• Title/Summary/Keyword: High Ozone Concentration

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Development of the Dielectric Barrier Discharge Plasma Generator for the Eco-friendly Cleaning Process of the Electronic Components (전자부품의 친환경 세정공정 적용을 위한 유전체장벽 방전 플라즈마 생성 장치 개발)

  • Son, Young-Su;Ham, Sang-Yong;Kim, Byung-In
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.10
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    • pp.1217-1223
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    • 2011
  • In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

Effects of Operating Parameters on Dissolved Ozone and Phenol Degradation in Ozone Contact Reactor (오존 접촉 반응기의 용존 오존 농도 및 페놀 분해에 미치는 운전변수의 영향)

  • Chung, Jae-Woo;Park, Jeong-Wook;Lee, Chun-Sik
    • Journal of Korean Society of Environmental Engineers
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    • v.32 no.3
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    • pp.241-247
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    • 2010
  • The Effects of operating parameters such as initial pH, gaseous ozone concentration, supplied gas flow rate on dissolved ozone concentration and phenol degradation in ozone contact reactor were investigated. Dissolved ozone concentrations were saturated to constant values after a certain ozone contact time. The saturation values were influenced by experimental parameters. Dissolved ozone concentration decreased with the increase of initial pH because the ozone is unstable in high pH regions. The gaseous ozone concentration in a constant gas supply affected the saturation concentration of dissolved ozone and the injection rate of gas with a constant ozone concentration determined the rate to reach dissolved ozone saturation. Effects of operating parameters on phenol degradation were closely related with those of parameters on dissolved ozone concentration. Phenol degradation was enhanced by the increase of initial pH, because the degradation of dissolved ozone gave birth to free radicals which have much higher reactivity with phenol. Increase of gaseous ozone concentration and gas flow rate promoted the phenol degradation through the generation of dissolved ozone which plays the role in phenol degradation. The injection of methanol deteriorated the phenol degradation through the scavenging effect on OH radicals.

Characteristics of near-surface ozone distribution

  • Kim, Yoo-Keun;Lee, Hwa-Woon;Kim, Jae-Hwan;Moon, Yun-Seob;Song, Sang-Keun
    • Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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    • v.4 no.3
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    • pp.127-137
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    • 2000
  • This study presents an analysis of the characteristics of vertical ozone distribution near the surface using ozonesonde data(l995 to 1998), plus surface ozone and meteorological data from the Pohang region. These features were examined in detail using three case studies. The first related to episodes of high surface ozone concentrations during the Spring season when the frontogenesis between the high and low pressure associated with the upper-level jet stream was found to be located near the surface. The second was a 5-day winter period(l3 -17 December, 1997) in the Pohang province when the hourly concentrations exceeded 90 ppb on several occasions owing to low-level jets(LLJs) induced by a nocturnal stable layer. Accordingly, this explains why the high surface ozone concentrations occurred at night as the ozone was transported across the zone by a strong wind speed( over 12.5 ms .1). The third case study was ozone enhancement due to photochemical reactions. In this case, the maximum concentration of ozone exceeded 60 ppb in the summer(23 -28 August, 1997). When an ozone peak appeared within the boundary layer, the occurrence frequency of a low-level jet due to the nocturnal stable layer was about 77%, similarly the occurrence frequency of a near-surface ozone peak relative to the appearance of an LLJ was about 76%. Accordingly, there is clearly a close correlation between the occurrence of LLJs and near-surface ozone peaks.

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A Study on the Characteristics of Antecedent Meteorologic Conditions on High Ozone Days in Busan (부산지역 고농도 오존일의 선행 기상 특성 연구)

  • Do, Woo-Gon;Jung, Woo-Sik
    • Journal of Environmental Science International
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    • v.24 no.8
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    • pp.993-1001
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    • 2015
  • Comparing to the other air pollutants like $SO_2$, CO, the number of exceedance of the ozone national ambient air quality standard(NAAQS) and the ozone warning increased recently in Busan. The purpose of this study is to find out the preliminary symptoms for high ozone days in Busan area. In order to find out the preliminary symptoms, the hourly ozone data at air quality monitoring stations and the hourly meterological parameters at Busan regional meteorological 2007 to 2013 were used for the analysis. Averaged daily max ozone concentration was the highest(0.055 ppm) at Noksan and Youngsuri in the ozone season from 2007 to 2013. The horizontal distributions of daily max. ozone including all stations in Busan at high ozone days(the day exceeding 0.1 ppm of ozone concentration at least one station) were classified from two to five clusters by hierarchial cluster analysis. The meteorological variables showing strong correlation with daily max. ozone were the daily mean dew point temperature, averaged total insolation, the daily mean relative humidity and the daily mean cloud amount. And the most frequent levels were $19-23^{\circ}C$ in dew point temperature, $21-24 MJ/m^2$ in total insolation on the day before, $2.6-3.0 MJ/m^2$ on the very day, 67-80% in relative humidity and 0-3 in cloud amount.

The Daily Ozone Concentrations at Gwanak and City Hall: Measurement Data between 1996 and 2000 (관악과 시청의 요일별 오존 농도 : 1996∼2000년 측정자료)

  • 김정화;김용표
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.5
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    • pp.611-619
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    • 2003
  • Characteristics of the ozone concentrations in Seoul were analyzed for the data between May and September from 1996 to 2000. Observation data from 27 stations in Seoul are used. Among the results from 27 stations, representative results from 2 stations (City hall and Gwanak representing downtown and background areas of Seoul, respectively) are presented. The 24-hour average ozone concentrations of Gwanak (28.6 ppb) are higher than City hall (14.9 ppb). The 24-hour average ozone concentrations on Sunday are higher than other days at both sites. During weekday, the 24-hour average ozone concentrations on Wednesday are higher than other days. Although the mean of the I-hour daily maximum ozone concentrations at Gwanak is higher than City hall, the . ozone concentrations above 95th percentile at City hall are higher than Gwanak. As a result, the number of days on which the 1 - hour ozone concentration exceeding 100 ppb and 120 ppb at Gwanak (17 and 3) are lower than City hall (29 and 9). To sum up, both sites are VOCs limited region and the mean ozone concentration in Gwanak is higher because of the lower N0$_2$ concentration. But high ozone cases occur more frequently in City hall when conditions are right.

High Concentration Ozone Generation Characteristics by Variation of Additional Gases and Flow Rates of Inlet Gas (입력가스의 유량변화와 첨가가스에 따른 고농도 오존발생특성)

  • 박승록;이대희
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.16 no.6
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    • pp.95-101
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    • 2002
  • There are many effective parameters to high concentration ozone generation. These parameters became very important elements should be considered before designing ozone generator. After designing, there are many peripheral parameters to greatly affect to high concentration ozone generation also. In this study, of many effective peripheral parameters on high concentration ozone generation, the effects of flow rate of inlet oxygen gas and some kinds of additional gases on ozone concentration were investigated As a result, when inlet oxygen gas was introduced at the range of 0.75[LPM]~2.00[LPM] the highest ozone concentration of 71145[ppm] was obtained at 1.25[LPM]. When the additional nitrogen gas was mixed to oxygen gas at the range of 0.0[vol%]~6.4[vol%] the highest ozone concentration of 73135[ppm] was obtained at 0.8[vol%] of nitrogen gas. This showed 3[%] increasing compared to the case of pure oxygen gas inlet. When the additional argon gas was mixed to oxygen gas at the range of 0.0[vol%]~6.4[vol%] the highest concentration of 67288[ppm]was obtained at 0.8[vol%]of argon gas. This is decreased value compared to that of introducing the pure oxygen.

Development of the DIW-$O_3$ Cleaning Technology Substituted for the Semiconductor Photoresist Strip Process using the SPM (SPM을 이용한 반도체 포토레지스트 제거 공정 대체를 위한 DIW-$O_3$ 방식 세정기술 개발)

  • Son, Yeong-Su;Ham, Sang-Yong
    • 연구논문집
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    • s.33
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    • pp.99-109
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

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The Effects of Discharge Gap Variation for Ozone Generation Characteristics (방전간극변화가 오존생성특성에 미치는 영향)

  • 이상근;전병준;박용권;박원주;이광식
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2001.11a
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    • pp.135-138
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    • 2001
  • Recently, ozone is utilized In various fields and its needs are expanding. therefore, so many ozone generation methods have been reported in the latest years, its main purpose Is to get the high ozone concentration and to improve the ozone yield. One of them is a plate-type ozone generator. In this paper, the plate-type ozone generator is piled up many folds(3 and 5 electrodes). Ozone concentration and yield were investigated in accordance with power, quantity of supplied gas and gap spacing of plate electrodes.

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Characteristics of Surface and Synoptic Meteorology During High-Ozone Episodes in the Greater Seoul Area (서울.수도권 지역 고농도 오존 사례의 지상 및 종관 기상 특성)

  • 오현선;김영성
    • Journal of Korean Society for Atmospheric Environment
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    • v.15 no.4
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    • pp.441-455
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    • 1999
  • Meteorological characteristics of three high-ozone episodes in the Greater Seoul Area, selected on the basis of morning-average wind direction and speed for the 1990~1997 period, were investigated. Three high-ozone episodes thus selected were seven days of July 3~9, 1992, nine days of July 21~29, 1994, and three days of August 22~24, 1994. Along with surface meteorological data from the Seoul Weather Station, surface and 850-hPa wind fields over the Northest Asia around the Korean Peninsula were used for the analysis. In the July 1992 episode, westerly winds were most frequent as a result of the influence of a high-pressure system in the west behind the trough. In contrast, in the July 1994 episode, easterly winds were most frequent due to the effect of a typhoon moving north from the south of Japan. Despite different prevailing wind directions in the two episodes, the peak ozone concentration of each episode always occurred when a sea-land breeze developed in association with weak synoptic forcing. The August 1994 episode, selected as being representative of calm conditions, was another typical example in which peak ozone concentration rose to 322 ppb under the well-developed sea-land breeze. All three high-ozone episodes were terminated by precipitation, and subsequent rises in ozone concentrations were also suppressed by a series of precipitation afterwards. In particular, two heavy rainfalls were the main reason why the August 1994 episode, with the highest and second-highest ozone concentrations during the 1990~1997 period, lasted for only a few days.

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Optical Fiber Atmospheric Ozone Monitor (광섬유 대기오존 모니터)

  • 정완영
    • Proceedings of the IEEK Conference
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    • 2002.06e
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    • pp.201-204
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    • 2002
  • A high accuracy ozone monitor using UV absorption method was developed for ambient ozone monitoring. The system was mainly composed of a high power pulsed xenon lamp as UV source, an optical spectrometer with a high sensitivity linear CCD array as UV detector and signal processing unit. The optical signal from the CCD array that provides unusually high response and excellent optical resolution for ozone concentration was converted to digital signal and the digital signal was displayed on screen using PC interface. The optical signal was propagated using optic fiber to reduce optical loss to increase the accuracy of the measuring system. This paper has been studied a interworking signalling protocol between two hybrid networks by analyzing Satellite B-ISDN architecture, DSS2 Layer 3 Signalling protocol, B-ISUP protocol, S-BISUP protocol stack and so on. Also in the paper, messages and primitives have been defined for B-ISDN's Connection Type, Ownership and each protocol in order to connect point-to-multipoint. The ozone sensing properties of the CCD ozone monitor was compared with those of the photo multiplier ozone monitor.

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