• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2004.05a
• /
• pp.92-96
• /
• 2004

Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.258-261
• /
• 2001

In this paper, aging characteristics of silicone rubber used for outdoor insulation have been investigated with regards to salt fog condition and heat aging effect. We look over the change of properties of silicone rubber in salt fog chamber with average leakage current monitoring for observing the transformation of surface degradation properties of silicone rubber with different ATH(alumina trihydrate, Al$_2$O$_3$$.$3H$_2$O) filler contents. Surface resistivity, SEM(Scanning Electro Microscope) were measured.

• 한국연소학회:학술대회논문집
• /
• 2015.12a
• /
• pp.107-108
• /
• 2015

The acoustic optimization of a swirl coaxial jet injector mounted upstream a combustion chamber is investigated to tackle combustion instabilities. The least damped modes are extracted with the help of the dynamic mode decomposition (DMD). The sensitivity of the heat release perturbation to the velocity perturbation for the second longitudinal mode is investigated by combining the Crocco's equation and the inhomogeneous wave equation and computing the flame transfer function (FTF). DMD and FTF results agree in terms of the optimized injector length.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.11a
• /
• pp.376-379
• /
• 2003

In this paper, a novel processing technique for fabrication of high-temperature MEMS based on polymer-derived SiCN microstructures is described. PDMS molds are fabricated on SU-8 photoresist using standard UV-photolithographic processes. Liquid precursors are injected into the PDMS mold. And then, the resulting solid polymer structures are crosslinked under isostatic pressure, and pyrolyzed to form a ceramic capable of withstanding over $1500^{\circ}C$. These fabricated SiCN structures would be applied for high-temperature applications, such as heat exchanger and combustion chamber.

• Applied Science and Convergence Technology
• /
• v.25 no.3
• /
• pp.47-50
• /
• 2016

Low temperature test for half-wave resonator (HWR) cryomodule is performed at the superfluid helium temperature of 2 K. The effective temperature is defined for non-uniform temperature distribution. Helium leak detection techniques are introduced for cryogenic system. Experimental set up is shown to make the low temperature test for the HWR cryomodule. The cooldown procedure of the HWR cryomodule is shown from room temperature to 2 K. The cryomodules is precooled with liquid nitrogen and then liquid helium is supplied to the helium reservoirs and cavities. The pressure of cavity and chamber are monitored as a function of time. The vacuum pressure of the cryomodule is not increased at 2 K, which shows leak-tight in the superfluid helium environment. Static heat load is also measured for the cryomodule at 2.5 K.

• Journal of Mechanical Science and Technology
• /
• v.20 no.6
• /
• pp.905-913
• /
• 2006

The instability curve of a Rijke tube system was obtained accurately by following different paths of heat power and flow-rate for three regions and by defining its locus from the criterion based on the measured sound pressure levels. The unstable limits in the region of flow-rate lower than that at the minimal power are compared with previous data. To observe the effect of turbulence on the unstable limits, inflow turbulence was introduced by placing a bundle of circular cylinders upstream of the heating part ($50). The large-amplitude inflow fluctuation may delay the transition of the chamber acoustic mode to the unstable Bone even at a sufficient power.

• Proceedings of the SAREK Conference
• /
• 2006.06a
• /
• pp.927-932
• /
• 2006

A simulation and experimental study for energy flow dynamics of floor radiant heating system were performed. The study was done under both environmental chamber and a house with several rooms. The unsteady energy analysis method using equivalent R-C circuit and radiation heat transfer analysis of enclosure analysis method with simple structured rooms were used for computer simulation. Also, first order dynamics with time delay in analyzing the return water was considered. The results of temperature changes of the simulation study are good fit with the ones of experimental one.

• Korean Journal of Veterinary Research
• /
• v.63 no.2
• /
• pp.20.1-20.4
• /
• 2023

A 10-year-old, spayed female, Maltese dog presented with a 2-day history of severe left eye squint. Slit-lamp biomicroscopy showed a deep corneal defect stained into a doughnut shape together with hypopyon in the anterior chamber. Based on these results, a diagnosis of descemetocele and uveitis in the left eye was made. Deep keratotomy combined with a nictitating membrane flap effectively resolved the descemetocele without complications. The surgical procedures performed on this patient were easy and effective, and could be used as an alternative to graft surgery for descemetocele treatment.

• Journal of the Korean Society of Safety
• /
• v.33 no.2
• /
• pp.32-38
• /
• 2018

The sprinkler system is a basic fire extinguishing system widely used, but there is a lack of quantitative assessment of its performance. In this study, to evaluate the fire extinguishing performance of the sprinkler head according to the discharge coefficients, experiments were conducted. Experimental sprinkler heads were selected with heads having K50, K80 and K115 water discharge coefficients, and the fire source was assumed to be an indoor fire in Class A Model 1. As experimental results, the time required for the fire chamber to cool down to $200^{\circ}C$ was 26 seconds for the K115 head, 414 seconds for the K80 head, and 481 seconds for the K50 head, so the cooling time of the K115 head was decreased by 94.5% compared to K50 head. In the case of restoring the oxygen concentration to 15%, the K115 head did not decrease below the oxygen concentration of 15%, and the K80 head took 145 seconds and the K50 head took 484 seconds. The lowest oxygen concentration in the fire chamber was 16.1% for the K115 head, 14.33% for the K80 head, and 11.28% for the K50 head, indicating that the K115 head was superior to the K80 and K50 heads by 13.1% and 43.7%, respectively. As the experimental results show, there is big difference in the extinguishing performance depending on the discharge coefficients of the sprinkler head. Therefore, in designing the sprinkler system, the discharge coefficients of the sprinkler head should be selected considering the heat release rate at the installation site and the fire extinguishing characteristics of sprinkler head.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.8
• /
• pp.92-99
• /
• 2002

This work investigated the optimal condition for an uniform deposition growth rate in the vertical cylindric CVD chamber. Heat transfer, surface chemical reaction and mass diffusion in the flow field of CVD chamber h,id been computed using Fluent v5.3 code. A SIMPLE based finite Volume Method (FVM) was adopted to solve the fully elliptic equations for momentum, temperature and concentration of a chemical species. The numerical analysis results show good agreements with the measurements obtained by N. Yoshikawa. The results obtained by the numerical analysis showed that the film growth rate in the center of a susceptor is increasing, as the inner flow approaches to the forced convection. To the contrast, as it approaches to the natural convection, that in the outside of a susceptor is increasing. As the Reynolds number increases, the uniformity may not hold due to the larger temperature gradient at a susceptor surface. Therefore, when the temperature gradient on the surface of a susceptor is zero, the film growth rate becomes uniform on most surface.