• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2003년도 춘계학술대회 논문집
• /
• pp.167-172
• /
• 2003

The machining method by using end-milling tool has been applying in machining structures of various shapes because of the availability. Recently, all kinds of industries based on the parts of micro shape are developing, and the demands of mechanical micro machining technology are Increasing suddenly to produce these parts. According to such changes, the technology of the micro end-milling machining is applying as one of the most important machining means. This research is to aim at developing machining technology for various micro structures using micro end-mill. This paper introduces micro mechanical machining system with ultra precision, and demonstrates methods manufacturing all sorts of parts and moldings for industry and examples of applicable machining by using micro end-milling tool of micro sizes from hundreds to tens in diameter.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.589-592
• /
• 2003

In the machining process of micros shape by using high-precision machining system and micro end-mill, it is important for machining characters of tools to be grasped in order to stably use tools of micro end-mill. In this study. we carried out an analytical experiment of basic machining features by using end-mill tools for the purpose of damage prevention and manufacture of high quality when the tools of micro end-mill are used. This experiment used a micro machining system with high precision and a variety of end-mill tools commercialized from tens to hundreds microns in diameter. To establish an optimal machining condition without tool damage, cutting force was analyzed according to the changes of tool diameter and cutting conditions such as cutting speed. feed rate, depth of cut. And an examination was performed for the shape and surface illumination of machining surface according to the changes of machining conditions. Based on these micro machining conditions, micro square pillar, cylinder shaft. thin wall with high aspect ratio, and micro 3-D structures such as micro gear and fan were manufactured.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
• /
• pp.477-481
• /
• 2002

This paper reports on the development of micro power system component under way at Seoul National University. The need of micro power system is explained and components of micro power system are described. The developments of hydrogen-air micro combustor, micro igniter based poly-silicon heater and micro thruster are described. To manufacture 3-D micro structure the process that manufactures high aspect ratio structures has been developed and optimized. Design, fabrication, and experiment processes are introduced and technical challenges in each phase are described.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2007년도 추계학술대회 논문집
• /
• pp.356-359
• /
• 2007

Continuing improvements in integrated circuit chip density and functionality have mostly contributed toward a very large-scale integrated circuit(VLSI) and display device. In order to test (pass or fail) all of the high integrated semiconductor chip and display device, fine pitch probes are used. Fine pitch probes are manufactured by electroforming process of a Ni alloy in an electrolytic bath. In this paper, we expect that the electric field in bath with the Finite Element Method and applying the FEM result. So, we can obtained the probes that have high aspect ratio of 10 : 1

• 반도체디스플레이기술학회지
• /
• 제20권3호
• /
• pp.167-171
• /
• 2021

The core-shell InGaN/GaN Multi Quantum Well-Nanowires (MQW-NWs) that were selectively grown on oxide templates with perfectly circular hole patterns were highly crystalline and were shaped as high-aspect-ratio pyramids with semi-polar facets, indicating hexagonal symmetry. The formation of the InGaN active layer was characterized at its various locations for two types of the substrates, one containing defect-free MQW-NWs with GQDs and the other containing MQW-NWs with defects by using HRTEM. The TEM of the defect-free NW showed a typical diode behavior, much larger than that of the NW with defects, resulting in stronger EL from the former device, which holds promise for the realization of high-performance nonpolar core-shell InGaN/GaN MQW-NW substrates. These results suggest that well-defined nonpolar InGaN/GaN MQW-NWs can be utilized for the realization of high-performance LEDs.

• 대한기계학회논문집B
• /
• 제30권12호
• /
• pp.1196-1202
• /
• 2006

A MEMS methanol reformer was fabricated and its performance was evaluated in the present study. Catalytic steam reforming of methanol was selected because the process had been widely applied in macro scale reformers. Conventional Cu/ZnO catalyst that was prepared by co-precipitation method to give the highest coating quality was used. The reactor structure was made by bonding three layers of glass wafers. The internal structure of the wafer was fabricated by the wet-etching process that resulted in a high aspect ratio. The internal surface of the reactor was coated by catalyst and individual wafers were fusion-bonded to form the reactor structure. The internal volume of the microfabricated reactor was $0.3cm^3$ and the reactor produced exhaust gas with hydrogen concentration at 73%. The production rate of hydrogen was 4.16 ml/hr that could generate power of 350 mW in a typical PEM fuel cell.

• 대한기계학회논문집B
• /
• 제39권4호
• /
• pp.301-307
• /
• 2015

MC-50 사이클로트론에서 방출되는 양성자 빔은 직경이 2-3 mm 의 가우시안 분포를 가진다. 이렇게 넓게 조사되는 양성자 빔은 작은 스팟과 정밀한 위치정밀도를 요구하는 반도체 식각, 마이크로 머시닝 등에는 사용될 수 없다. 본 연구에서는 좀 더 경제적인 대안으로 양성자 빔을 마이크로 홀에 통과시켜 수십 ${\mu}m$ 의 직경을 가지도록 조형하는 방법을 제시하였다. 양성자 빔의 조형을 위하여 평균 직경 $21{\mu}m$, 두께 9mm 의 세장비 428 의 마이크로 홀을 제작하였다. 마이크로 홀과 양성자 빔을 정밀하게 정렬하여 양성자 빔을 조형하였다. 이렇게 조형된 양성자 빔을 이용하여 수십 ${\mu}m$ 크기의 마이크로 구조물의 가공성 확인 실험을 실시하였다. 또한 GEANT4 를 이용한 전산모사를 이용하여 해석한 후, 실험결과와 비교하고 분석하였다. 본 연구를 통하여 MC-50 사이클로트론이 조형 장치와 함께 20 마이크론 대의 3 차원 구조물 제작을 위한 마이크로 공정기술에의 사용 가능성을 확인하였다.

• 한국공작기계학회논문집
• /
• 제13권6호
• /
• pp.119-126
• /
• 2004

The welding characteristics of Inconel 600 Alloy using a continuous wave Nd:YAG laser are experimentally investigated. The major process parameters studied in the present laser welding experiment were the positions of focus, laser power and travel speed of laser bean We measured the fusion zone size and its shape using an optical microscope for the observation of cross-sectional area. We performed two tests regarding the tension and the micro hardness for welding quality estimation. Then we measured residual stress in welds by electronic speckle pattern interferometry(ESPI). In conclusion the optimum butt welding process parameters were 0.5mm focus position, 1.6kW laser power, 1m/min travel speed and 5.5$\ell$/min assist gas discharge.

• 한국정밀공학회지
• /
• 제23권4호
• /
• pp.162-167
• /
• 2006

Hot embossing lithography(HEL) has the production advantage of comparatively few process step, simple operation, a relatively low cost for embossing tools(Si), and high replication accuracy for small features. In this paper, we considered the nano-molding characteristic according to molding parameters(temperature, pressure, times, etc) and induced a optimal molding condition using HEL. High precision nano-patter master with various shapes were designed and manufactured using the DRIE(Deep Reactive ion Etching), LPCVD(Low Pressure Chemical Vapor Deposition) and thermal oxidation process, and we investigated the molding characteristic of DVD and Blu-ray nickel stamp. We induced flow behaviors of polymer, rheology by shapes and sizes of the pattern through various molding experiments. Finally, with achieving nano-structure molding with high aspect ratio, we will secure a basic technology about the molding of large-area nano-pattern media.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2010년도 춘계학술발표대회
• /
• pp.31.1-31.1
• /
• 2010

Various ZnO nanostructures were synthesized and ZnO nanostructure-based self-assembled transistors were fabricated. Compared to spindle and flower like nanostructure, the ZnO nanorod (NR) structure showed much stronger gate controllability, and greatly enhanced device performance, demonstrating that this structural variation leads to significant differences of the nanostructure network-based device performance. Also, patterned dry transfer-printing technique that can generate monolayer-like percolating networks of ZnO NRs has been developed. The method exploits the contact area difference between NR-NR and NR-substrate, rather than elaborate tailoring of surface chemistry or energetic. The devices prepared by the transferring method exhibited on/off current ratio, and mobility of ${\sim}2.7{\times}10^4$ and ${\sim}1.03\;cm^2/V{\cdot}s$, respectively. Also, they exhibited showing lower off-current and stronger gate controllability due to defined-channel between electrodes and monolayer-like network channel configuration. With multilayer stacks of nanostructures on stamp, the monolayer-like printing can be repeated many times, possibly on large area substrate, due to self-regulating printing characteristics. The method may enable high-performance macroelectronics with materials that have high aspect ratio.