• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2449-2452
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• 2007

Hot spots on thin wafers of IC packages are becoming important issues in thermal and electrical engineering fields. To investigate these hot spots, we developed a Diode Temperature Sensor Array (DTSA) that consists of an array of 32 ${\times}$32 diodes (1,024 diodes) in a 8 mm ${\times}$ 8 mm surface area. To know specifically the hot spot temperature which is affected by the chip thickness and a generated power, we made the DTSA chips, which have 21.5 ${\mu}m$, 31 ${\mu}m$, 42 ${\mu}m$, 100 ${\mu}m$, 200 ${\mu}m$, and 400 ${\mu}m$ thickness using the CMP process. And we conducted the experiment using various heater power conditions (0.2 W, 0.3 W, 0.4 W, 0.5 W). In order to validate experimental results, we performed a numerical simulation. Errors between experimental results and numerical data are less than 4%. Finally, we proposed a correlation for the hot spot temperature as a function of the generated power and the wafer thickness based on the results of the experiment. This correlation can give an easy estimate of the hot spot temperature for flip chip packaging when the wafer thickness and the generated power are given.

• 대한기계학회논문집B
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• 제21권1호
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• pp.15-23
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• 1997

An experimental investigation of two-dimensional steady natural convection cooling in a vertical open top cavity with conducting side walls of finite thickness is presented. The various heat-generating discrete heaters are located on one vertical wall of the cavity. When each heater dissipates different amount of power, the purpose of the work is to obtain the optimal array condition of the heaters. The four cases of non-uniform heating conditions are considered. The temperature fields in the cavity were visualized by the interferometer and local temperatures of the vertical wall were measured by thermocouples. The heaters were arranged in two configurations: flush-mounted on a vertical wall or protruding from the wall about 4.5 mm. The vertical wall was constructed out of copper or epoxy-resin sheet. Experiments have been conducted for air with constant Prandtl number(Pr=0.7), the aspect ratio of 4.6, 7.5, 9.5, power input in the range of 0.9 W ~ 4.2 W. For the enhancement of the cooling effectiveness, the upper and lower of vertical wall would give the better position for the heaters of higher heat flux.

• International Journal of Aeronautical and Space Sciences
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• 제17권4호
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• pp.526-534
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• 2016

A MEMS solid propellant thruster array shall be operated within an allowable range of operating temperatures to avoid ignition failure by incomplete combustion due to a time delay in ignition. The structural safety of the MEMS thruster array under severe on-orbit thermal conditions can also be guaranteed by a suitable thermal control. In this study, we propose a thermal control strategy to perform on-orbit verification of a MEMS thruster module, which is expected to be the primary payload of the STEP Cube Lab mission. The strategy involves, the use of micro-igniters as heaters and temperature sensors for active thermal control because an additional heater cannot be implemented in the current design. In addition, we made efforts to reduce the launch loads transmitted to the MEMS thruster module at the system level structural design. The effectiveness of the proposed thermo-mechanical design strategy has been demonstrated by numerical analysis.

• 센서학회지
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• 제5권6호
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• pp.51-59
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• 1996

실리콘기판과의 스트레스균형이 이루어진 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ 다이아프레임위에 백금 박막히터 및 Bi-Sb 열전대배열을 형성하여 히터에서 실리콘기판으로 전달되는 열량의 차단효과가 현저히 개선된 유체센서를 제작하였다. 백금 박막히터는 유전체 다이아프레임의 열차단 효과때문에 비선형 전류-전압 특성을 나타내었고, 이 히터의 저항온도계수는 약 $0.00378\;/^{\circ}C$였으며, 또한 Bi-Sb 열전대의 Seebeck계수는 약 $97\;{\mu}V/K$였다. 기체의 열전도도가 증가할수록 유체센서가 나타내는 열기전력은 감소하였으며, 히터온도가 증가하거나 히터와 열전대사이의 거리가 감소할수록 센서의 감도는 증가하였다. 히터전압을 약 2.5V로 하였을 때 유체센서의 $N_{2}$유량에 대한 감도는 약 $1.27\;mV{\cdot}(sccm)^{-1/2}$였고, 열응답시간은 약 0.13 초였다.

• 대한기계학회논문집B
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• 제29권5호
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• pp.633-642
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• 2005

Nucleate pool boiling experiments for R11 under a constant wall temperature condition were carried out. A microscale heater array was used for the heating and the measurement of high temporal and spatial resolution by the Wheatstone bridge circuit. Very sensitive heat flow rate data were obtained by the control for the surface condition with high time resolution. The measured heat flow rate shows a discernable peak at the initial growth stage and reaches an almost constant value. In the thermal growth region, bubble shows a growth proportional to $t^{\frac{1}{5}}$. The bubble growth behavior is analyzed with a dimensionless parameter to compare with the previous results in the same scale. As the wall superheat increases, the departure diameter and the departure time increase, and the waiting time decreases. But the asymptotic growth rate is not affected by the wall superheat change. The effect of the wall superheat is resolved into the suggested growth equation. Dimensionless parameters of time and bubble radius characterize the thermal growth behavior well, irrespective of wall condition. The comparison between the result of this study and the previous results shows a good agreement at the thermal growth region. The quantitative analysis for the heat transfer mechanism is conducted with the measured heat flow rate behavior and the bubble growth behavior. The required heat flow rate for the volume change of the observed bubble is about twice as much as the instantaneous heat flow rate supplied from the wall.

• 대한기계학회논문집B
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• 제29권5호
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• pp.643-652
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• 2005

Saturated nucleate pool boiling experiments for binary mixtures, which are consisted of refrigerant R11 and R113, were performed with constant wall temperature condition. Results for binary mixtures were also compared with pure fluids. A microscale heater array and Wheatstone bridge circuits were used to maintain the constant temperature of the heating surface and to obtain heat flow rate measurements with high temporal and spatial resolutions. Bubble growth images were captured using a high speed CCD camera synchronized with the heat flow rate measurements. The departure time for binary mixtures was longer than that for pure fluids, and binary mixtures had a higher onset of nucleate boiling (ONB) temperature than pure fluids. In the asymptotic growth region, the bubble growth rate was proportional to a value between $t^{\frac{1}{6}}$ and $t^{\frac{1}{4}}$. The bubble growth behavior was analyzed to permit comparisons with binary mixtures and pure fluids at the same scale using dimensionless parameters. There was no discernable difference in the bubble growth behavior between binary mixtures and pure fluids for a given ONB temperature. And the departure radius and time were well predicted within a ${\pm}30{\%}$ error. The minimum heat transfer coefficient of binary mixtures occurred near the maximum ${\mid}y-x{\mid}$ value, and the average required heat flux during bubble growth did not depend on the mass fraction of R11 as more volatile component in binary mixtures. Finally, the results showed that for binary mixtures, a higher ONB temperature had the greatest effect on reducing the heat transfer coefficient.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.593-596
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• 2004

We are developing a micro-solid propellant rocket array thruster for simple attitude control of a 10 kg class micro-spacecraft. The prototype has ø 0.8 mm solid propellant micro-rockets arrayed at a pitch of 1.2 mm on a 22 x 22 mm substrate. In previous studies, an impulse thrust of 4.6 x 10$^{-4}$ Ns was obtained in vacuum, but we found the problems of unacceptably low ignition success rate and incomplete combustion. This paper describes experiments to improve the ignition rate. In order to achieve this goal, we tried to solidify paste-like ignition aid (RK) on the ignition heaters with strong adhesion. To make the paste-like RK, isoamyl acetate was added to RK powder. We tested 9 rockets, but only 2 rockets were ignited with huge ignition energy. This is because the heat con-duction between the ignition heater and the RK was too low to ignite the RK, since dried RK had a lot of pores. Also, a large cavity was sometimes found just above the ignition heater.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권4호
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2007년도 하계학술대회 논문집
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• pp.55-57
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• 2007

A Power control and Distribution Unit (PCDU) plays roles of protection of battery against overcharge by active control of solar array generated power, distribution of unregulated electrical power via controlled outlets to bus and instrument units, distribution of regulated electrical power to selected bus and instrument units, and provision of status monitoring and telecommand interface allowing the system and ground operate the power system, evaluate its performance and initiate appropriate countermeasures in case of abnormal conditions. In this work, we perform the preliminary design of a PCDU for the small Low Earth Orbit (LEO) Satellite applications. The main constitutes of the PCDU are the battery interface module, solar array regulators with maximum power point tracking (MPPT) technology, heater power distribution modules, internal converter modules for regulated bus voltage generation, power distribution modules of unregulated and regulated primary bus, and instrument power distribution modules.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1233-1236
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• 2008

This study presents the fabrication process and display characteristics of a flexible organic polymer display device that consists of a thin substrate of Polyether Sulfone, a multilayer serpentine-type microheater array that is fabricated on the substrate, and a UV-sensitive polydiacetylene (PDA)-polyvinyl alcohol (PVA) composite film. A retention time of one second is achieved with cell sizes of $500{\mu}m$ and $700{\mu}m$ with cell-to-cell distances of $100{\mu}m$ and $200{\mu}m$, respectively.