• Proceedings of the IEEK Conference
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• 2001.06b
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• pp.197-200
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• 2001

Novel Enhanced Inductively Coupled Plasma is applied to etch $SiO_2$. Effect of $O_2$ or Ar addition to $C_{4}F_{8}$ gas is monitored by Optical Emission Spectroscopy and Quadrupole Mass Spectrometer. It is fund that Ar or $O_2$ dilution to $C_{4}F_{8}$ increases F emission intensity and decreases $CF_2$ intensity. However, the ac frequency to the Helmholtz coil decreases the F intensity and thus increases $CF_2$/F ratio. By adjusting the ac frequency, the optimum etch rate and PR to $SiO_2$ selectivity can be obtained in E-lCP.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.685-686
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• 2015

This paper describes design results of the measurement system to test the properties of broadband AC magnetic field sensors used in weapon system. This measurement system consists of 3-axis helmholtz coil, signal generator, signal amplifier, sensor data acquisition unit and measurement & analysis controller including the operating software. This system is able to measure various properties of AC magnetic field sensor such as sensitivity, linearity and dynamic response in the frequency of 1 Hz to 10 kHz. The performance of this system was verified by measuring and analyzing the property of a MAG 639, standard magnetic field sensor of bartington instruments, with this developed system.

• Journal of the Korean Magnetics Society
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• v.24 no.1
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• pp.22-27
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• 2014

North indicating azimuth angle sensors have been used in airplanes, ships traditionally and nowadays employed in smart phones. For the azimuth and roll angle measurement of the sensor, 3-axis acceleration sensor was added to the 3-axis magnetic field sensor. In this work, we have constructed a measuring system for the measurement of the magnetic field and the angle uncertainty of the magnetic field sensors. Measuring system could be useful not only in non-magnetic laboratory but also in normal laboratory, we constructed small size of 3-axis Helmholtz coils for the compensation environment magnetic field (Earth magnetic field and magnetic field from building) and the generation of magnetic field for the test of magnetic field sensor. The constructed measuring system could compensate environment magnetic field below 10 nT level and generate 3-dimensional magnetic field with magnitude uncertainty of 0.2 % and angle error of $0.2^{\circ}$ within the volume of ${\pm}30mm$ diameter at center of Helmholtz coils. For the conformation of developed measuring system, We tested commercially available 3-axis magnetometer and heading sensor.

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.4
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• pp.356-363
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• 2003

An eddy current testing system was developed for detection of flaws in the ferromagnetic steel tubes. Because the eddy current signals from the ferromagnetic steel tubes could be distorted easily due to an irregularity of magnetic permeability, magnetic saturation is required to suppress this variation of magnetic fields. A magnetic saturation probe with the Hemholtz coil was designed for the inspection of the steel tubes. The bandwidth pass filters were adapted to minimize the noise from the DC magnetization. When using the designed test probe, the flaw signals could be discriminated from the noise. The system was tested at the production line and showed a capability of detecting flaws, like a drilled hole of the diameter of 2.0mm at the moving speed of 1m/sec.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.39 no.3
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• pp.181-188
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• 2003

The objects of this study were to discuss the performance of its using magnetic compass and to do a trial manufacture of the apparatus generating artificial magnetic field of 3-axis type to assess the performance of compass using terrestrial magnetism in the various magnetic field. The results obtained were summarized as follows: The magnetic field of each axis showed the linearly increase in accordance with the increase of electrical current. Average range difference between measured and calculated values was 0.33∼1.93μT and there were no big difference. The magnitude and direction of magnetic field showed some change in the edge of Helmholtz coil, but it appeared to stabilize in the center. In the horizontal magnetic force of 0.30gauss and 0.40gauss, the measured and calculated values of the damping characteristic of magnetic compass showed a good agreement. However, the confidence level was low at the horizontal magnetic force of 0.50gauss.

• Journal of the Korean Magnetic Resonance Society
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• v.21 no.1
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• pp.7-12
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• 2017

The nuclear magnetic resonance (NMR) and atomic magnetic resonance (AMR) plays a fundamental role in achieving a high accuracy of magnetic field measurements. Magnetic field unit (T) was realized based on the shielded proton gyromagnetic ratio (${\gamma}^{\prime}_P$), helium-4 gyromagnetic ratio (${\gamma}_{4He}$) and related techniques. The magnetic field standard system has been disseminated by the NMR magnetometer and electromagnet, a Helmholtz coil system, and AMR magnetometer in the nonmagnetic laboratory. A magnetic field standard below 1 mT has been developed by using Cs and Cs- $^4He$ AMR with automatic compensation of an external magnetic field noise. The standards serve for the calibration of magnetometers and support the test of sensors and materials in the range from $5{\mu}T$ to 2.0 T with (1 to 50) ${\mu}T/T$ uncertainty (k=2).

• Journal of Bio-Environment Control
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• v.15 no.4
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• pp.412-416
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• 2006

A magnetic field oscillator was designed and made. The oscillator was installed around a water pipe and radiated into water which was provided for vegetables cultivation. The oscillator was made with a helmholtz coil and installed a magnetic field sensor inside. The class E amplifier circuit with frequency variance was also used. Hydroponic and soil cultural methods were used for cultivation of lettuce and chinese cabbage with magnetic field water and without. Vitamin C ingredients in the lettuce and chinese cabbage which were grown with magnetic field water were 2.8 times and 1.2 times higher than without the magnetic water. Moreover, the growth acceleration effect of vegetables was shown in lettuce cultivated with the magnetic field water.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.6
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• pp.154-159
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• 2010

In this paper, the magnetically shielded room for low magnetic field shielding is designed and measured by fabricated. The size of magnetically shielded room was 3.0[m](W)$\times$3.0[m](L)$\times$3.0[m](H) to enter the industrial measuring instruments and analyzed DC and AC shielding characteristics of magnetic materials with a high permeability and AC shielding characteristics by eddy current of conductive materials. As a results, shielded room dimensions were obtained. To verify the analysis results, magnetically shielded room is fabricated and the calculated results are compared with the measured results. The Measured results show good agreement with calculated results. According to measurements, 5 times of 0.1[Hz] and 86 times of 60[Hz] is achieved at low frequency. The fabricated shielding room can be used as the magnetically shielding room for low magnetic field shielding.

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
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• v.28 no.4
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• pp.264-273
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• 2002

Pulsed electromagnetic field (PEMF) was used first to induce osteogenesis in 1974. The appliance which was consisted of the Helmholtz coil configuration have used to osteogensis. The objective of this study was to determine whether PEMF, a frequency of 100 Hz and magnetic field strength of 38 gauss applied to the calvarial defect in rabbit, could affect the induction of osteogenesis and the healing of the graft bone. This field should not produce excitation of nerve or muscle and heating the tissue. To evaluate the effect of PEMF on osteogenesis, 16 rabbit under the same condition was divided into 8 experimental groups and 8 control groups. 10 mm calvarial bone defects were formed around sagittal suture. The defect of left side was left without graft while the defect of right side was grafted by bone harvested from left side. A pulsed electromagnetic field was applied for 8 hours per day. Each group was sacrificed after 1 week, 2 weeks, 4 weeks, 8 weeks. Microscopic specimens were obtained from the calvarial bone defects and surrounding tissue using Hematoxylin-Eosin staining method. The results were as follows. 1. In the group which pulsed electromagnetic field was applied, new bone formation filled up the defect was observed after 4 and 8 weeks effectively. 2. There are no difference in the healing period for the fusion between the bone and graft bone. According to the result, the PEMF with 38 Gauss, 100 Hz was very effective in the healing of bone defect and new bone formation. So The PEMF will be useful in clinical aspect for oseteogenesis.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.12
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• pp.270-276
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• 2013

We have been unwittingly exposed to magnetic field. Biological effects due to electromagnetic field exposure has been studied over the past several decades. There has been epidemiological studies and laboratory studies. In the case of laboratory studies, the effect has been observed through the cell stimulation of an artificial magnetic field. The used frequency and waveform are various in the cell experiment, but the intensity of the magnetic field is usually around 10G. Intensity of Earth's magnetic field is about 300-400mG. Although this intensity is not much higher than artificial magnetic field as 3-4% amplitude, we can't ignore the effect because every living thing on earth has already adapted for long time ago. In this study, we have designed and implemented the 3-axis magnetic field generation system in oder to remove the static magnetic field in the real-time and kept its intensity less than ${\pm}5mG({\pm}0.5uT)$ using 3-axis helmholtz coil.