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The Effect of Transfer Modality, Temperature, and Application Time on Gastrocnemius Muscle Activation in Healthy People (한냉과 온열의 적용 시간과 전달 방식이 장딴지근의 근 활성도에 미치는 영향)

  • Lee, Young-Sin;Bae, Sea-Hyun
    • Journal of the Korean Society of Physical Medicine
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    • v.12 no.2
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    • pp.1-8
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    • 2017
  • PURPOSE: The purpose of this study was investigate the changes of gastrocnemius (GCM) muscle activity by applying different hot and cold therapeutic modalities. METHODS: A total of 20 healthy subjects were enrolled into the study. We selected transfer modalities that are frequently used in clinical settings: conduction, radiation, and convection. We performed hot pack, ice pack, and infrared therapy for 10, 20, and 30 minutes. After each application, a break was taken between each day. In addition, we performed cryotherapy for 3 min (airflow rate = $-6{\sim}-20^{\circ}C$). We measured muscle activity changes in the GCM muscle. RESULTS: For the conduction method, muscle activity significantly increased after ice pack therapy for 10 min and 20 min but decreased after hot pack therapy for 10 min and 20 min. For the radiation method, muscle activity significantly decreased after infrared therapy for 10 min and 20 min. For the convection method, muscle activity significantly increased after cryotherapy for 3 min and 10 min. There were no differences in the change of muscle activity in the conduction and radiation transfer method using heat. However, there were differences in the change of muscle activity in the conduction and convection transfer method with cold application. CONCLUSION: For a reduction in muscle activity, regardless of the transfer type, thermal application for 20 min would be effective. For an increase in muscle activity, cold pack application or cryotherapy for 20 min would be effective. This study could contribute toward therapeutic modality application in changing muscle activity.

Study of BiJeung by 18 doctors - Study of II - (18인(人)의 비증(痺證) 논술(論述)에 대(對)한 연구(硏究) - 《비증전집(痺證專輯)》 에 대(對)한 연구(硏究) II -)

  • Sohn, Dong Woo;Oh, Min Suk
    • Journal of Haehwa Medicine
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    • v.9 no.1
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    • pp.595-646
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    • 2000
  • I. Introduction Bi(痺) means blocking. BiJeung is one kind of symptoms making muscles, bones and jonts feel pain, numbness or edema. For example it can be gout or SLE etc. says that Bi is combination of PungHanSeup. And many doctors said that BiJeung is caused by food, fatigue, sex, stress and change of weather. Therefore we must treat BiJeung by character of patients and characteristic of the disease. Many famous doctors studied medical science by their fathers or teachers. So the history of medical science is long. So I studied ${\ll}Bijeungjujip{\gg}$. II. Final Decision 1. JoGeumTak(趙金鐸) devided BiJeung into Pung, Han, Seup and EumHeo, HeulHeo, YangHeo, GanSinHeo by charcter or reaction of pain. And he use DaeJinGyoTang, GyegiGakYakJiMoTang, SamyoSan, etc. 2. JangPaeGyeu(張沛圭) focused on division of HanYeol(寒熱; coldness and heat) in spite of complexity of BiJeung. He also used insects for treatment. They are very useful for treatment of BiJeung because they can remove EoHyeol(瘀血). 3. SeolMaeng(薛盟) said that the actual cause of BiJeung is Seup. So he thought that BiJeung can be divided into PungSeup, SeupYeol, HanSeup. And he established 6 rules to treat BiJeung and he studied herbs. 4. JangGi(張琪) introduced 10 prescriptions and 10 rules to cure BiJeung. The 1st prescription is for OyeSa, 2nd for internal Yeol, 3rd for old BiJeung, 4th for Soothing muscles, 5th for HanSeup, 6th for regular BiJeung, 7th for functional disorder, 8th for YeolBi, 9th for joint pain and 10th for pain of lower limb. 5. GangSeYoung(江世英) used PungYeongTang(風靈湯) for the treatment of PungBi, OGyeHeukHoTang(烏桂黑虎湯) for HanBi, BangGiMokGwaTang(防己木瓜湯) for SeupBi, YeolBiTang(熱痺湯) for YeolBi, WoDaeRyeokTang(牛大力湯) for GiHei, HyeolPungGeunTang(血楓根湯) for HyeolHeo, ToJiRyongTang(土地龍湯) for the acute stage of SeupBi, OJoRyongTang(五爪龍湯) for the chronic stage of SeupBi, and so on. 6. ShiGeumMook(施今墨) devided BiJeung into four types. They are PungSeupYeol, PungHanSeup, GiHyeolSil(氣血實) and GiHyeolHeo(氣血虛). And he introduced the eight rules of the treatment(SanPun(散風), ChukHan(逐寒), GeoSeuP(, CheongYeol(淸熱), TongRak(通絡), HwalHyeol(活血), HaengGi(行氣), BoHeo(補虛)). 7. WangYiYou(王李儒) explained the acute athritis and said that it can be applicable to HaneBi(行痺). And he used GyeJiJakYakJiMoTang(桂枝芍蘂知母湯) for HanBi and YeolBiJinTongTang(熱痺鎭痛湯) for YeolBi. 8. JangJinYeo(章眞如) said that YeolBi is more common than HanBi. The sympthoms of YeolBi are severe pain, fever, dried tongue, insomnia, etc. And he devided YeolBi into SilYeol and HeoYeol. In case of SilYeol, he used GyeoJiTangHapBaekHoTang(桂枝湯合白虎湯) and in case of HeoYeol he used JaEumYangAekTang(滋陰養液湯). 9. SaHaeJu(謝海洲) introduced three important rules of treatment and four appropriate rules of treatment of BiJeung. 10. YouDoJu(劉渡舟) said that YeolBi is more common than HanBi. He used GaGamMokBanGiTang(加減木防已湯) for YeolBi, GyeJiJakYakJiMoTang or GyeJiBuJaTang(桂枝附子湯) for HanBi and WooHwangHwan(牛黃丸) for the joint pain. 11. GangYiSon(江爾遜) focused on the internal cause. The most important internal cause is JeongGiHeo(正氣虛). So he tried to treat BiJeung by means of balance of Gi and Hyeol. So he ususlly used ODuTang(烏頭湯) and SamHwangTang(三黃湯) for YeolBi, OJeokSan(五積散) for HanBi, SamBiTang(三痺湯) for the chronic BiJeung. 12. HoGeonHwa(胡建華) said that to distinguish YeolBi from Hanbi is very difficult. So he used GyeJiJakYakJiMoTang in case of mixture of HanBi and YeoBi. 13. PiBokGo(畢福高) said that the most common BiJeung is HanBi. He usually used acupuncture with medicine. He followed the theory of EumYongHwa(嚴用和)-he focused on SeonBoHuSa(先補後瀉). 14. ChoiMunBin(崔文彬) used GeoPungHwalHyeolTang(祛風活血湯) for HanBi, SanHanTongRakTang(散寒通絡湯) for TongBi(痛痺), LiSeupHwaRakTang(利濕和絡湯) for ChakBi(着痺), CheongYeolTongGyeolChukBiTang(淸熱通經逐痺湯) for YeolBi(熱痺) and GeoPungHwalHyeolTang(祛風活血湯) for PiBi(皮痺). 15. YouleokSeon(劉赤選) introduced the common principle for the treatment of BiJeung. He used HaePuneDeungTang(海風藤湯) for HaengBi(行痺), SinChakTang(腎着湯), DokHwalGiSaengTang(獨活寄生湯) for TongBi(痛痺), TongPungBang(痛風方) for ChakBi(着痺) and SangGiYiMiTangGaYeongYangGakTang(桑枝苡米湯加羚羊角骨) for YeolBi(熱痺). 16. LimHakHwa(林鶴和) said about TanTan(movement disorders or numbness) and devided TanTan into the acute stage and the chronic stage. He used acupuncture at the meridian spot like YeolGyeol(列缺), HapGok(合谷), etc. And he also used MaHwangBuJaSeSinTang(麻黃附子細辛湯) in case of the acute stage. In the chronic stage he used BangPungTang(防風湯). 17. JinBaekGeun(陳伯勤) liked to use three rules(HwaHyeol(活血), ChiDam(治痰), BoSin(補腎)) to treat BiJeung. He used JinTongSan(鎭痛散) for the purpose of HwalHyeol(活血), SoHwalRakDan(小活絡丹) for ChiDam(治痰) and DokHwalGiSaengTang(獨活寄生湯) for BoSin(補腎). 18. YimGyeHak(任繼學) focused on YangHyeolJoGi(養血調氣) if the stage of BiJeung is chronic. And in the chronic stage he insisted on not using GalHwal(羌活), DokHwal(獨活) and BangPung(防風).

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The Physiological Effects of Controlled Respiration on the Electroencephalogram (호흡유도(呼吸誘導)에 따른 전두부(前頭部) 뇌파(腦波)에 관한 연구(硏究))

  • Kim, Hye-Kyung;Shin, Sang-Hoon;Nam, Tong-Hyun;Park, Yong-Jae;Hong, In-Ki;Lee, Dong-Hoon;Lee, Sang-Chul;Park, Young-Bae
    • The Journal of the Society of Korean Medicine Diagnostics
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    • v.10 no.1
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    • pp.109-140
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    • 2006
  • Background: In practicing qigong, People must achieve three Points : adjust their Posture, control their breathing and have a peace of mind. That is, Cho-Sin [調身] , Cho-Sik [調息] , Cho-Sim [調心] . Slow respiration is the important pattern of respiration to improve the human health. However, unsuitable breathing training have been occurred to mental disorder such as insomnia, anorexia etc. So, we think that the breathing training to consider the individual variations are desired. Objectives: We performed this study to examine the physiological effects of controlled respiration on the normal range of frequency domain electroencephalogram(EEC) in healthy subjects Also, to study examine individual variations according to the physiological effects between controlled respiration and Han-Yeol [寒熱] , respiration period, gender and age-related groups on the EEC in healthy subjects. Methods: When the subjects controlled the time of breathing (inspiration and expiration time) consciously, compared with natural respiration, and that their physiological phenomena are measured by EEC. In this research we used breathing time as in a qigong training (The Six-Word Excise) and observed physiological phenomena of the controlled natural respiration period with the ratio of seven to three(longer inspiration) and three to seven(longer expiration) . We determined, heat-cold score by Han-Yeol [寒熱] questionnaire, average of natural respiration period, according to decade, EEC of 140 healthy subjects (14 to 68 years old; 38 males, 102 females) by means of alpha, beta spectral relative power. Results: 1) In Controlled respiration compared with the natural respiration, ${\alpha}\;I\;(Fp2)\;and\;{\beta}$ I (Fpl, Fp2, F3, F4) decreased on the EEC. 2) In controlled respiration compared with the natural respiration, ${\beta}$ I (Fpl, Fp2, F3, F4) increased with cold group, ${\alpha}/{\beta}$(F3) decreased with heat group, ${\alpha}$ I (Fp2)increased with cold group in longer inspiration. But by means of compound effects, ${\alpha}$ II(F3) increased with cold group in longer inspiration, the other side ${\alpha}$ I (F3) decreased with heat group in controlled respiration on the EEC. 3) In controlled respiration compared with the natural respiration, ${\alpha}$ I (Fp2) decreased with decreased-respiratory-rate(D.R.R.) group, ${\beta}$ I (Fpl, Fp2, F3, F4) increased with D.R.R. and D.R.R. groups, ${\alpha}/{\beta}$(F3) decreased with D.R.R. group. But by means of compound effects, in controlled respiration compared with the natural respiration, ${\alpha}/{\beta}$(F3) decreased with D.R.R. group on the EEG. 4) In controlled respiration compared with the natural respiration, ${\beta}$ I (Fpl, F3, F4) increased with female cup, ${\beta}$ I (Fp2) increased with male and female groups, ${\alpha}/{\beta}$(F3) decreased with male group. But by means of compound effects, in controlled respiration compared with the natural respiration, ${\alpha}$ I (Fp2) increased with female group on the EEC. 5) Compared with the natural respiration, in longer expiration ${\alpha}$ I (Fp2) increased in their forties group, in longer inspiration ${\alpha}$ I (Fp2) increased in their fifties group. But by means of compound effects, in controlled respiration compared with the natural respiration, ${\beta}$ I (Fpl) decreased in teens group on the EEG.

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In vitro and in vivo Effects of Extracts of Lentinus edodes on Tumor Growth in a Human Papillomavirus 16 Oncogenes-transformed Animal Tumor Model -Apoptosis-mediated Tumor Cell Growth Inhibition- (자궁경부암동물세포에서 표고버섯의 in vitro 및 in vivo 항암효과 -Apoptosis에 의한 종양세포주의 성장억제-)

  • Park, Jeong-Min;Lee, Sung-Hyun;Kim, Jung-Ok;Park, Hong-Ju;Park, Jae-Bok;Sin, Jeong-Im
    • Korean Journal of Food Science and Technology
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    • v.36 no.1
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    • pp.141-146
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    • 2004
  • Fungal products indirectly mediate anti-tumor effects in vitro and in vivo. To investigate whether Lentinus edodes might possess direct anti-tumor substance, L. edodes was extracted and tested on human papillomavirus (HPV) 16 oncogenes-associated animal tumor cells (TC-1) and in an animal tumor model. Only water extract displayed direct anti-proliferative effects in TC-1 tumor cells in vitro. This inhibition was dose-dependent, and inhibitory concentration ($IC_{50}$) was $800\;{\mu}g/mL$. Fungal extracts also showed growth inhibition to human cervical cancer cells (CaSki and HeLa) similarly to TC-1 tumor cells. When fungal extracts were added at a high dose (1.5 mg/mL), cell growth was inhibited within 6 hr following extract treatment. Cell growth inhibition was blocked by heat treatment, but not by low pH, which is indicative of heat sensitivity of this anti-proliferative substance. Cell growth suppression was mediated by apoptosis, as determined by Annexin V and propidium iodide staining. When challenged with TC-1 cells, direct intratumoral injection of fungal extracts resulted in some positive effect on tumor growth inhibition, as compared to oral delivery. Results suggest that heat labile substance of L. edodes suppresses growth of HPV oncogenes-associated tumor cells through apoptosis.

Boron Doping Method Using Fiber Laser Annealing of Uniformly Deposited Amorphous Silicon Layer for IBC Solar Cells (IBC형 태양전지를 위한 균일하게 증착된 비정질 실리콘 층의 광섬유 레이저를 이용한 붕소 도핑 방법)

  • Kim, Sung-Chul;Yoon, Ki-Chan;Kyung, Do-Hyun;Lee, Young-Seok;Kwon, Tae-Young;Jung, Woo-Won;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.456-456
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    • 2009
  • Boron doping on an n-type Si wafer is requisite process for IBC (Interdigitated Back Contact) solar cells. Fiber laser annealing is one of boron doping methods. For the boron doping, uniformly coated or deposited film is highly required. Plasma enhanced chemical vapor deposition (PECVD) method provides a uniform dopant film or layer which can facilitate doping. Because amorphous silicon layer absorption range for the wavelength of fiber laser does not match well for the direct annealing. In this study, to enhance thermal affection on the existing p-a-Si:H layer, a ${\mu}c$-Si:H intrinsic layer was deposited on the p-a-Si:H layer additionally by PECVD. To improve heat transfer rate to the amorphous silicon layer, and as heating both sides and protecting boron eliminating from the amorphous silicon layer. For p-a-Si:H layer with the ratio of $SiH_4$ : $B_2H_6$ : $H_2$ = 30 : 30 : 120, at $200^{\circ}C$, 50 W, 0.2 Torr for 30 minutes, and for ${\mu}c$-Si:H intrinsic layer, $SiH_4$ : $H_2$ = 10 : 300, at $200^{\circ}C$, 30 W, 0.5 Torr for 60 minutes, 2 cm $\times$ 2 cm size wafers were used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 20 ~ 27 % of power, 150 ~ 160 kHz, 20 ~ 50 mm/s of marking speed, and $10\;{\sim}\;50 {\mu}m$ spacing with continuous wave mode of scanner lens showed the correlation between lifetime and sheet resistance as $100\;{\Omega}/sq$ and $11.8\;{\mu}s$ vs. $17\;{\Omega}/sq$ and $8.2\;{\mu}s$. Comparing to the singly deposited p-a-Si:H layer case, the additional ${\mu}c$-Si:H layer for doping resulted in no trade-offs, but showed slight improvement of both lifetime and sheet resistance, however sheet resistance might be confined by the additional intrinsic layer. This might come from the ineffective crystallization of amorphous silicon layer. For the additional layer case, lifetime and sheet resistance were measured as $84.8\;{\Omega}/sq$ and $11.09\;{\mu}s$ vs. $79.8\;{\Omega}/sq$ and $11.93\;{\mu}s$. The co-existence of $n^+$layeronthesamesurfaceandeliminating the laser damage should be taken into account for an IBC solar cell structure. Heavily doped uniform boron layer by fiber laser brings not only basic and essential conditions for the beginning step of IBC solar cell fabrication processes, but also the controllable doping concentration and depth that can be established according to the deposition conditions of layers.

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NaBH4 Hydrolysis Reaction Using Co-P-B Catalyst Supported on FeCrAlloy (Co-P-B/FeCrAlloy 촉매를 이용한 NaBH4 가수분해 반응)

  • Hwang, Byungchan;Jo, Ara;Sin, Sukjae;Choi, Daeki;Nam, Sukwoo;Park, Kwonpil
    • Korean Chemical Engineering Research
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    • v.51 no.1
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    • pp.35-41
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    • 2013
  • Properties of $NaBH_4$ hydrolysis reaction using Co-P-B/FeCrAlloy catalyst and the catalyst durability were studied. Co-P-B/FeCrAlloy catalyst showed low activation energy such as 25.2 kJ/mol in 5 wt% $NaBH_4$ solution, which was similar that of noble metal catalyst. The activation energy increased as the $NaBH_4$ concentration increased. Formation of gel at high concentration of $NaBH_4$ seriously affected hydrogen evolution rate and the catalyst durability. The catalyst loss decreased as reaction temperature increased due to lower gel formation when the concentration of $NaBH_4$ was over 20 wt%. Considering hydrogen generation rate and durability of catalyst, the catalyst supported with FeCrAlloy heat-treated at $1,000^{\circ}C$ without ultra vibration during dipping and calcination after catalyst dipping was best catalyst. To use catalyst more than three times in 25 wt% $NaBH_4$ solution, it should be reacted at higher temperature than $60^{\circ}C$.

Development for the function of Wind wave Damage Estimation at the Western Coastal Zone based on Disaster Statistics (재해통계기반 서해 연안지역의 풍랑피해예측함수 개발)

  • Choo, Tai Ho;Kwak, Kil Sin;Ahn, Si Hyung;Yang, Da Un;Son, Jong Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.2
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    • pp.14-22
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    • 2017
  • The frequency and scale of natural disasters due to the abnormal climate phenomena caused by global warming have being increasing all over the world. Various natural disasters, such as typhoons, earthquakes, floods, heavy rain, drought, sweltering heat, wind waves, tsunamis and so on, can cause damage to human life. Especially, the damage caused by natural disasters such as the Earthquake of Japan, hurricane Katrina in the United States, typhoon Maemi and so on, have been enormous. At this stage, it is difficult to estimate the scale of damage due to (future) natural disasters and cope with them. However, if we could predict the scale of damage at the disaster response level, the damage could be reduced by responding to them promptly. In the present study, therefore, among the many types of natural disaster, we developed a function to estimate the damage due to wind waves caused by sea winds and waves. We collected the damage records from the Disaster Report ('91~'14) published by the Ministry of Public Safety and Security about wind waves and typhoons in the western coastal zone and, in order to reflect the inflation rate, we converted the amount of damage each year into the equivalent amount in 2014. Finally, the meteorological data, such as the wave height, wind speed, tide level, wave direction, wave period and so on, were collected from the KMA (Korea Meteorological Administration) and KHOA (Korea Hydrographic and Oceanographic Agency)'s web sites, for the periods when wind wave and typhoon damage occurred. After that, the function used to estimate the wind wave damage was developed by reflecting the regional characteristics for the 9 areas of the western coastal zone.

Infrared absorbance of the Au-black deposited under nitrogen gas-filled low vacuum condition (질소가스 분위기의 저진공으로 증착된 Au-black의 적외선 흡수도)

  • O, Gwang-Sik;Kim, Dong-Jin;Kim, Jin-Seop;Lee, Jeong-Hui;Lee, Yong-Hyeon;Lee, Jae-Sin;Han, Seok-Yong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.2
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    • pp.13-21
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    • 2000
  • Au-black for the application of the long wavelength infrared absorber has been prepared by evaporating Au under nitrogen gas-filled low vacuum condition. Characteristics of the deposited Au-black were carefully investigated through structural analysis, infrared absorbance measurement, and patterning of the layer, all of which are dependent on the deposition condition. High density of micro-cavity that trapped infrared were obtained, and infrared absorbance in the wavelength range from 3 $\mu\textrm{g}$ to 14 $\mu\textrm{g}$ was found to be about 90% when the Au-black layer was produced under the deposition condition of mass Per area of about 600 $\mu\textrm{g}$/cm$^{2}$ and chamber pressure of above 1 Torr. Photoresist lift-off process could be performed to pattern the Au-black, of which mass per area was below 900 $\mu\textrm{g}$/cm/ sup 2/. In view of absorbance, heat capacity, and pattern formation, the deposition condition of chamber pressure of about 1 Tow and mass per area of about 600$\mu\textrm{g}$/cm$^{2}$ was most adequate for preparing the Au-black as an infrared absorber.

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The Effect of Antioxidants Added Thermally Oxidized Oil on Serum and Tissue in Rats (항산화물 첨가 가열산화유가 흰쥐의 혈청과 조직에 미치는 영향)

  • Cho, Chung-Soon;Lee, In-Sil;Jeong, Seung-Tai;Seong, Wan-Je;Park, Hang-Sin
    • Journal of the Korean Applied Science and Technology
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    • v.6 no.1
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    • pp.41-49
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    • 1989
  • This study was carried out to study influence of antioxidants on serum and tissue of rats fed with thermally oxidized oil. The experimental animals used 30male rats of sprague-dawley weighting $150{\pm}25g$. They are divided into 5 groups and fed to experimental diets which are composed of 15% thermally oxidized oil in addition to ascorbic acid, Vitamin E, Ethylendintrioteraaceticacid(EDTA) and none added oxidized oil by heat and fresh soybean oil group. Thermally oxidized oil was prepared from the soybean oil by heating at $180^{\circ}C$ for 30 hours. After feeding for 4 weeks, the result are as follows; 1. Body weight gain were lower B diet group than A diet group. 2. Total cholesterol levels in serum of all experimental diet groups except B diet group were higher than that of A diet group. 3. HDL-cholesterol levels of all experimental diet groups except E diet group were lower than that of A diet group. 4. The activities of GOT, GPT in serum of all experimental diet groups except B diet group and D diet group were higher than that of A diet group. 5. Vitamin E levels in serum of E diet group were highest than that of all experimental diet groups, and Vitamin E levels in liver of A diet group were highest than that of all experimental diet groups. 6. Lipid peroxide in Serum were highest B diet group than that of all experimental diet groups and the other experimental diet group significantly lower than that of the A diet group. 7. Lipid peroxide in liver of all experimental diet group except E diet group were significantly higher than that A diet group and lipid peroxide in kidney of all experimental diet group except B diet group were lower than that of A diet group. Four these results, as Vitamin C, Vitamin E, and EDTA added diets have effect of thermally oil by antioxidants, it could be suggested that thermally soybean oil diet has required to add antioxidant because it has not sufficient Vitamin E for antioxidant and intake and overtake level of thermally soybean oil diet should be studied to go ahead.

The Characteristics of the Wafer Bonding between InP Wafers and $\textrm{Si}_3\textrm{N}_4$/InP (Direct Wafer Bonding법에 의한 InP 기판과 $\textrm{Si}_3\textrm{N}_4$/InP의 접합특성)

  • Kim, Seon-Un;Sin, Dong-Seok;Lee, Jeong-Yong;Choe, In-Hun
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.890-897
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    • 1998
  • The direct wafer bonding between n-InP(001) wafer and the ${Si}_3N_4$(200 nm) film grown on the InP wafer by PECVD method was investigated. The surface states of InP wafer and ${Si}_3N_4$/InP which strongly depend upon the direct wafer bonding strength between them when they are brought into contact, were characterized by the contact angle measurement technique and atomic force microscopy. When InP wafer was etched by $50{\%}$ HF, contact angle was $5^{\circ}$ and RMS roughness was $1.54{\AA}$. When ${Si}_3N_4$ was etched by ammonia solution, RMS roughness was $3.11{\AA}$. The considerable amount of initial bonding strength between InP wafer and ${Si}_3N_4$/InP was observed when the two wafer was contacted after the etching process by $50{\%}$ HF and ammonia solution respectively. The bonded specimen was heat treated in $H^2$ or $N^2$, ambient at the temperature of $580^{\circ}C$-$680^{\circ}C$ for lhr. The bonding state was confirmed by SAT(Scannig Acoustic Tomography). The bonding strength was measured by shear force measurement of ${Si}_3N_4$/InP to InP wafer increased up to the same level of PECVD interface. The direct wafer bonding interface and ${Si}_3N_4$/InP PECVD interface were chracterized by TEM and AES.

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