• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.566-569
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• 2001

Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist(PR) and to bake coated PR in FAB process of semiconductor. It is necessary to guarantee the performance of Hot Plate(HP). Therefore, in this study designed and developed the reliability system of HP to measure and estimated thermal uniformity and flatness in temperature setting amplitude $0~250^{\circ}C$. We developed the techniques that measures and analyzes thermal uniformity using infrared thermal vision, and compensates measuring error of flatness using laser displacement sensor. For measuring flatness, we specially makes the measurement stage of 3 axes which adopts the precision encoder. The allowable error of measuring technique is less than thermal uniformity, $\pm 0.1^{\circ}C$ and flatness, $\pm 1mm$. It is expected that the developed system can measure from $\Phi$210(wafer 8") to $\Phi$356(wafer 12") and also can be used in performance test of the Cool Plate and industrial heater, etc.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.63-68
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• 2001

An experimental study was carried out to identify the various regimes of natural convective boiling and to determine the Critical Heat Flux(CHF) on a 70mm square surface which is inclined at $180^{\circ}$(upward), $90^{\circ}, \;45^{\circ}$. The heater block made of copper with cartridge heaters is submerged in a water tank with windows for visualization. As the heat flux increases from $100kW/m^2$ to $1.1MW/m^2$, the heat transfer regime migrates from the nucleate boiling to film boiling and results in a rapid heat up of the heater block. An explosive vapor generation on the heated surface, whose size and frequency are characterized by the heat flux, is visualized by using a digital camcorder with $512{\times}512$ pixel size at 30fps.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.134-140
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• 2021

This study investigates the flow efficiency and temperature based on flow path shape. Five models are designed to the no flow path, one flow path, two flow path, three flow path, add inlet flow path and add interior space gradient. Results show that two flow model(add inlet flow path and add interior space gradient), It was confirmed that model(add inlet flow path) is the optimal shape for coolant heat transfer, and model(add interior space gradient) is the optimal shape for coolant flow, demonstrates optimal design among the five models. The results of this study can be utilized to efficiently control the coolant flow through various types of flow paths.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.27 no.6
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• pp.68-74
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• 2013

Induction-heated system is innovative system which applied IH(Induction Heating) magnetic induction heating generated from induction-heated metallic package and high-frequency power circuit technique for thermal converse technique. In this occurs not burning, so that the working environment and deterioration of products can be improved. This technique is used high frequency inverter. By using high frequency inverter high frequency in the range of kHz can be made with conventional alternative current. In this contribution IGBT module is used for high frequency inverter. In this paper are discussed analysis of characteristics according to the each frequency and produced Flat plate induction heating system using 1.5kW-class half-bridge resonant inverter. In addition, operating characteristics of the system to changes in the distance between the coil and the heater, applications of system are also discussed.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2002.05a
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• pp.41-47
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• 2002

A model of simultaneous heat and mass transfer process in absorption of refrigerant vapor into a lithium bromide solution of water-cooled vertical plate absorber was developed. The model can predict temperature and concentration profiles as well as the absorption heat and mass fluxes, the total heat and mass transfer rates and the heat and mass transfer coefficients. Besides, the effect of operating condition on absorption mass flux has been investigated, with the result that the absorption mass flux is increased as the inlet cooling water temperature decreases, the system pressure increases and the inlet solution concentration increases. And among the effects of operating parameters on absorption mass flux, the effect of inlet solution concentration is dominant.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.4
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• pp.593-602
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• 2004

This paper is a study on the model of simultaneous heat and mass transfer process in the absorption of refrigerant vapor into a lithium bromide solution of water-cooled vertical plate absorber. The model can predict temperature and concentration profiles as well as the effect of Reynolds number on them. Also. the variations of the absorption heat and mass fluxes. and the heat and mass transfer coefficients have been investigated. The numerical result shows that the interface temperature and concentration decrease as film Reynolds number does. The absorption heat and mass fluxes, and the heat and mass transfer coefficients get their maximum values adjacent to the inlet solution. Analyses on a constant wall temperature condition have been also carried out to exam the reliability of the present numerical method by comparing to previous investigations.

• Journal of the Korean Solar Energy Society
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• v.33 no.6
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• pp.85-91
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• 2013

It is essential to reduce the amount of fossil fuel because facing with the natural problem such as a global warming. To achieve this goal, many of interests in the use of renewable energy is growing. Especially, as one of these renewable energy systems, a solar air heater invention has been conducted for enhancing the efficiency of solar air heater. According to this trend, scale-down sized experiment apparatus was constructed and performed for searching a proper fin and confirming the heat transfer performance by fin shape on constant heat condition to enhance efficiency of solar air heater. In this experiment, heat gain, convection heat transfer coefficient, number of transfer units, Nusselt number, Reynold's number, friction factor, performance factor were investigated in order to evaluate the thermal characteristics based on the real data obtained. By comparison with the each fin performance, a zigzag shape keeping a right angle to the plate had the highest value among them.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.28 no.8
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• pp.325-330
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• 2016

This study was conducted to develop a heating system for a fuel cell-driven electric vehicle. The system consists of a compressor, an expansion device and three heat exchangers. A conventional air source heat exchanger is used as primary heat exchanger of the system, and an additional water source heat exchanger is used as a pre-heater to supply heat to the upstream air of the primary heat exchanger. On the other hand, the third heat exchanger consists of a water-to-refrigerant heat exchanger. The heat source of the pre-heater and the water-refrigerant heat exchanger is the waste heat from the fuel cell's stack. In the experiment, the indoor and the outdoor air temperature were fixed, and the compressor speed, EEV opening and waste heat temperature were varied. The results indicate that the $COP_h$ of the proposed system is 3.01 when the system is operating at a 1,200 rpm compressor speed, 50% EEV opening, and $50^{\circ}C$ waste heat source temperature in air pre-heater operation. However, when the system uses a water-refrigerant heat exchanger, the $COP_h$ increases to up to 9.42 at the same compressor speed and waste heat source temperature with 75% EEV openings.

• Polymer(Korea)
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• v.27 no.2
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• pp.106-112
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• 2003

Poly(trimethylene terephthalate)(PTT) fibers were treated by passing on the plate heater to study the annealing effect on the change of morphological structure and physical properties. In the X-ray diffraction curves of PTT annealed, a sharp peak at 2$\theta$=15.6$^{\circ}$ appeared and the peak intensity became stronger with the increase of annealing temperature and time. This peak was based on the (010) plane of PTT crystals. The crystallinity determined by density measurement was also increased by annealing. With the increases of temperature and time, the dynamic viscoelastic behaviors were shown to be a large reduction in T(tan $\delta$$_{max}$). The birefringence and $T_g$ were also reduced, but the melting temperature was the same. These results mean that the molecular chains in armorphous region are transfered into the crystalline legion, making the remained chains relaxed during annealing at tensionless state.

• Journal of Power System Engineering
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• v.11 no.2
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• pp.20-25
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• 2007

The performance of air-to-air heat exchanger has been investigated with rotating porous plates newly developed in this study. With an equal interval of 18 mm, the rotating porous plates are installed inside the heat exchanger where the hot and cold airs enter at opposite ends. When flowing in opposite directions by the separating plate installed in the center of the rotating porous plates, the airs give and receive the heat each other. Dry bulb temperature is set by adjusting heat supply at heater. In order to measure the temperature distribution of the hot air side inside heat exchanger, the thermocouples are inserted between the plates. The first location of thermocouple is 10mm downstream from the inlet of heat exchanger, and succeeding ten locations are aligned at an equal interval of 18mm. From the experiment of air-to-air heat exchanger with the rotating porous plates, the heat transfer rate increased as both air flow rate and RPM of the rotating porous plate increased. It was found that the overall heat transfer coefficient increased with the increase in RPM of porous plate at the conditions of the same air flow rate.