• Journal of the Korean Society for Precision Engineering
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• v.13 no.6
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• pp.128-135
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• 1996

This paper proposes a high precision measurement technique to obtain the height of gage block with a few millimeter height. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, in the second step, heterodyne laser interferometry is adopted to acquire the precision value. A new kind of phase detector is constructed in the low cost for the heterodyne interferometer and its linearity with ${\pm}1%$ is confirmed by experiment. Also measurement error factors due to enviroments are discussed and methodology to reduce such errors is proposed. Preliminary experiments are carried out for the gage blocks of as high as a few millimeter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.493-498
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• 1993

This paper proposes a high precision measurement technique to obtain the height of gage block. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, second, heterodyne laser interferometry is adopted to acquire the precision value. The experiment results show that accuract in the order of a few nanometer is achieved for the gage blacks of as high as a few millimeter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.1 s.94
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• pp.61-67
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• 1999

A laser Doppler vibrometer based on the laser heterodyne interferometry is employed to measure the vibration velocity of vibrating objects. In this paper, we propose a real time analog signal processor of a laser Doppler vibrometer to reduce the degradation of Doppler signals mainly caused by environmental noises. In the proposed real time signal processor of an laser Doppler vibrometer, a pre-processor and a logical motion direction detector are designed to reduce the detection errors of the object motion direction. Also, a noise detection and rejection circuit is designed to reject the unfiltered noises.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.216-219
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• 2005

In precision length measurements using optical interferometry based on homodyne or heterodyne principles, it is crucial to have frequency-stabilized monochromatic light sources. To the end, we investigate the possibility of utilizing the optical comb constituted by ultrashort femtosecond pulse lasers generated from a gain medium of titanium-doped aluminium oxide $(Ti:Al_2O_3)$. The optical comb is stabilized by locking to the caesium atomic clock, which allows all the modes of the comb to maintain an extremely high level of frequency stabilization to precision of one part in $10^{16}$. Then, high precision length measurements are realized by extracting a single or group of particularly wanted optical frequency components or by adopting a third-party light source locked to the comb. Required measurement system setup will be presented in detail along with experimental results.