the data measurements from ECS to predict the types of the other crude oil transfused inside the pipeline, by designing an efficient artificial neural network (ANN) architecture. The variation in the dielectric signatures are employed to design an electrical capacitance sensor (ECS) with high sensitivity to detect such problem. ECS consists of 12 electrodes mounted on the outer surface of the pipe. A finite element (FE) simulation model is developed to measure the capacitance values and node potential distribution of ECS electrodes by ANSYS and MATLAB, which are combined to simulate sensor characteristic. Radial Basis neural network (RBNN), structure is applied, trained and tested to predict the finite element (FE) results of crude oil types transfused inside (GFRE) pipe under room temperature using MATLAB neural network toolbox. The FE results are in excellent agreement with an RBNN results, thus validating the accuracy and reliability of the proposed technique.

PZT 특성에 미치는 부조물의 영향(II) (Effects of Impurity on Properties of PZT(II))

  • 임응극;정수진;유강수
    • 한국세라믹학회지
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    • 제20권3호
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    • pp.227-235
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    • 1983
  • The dielectric and piezoelectic properties in which $(Zr_{0.52} Ti_{0.48})^{+4}$ ions of $Pb(Zr_{0.52} Ti_{0.48})O_3$ are partially substituted for $W^{+6}$ ions were studied. $ZrTiO_4$ was made by coprecipitation. The specimens of disc shape were sintered respectively at 1180$^{\circ}$to 130$0^{\circ}C$ at an intervals of 2$0^{\circ}C$ for 1 hour. The optimum sintering temperature were found to be between 126$0^{\circ}C$ and 128$0^{\circ}C$. PZT solid solutions sintered had the tetragonal structure with c/a=1.025$\pm$0.005 and theoretical densities incre-ased from 8.02 to 8.17g/cm3 with increasing the amount of the partial substitution of $(Zr_{0.52} Ti_{0.48})^{+4}$ ion for $W^{+6}$ ion The grain size and curie temperature decreased with increasing the amount of $WO_3$ while the dielectric constant increased. When $(Zr_{0.52} Ti_{0.48})^{+4}$ ion was substituted for 1 mole% of $W{+6 ]$ion the planar coupling coefficient$(K_P)$ was as high as 0.58 But as the amount of $WO_3$ increased the mechanical quality factor(Qm) decreased considerably.

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The characteristics of MIS BST thin film capacitor

  • Park, Chi-Sun;Kim, In-Ki
    • 한국결정성장학회지
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    • 제11권1호
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    • pp.38-42
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    • 2001
  • Electric and dielectric(Ba,Sr)$TiO_3$[BST] thin films for emtal-Insulator-Semiconductor(MIS) capacitors have been studied. BST thin films wre deposted on p-Si(100) substrates bythe RF magnetron sputtering with tempratue range of 500~$600^{\circ}C$. The dielectric properties of MIS capacitors consisting of Al/BST/$SiO_2$/Si sandwich structure were evaluated ot redcue the leakage current density. The charge state densities of the MIS capacitors were determined by high frequency (1 MHz) C-V measurement. In order to reduce the leakage current in MIS capacitor, high quality $SiO_2$ layer was deposited on bare p-Si substrate. Depending on the oxygen pressure and substrate temperature both positive and negative polarities of effective oxide charge in the MIS capacitors were evaluated. It is considered that the density of electronic states, generated at the BST/$SiO_2$/p-Si interface due to the asymmetric structure within BST/$SiO_2$/Si structure, and the oxygen vacancy content has influence on the behavior of oxide charge.

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기계적 응력상태에서 절연지 및 케이블의 전기절연 특성 (The Characteristics of Electrical Breakdown of Dielectric Paper and Cable under mechanical stress)

  • 김영석;곽동순;김해종;김상현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 영호남 학술대회 논문집
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    • pp.3-6
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    • 2003
  • The electrical and mechanical properties of dielectric paper and cable at cryogenic temperature have been investigated to optimum insulating design of high-Tc superconducting(HTS) cable. From the results, Tensile strength of PPLP in liquid nitrogen was high more than that of air, but tensile strain could know that decrease sharply. According as tensile strength increases, the breakdown stress of PPLP in liquid nitrogen was decreased because PPLP was degradated. According as bending radius multiple is decrese, breakdown voltage decreased sharply. And bending radius multiple is thought that more than about 25 is suitable.

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솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조 (Preparation of Ferroelectric $Cr_3C_2$ Thin Film Using Sol-Gel Spin Coating Process)

  • 배호기;고태경
    • 한국세라믹학회지
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    • 제31권7호
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    • pp.795-803
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    • 1994
  • Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

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스퍼터링에 의한 펄스파워 캐패시터용 TiO2 박막의 제조 및 전기적특성 (Preparation and Electrical Properties of TiO2 Films Prepared by Sputtering for a Pulse Power Capacitor)

  • 박상식
    • 한국세라믹학회지
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    • 제49권6호
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    • pp.642-647
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    • 2012
  • $TiO_2$ thin films for a pulse power capacitor were deposited by RF magnetron sputtering. The effects of the deposition gas ratio and thickness on the crystallization and electrical properties of the $TiO_2$ films were investigated. The crystal structure of $TiO_2$ films deposited on Si substrates at room temperature changed to the anatase from the rutile phase with an increase in the oxygen partial pressure. Also, the crystallinity of the $TiO_2$ films was enhanced with an increase in the thickness of the films. However, $TiO_2$ films deposited on a PET substrate showed an amorphous structure, unlike those deposited on a Si substrate. An X-ray photoelectron spectroscopy(XPS) analysis revealed the formation of chemically stable $TiO_2$ films. The dielectric constant of the $TiO_2$ films as a function of the frequency was significantly changed with the thickness of the films. The films showed a dielectric constant of 100~110 at 1 kHz. However, the dissipation factors of the films were relatively high. Films with a thickness of about 1000nm showed a breakdown strength that exceeded 1000 kV/cm.

전력기기용 Nozzle의 전기적 특성 (Electrical Properties of Nozzle for Electrical Apparatus)

  • 박효열;강동필;안명상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 방전 플라즈마 유기절연재료 초전도 자성체연구회
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    • pp.7-10
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    • 2004
  • This paper presents the electrical properties of PTFE nozzle for a electrical apparatus. In the arcing environment in a electrical apparatus, radiation is considered to be the major energy transport mechanism from the arc to the wall. The fraction of the radiation power is emitted out of the arc and reaches the nozzle wall, causing ablation at the surface and in the depth of the wall. The energy concentration in the material leads to the depolymerization and eventually leads to the generation of decomposed gas as well as some isolated carbon particles. Adding some fillers into PTFE is expected to be efficient for improving the endurability against radiation. In this experiment, three kinds of fillers that have endurance in the high temperature environment were added into PTFE. Light reflectance of fillers was investigated. Dielectric constan and dissipation factor of PTFE composites were investigated. Dielectric constant and dissipation factor of the PTFE composites increased with increasing contents of the fillers.

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