• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.06a
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• pp.29-33
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• 2000

OKUMA Die/Mold manufacturing system provides high speed, high rigidity and heavy cutting in a compact machining center and CAD/CAM system.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.12
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• pp.125-131
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• 2008

In the past, precision optical glass lenses were produced through multiple processes such as grinding and polishing, but mass production of aspheric lenses requiring high accuracy and having complex profile was rather difficult. In such a background, the high-precision optical GMP processes were developed with an eye to mass production of precision optical glass parts by molding press. Generally because the forming stage in a GMP process is operated at high temperature above $570^{\circ}C$, thermal stresses and deformations are generated in the aspheric glass lens mold that is used in GMP process. Thermal stresses and deformations have negative influences on the quality of a glass lens and mold, especially the height of the deformed glass lens will be different from the height of designed glass lens. To prevent the problems of a glass lens mold and the glass lens, it is very important that the thermal stresses and deformations of a glass lens mold at high forming temperature are considered at the glass molds design step. In this study as a fundamental study to develop the molds used in an aspheric glass lens fabrication, a heat transfer and a thermal stress analysis were carried out for the case of one cavity glass lens mold used in progressive GMP process. Finally using analysis results, it was predicted the height of thermally deformed guide ring and calculated the height of the guide ring to be modified, $64.5{\mu}m$. This result was referred to design the glass lens molds for GMP process in production field.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.4
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• pp.55-61
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• 2012

Very important content in performance evaluation of machine tool is positioning accuracy and repeatability precision measurements of feed mechanism. A study analyses the measurement method and uncertainty factors by ISO-based test method. Reliable results can't be derived without the notion of measurement uncertainty. The reason is that the measured value includes a lot of uncertain factors. Finding the factor that affects the measurement of parameter is important for estimation of measurement precision. In this paper, the evaluation of uncertainty analysis about positioning accuracy and repeatability precision measurements of high precision feed mechanism is presented to evaluate the important factors of uncertainty.

• Journal of the Korean Society for Precision Engineering
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• v.8 no.3
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• pp.82-92
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• 1991

A study on the manufacturing of High Precision Linear Scalr using He-Ne Laser interference Of late, along with the advancement of precision machining technology, the requirement of super precision measurement increases as time goes on, and the accuracy of standard scale which is a basis of precision measurement has been cognized as a criterion of industrial development in a nationl. In this paper, we described on technology by which we could carve scale lines thru optical method under the condition of laboratory by using the coherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurement of length. Hence in this research in the case of setting scale interval to 20 ${\mu}m$, we employed super precision scale-carving device associated with Ar laser and acousto optic modulator in lieu of flashing lamp scale-carving device, and we obtained as experimental result superior linear scales carved within the accuracy of ${\pm}$0.3${\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.707-708
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.621-622
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.17-18
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1039-1040
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• 2011