• 전기전자학회논문지
• /
• 제20권1호
• /
• pp.61-67
• /
• 2016

본 논문에서는 중성자 방사선 측정을 위한 고속 고정밀 중성자 측정을 위한 하드웨어 설계방법을 제안한다. 제안된 고속 고정밀 중성자 측정 장치의 하드웨어 설계는 고성능 A/D 변환기를 사용하여 고정밀 고속의 아날로그 신호를 디지털 데이터로 변환할 수 있도록 구성된다. 중성자 센서를 사용하여 입사된 중성자 방사선 입자를 검출하고, 극저전류 정밀 측정 모듈을 통해 검출된 중성자 방사선을 보다 정밀하고 빠르게 측정하는 모듈을 설계한다. 고속 고정밀 중성자 측정을 위한 하드웨어 시스템은 중성자 센서부, 가변 고전압 발생부, 극저전류 정밀 측정부, 임베디드 시스템부, 디스플레이부 등으로 구성 된다. 중성자 센서부는 고밀도 폴리에틸렌을 통해 중성자 방사선을 검출하는 기능을 수행한다. 가변 고전압 발생부는 중성자 센서가 정상적으로 운영되기 위하여 발열 및 잡음 특성에 강인한 0 ~ 2KV 가변 고전압 발생장치의 기능을 수행한다. 극저전류 정밀 측정부는 중성자 센서에서 출력되는 고정밀 고속의 극저전류 신호를 고성능 A/D 변환기를 사용하여 정밀하고 빠르게 측정하고 아날로그 신호를 디지털 신호로 변환하는 기능을 수행한다. 임베디드 시스템부는 고속 고정밀 중성자 측정을 위한 중성자 방사선 측정 기능, 가변 고전압 발생장치 제어 기능, 유무선 통신 제어 기능, 저장 기능 등을 수행한다. 제안된 고속 고정밀 중성자 측정을 위한 하드웨어를 실험한 결과, 불확도, 중성자 측정 속도, 정확도, 중성자 측정 범위 등에서 기존의 장치보다 우수한 성능이 나타남을 확인할 수가 있다.

• 전력전자학회:학술대회논문집
• /
• 전력전자학회 1998년도 전력전자학술대회 논문집
• /
• pp.158-161
• /
• 1998

A precision high voltage generator for ion injection is implemented on HFZVS-PSCI (High Frequency Zero-Voltage-Switching Phase-Shift-Controlled Inverter). Some practical aspects of implementing precision high voltage generator with HFZVS-PSCI, such as a HFHV transformer, multiflier, and precision CR divider are discussed. The results show that the generator under the Phase-Shift-Controller has a fast dynamic response, low ripple voltage, and high accuracy.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 춘계학술대회 논문집
• /
• pp.663-667
• /
• 2000

The spindle unit is core parts in high precision machine tools. Diverse static and dynamic charateristics of spindle unit are needed for special purpose of machine tools. Specially, high damping ability may be very useful to high precision and high speed spindle unit. But commercial bearing system has very low damping value and high stiffness. In this paper, the combined bearing system with ball-hydrostatic bearing is suggested for high damping spindle unit. The suggested bearing system has 30% damping ability more than general ball bearing's. The average rotational accuracy of spindle with combined bearing in working speed is 24% better than with ball bearing. The unbalance rotating experiment in spindle show that rotating error with combined bearing is only half value of with ball bearing.

• 반도체디스플레이기술학회지
• /
• 제5권4호
• /
• pp.1-4
• /
• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.221-225
• /
• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 춘계학술대회 논문집
• /
• pp.617-620
• /
• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2002년도 ICCAS
• /
• pp.39.1-39
• /
• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2005년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
• /
• pp.43-45
• /
• 2005

A High precision position control technique is used in many kind of industry areas. Especially this is to be one of the important parts in the development of precision machines. To get high precision and long range, dual servo voice coil motor(VCM) has been designed and implemented. In this paper, as a simulation and experimental result, the developed dual servo VCM shows the applicable possibility for precision machine system.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.420-424
• /
• 1997

n the ballscrew slide system the ~najor problems in accomplishing the high-speed and high-precision are the friction between elements and the decrease of axial stiffness. Especially the friction on the guide have a bad effect on the precision of slidlng. Furthermore stick-slip occur when the low stiffness of slide system. The sticli-slip have a bad influence on the precision. In this research, the affection of stick-slip friction to the precision of the slide system is studied and the possible solution of the precision is proixjsed.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 추계학술대회 논문집
• /
• pp.178-178
• /
• 2009

High-density optical information storing equipment, which is using Blu-ray, is the next generation information storing equipment that has about form six times to thirty-five times capacities. and high-density optical information storing equipment uses high NA(Numerical Aperture) aspheric glass objective lens as optical pick-up equipment to record and recognize high-density date. Generally this objective lens is developed and produced through a way of GMP(Glass Molding Press) that uses molding core that is performde by Ultra precision grinding, but grinding performing that has high-accuracy is very difficult because objective lens form is high NA. In this research, we preformed Ultra precision turning, using single crystal diamond bite, about WC(Co 0.5%), sintering brittleness material that is used molding core's material for GMP. and we confirmed aspheric glass lens compression of deformities molding core's Ultra precision turning possibility by measuring surface roughness(Ra) and processing surface's condition.