• Journal of the Korean Ceramic Society
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• v.48 no.2
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• pp.152-159
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• 2011

The green and hard machining characteristics of dental ceramics are of great interest to dental industry. The green bodies of TZP/$Al_2O_3$ composites were prepared by the cold isostatic pressing, and machined on the CNC lathe using PCD (polycrystalline diamond) insert under various machining conditions. With increasing nose radius of PCD insert, surface roughness initially increased due to increased cutting resistance, but decreased by the onset of sliding fracture. The lowest surface roughness was obtained at spindle speed of 1,300 rpm and lowest feed rate. Hard bodies were prepared by pressureless sintering the machined green bodies at several temperatures. The grinding test for sintered hard body was conducted using electroplated diamond bur with different grit sizes. During grinding, grain pull out in the composite was occurred due to thermal expansion mismatch between the alumina and zirconia. The strength of the composite decreased with alumina contents, due to increased surface roughness and high monoclinic phase transformed during grinding process. The final polished samples represented high strength by the elimination of a phase transformation layer.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.96-104
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• 2010

We suggest here a cost-effective replica fabrication method for transparent and hard molds for imprinting lithography such as NIL and S-FIL. The process starts with the use of a replica hard mold from a master, using a polymer copy as a carrier. The polymer copy as a carrier was treated by soluble process for forming anti-adhesion layer. Duplicated hard molds can eliminate direct contact between a hard master and a patterned polymer on a substrate and the generated contamination of a master during the imprinting process. The replica hard mold exhibits the glass-like properties introduced here, such as transparency and hardness, make it appropriate for nanoimprint lithography and step-and-flash imprint lithography.

• Journal of Mechanical Science and Technology
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• v.17 no.11
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• pp.1638-1649
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• 2003

A study is made on the characterization of damage tolerance by spherical indentation in hardly coated layer structure with modest elastic modulus mismatch. A hard silicon nitride is prepared for the coating material and silicon nitride with 5wt% of boron nitride composites for underlayer. Hot pressing to eliminate the effect of interface delamination during the fracture makes strong interfacial bonding. The elastic modulus mismatch between the layers is not only large enough to suppress the surface crack initiation from the coating layer but sufficiently small to prevent the initiation of radial crack from the interface. The strength degradation of the layer structure after sphere contact indentation does not significantly occur, while the degradation of silicon nitride-boron nitride composite is critical at a high load and high number of contacts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.10a
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• pp.215-222
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• 2007

Coating of Hot-dip galvannealed steel consists of various Fe-Zn intermetallic compounds. Since the coating is hard and there for is very brittle, the surface of steel sheet is easy to be ruptured during second manufacturing processing. This is called as powdering. In addition, forming equipment might be polluted with debris by powdering. Therefore, various research have been carried out to prohibit powdering fur improving the quality of GA steel. This paper carried out finite element analysis combined with damage model which simulate the failure of local layer of hot-dip galvannealed steel surface during v-bending test. Since the mechanical property of intermetallic compound was unknown exactly, we used the properties calculated from measurements. The specimen was divided into substrate, coating layer and interface layer. Local failure at coating layer or interface layer was simulated when elemental strain reached a prescribed strain.

• Journal of the Korean institute of surface engineering
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• v.31 no.5
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• pp.266-277
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• 1998

The effects of $H_2S$ gas ratio, temperature and time on the case depth, hardness, and sulfide and nitride formation on the surface of sulfnitrided SCM440 steel have been studied by micro-pulse plasma technique. The thickness of compound layer of sulfide and nitride increased with the increase of time, temperautre and $H_2S$ gas ratio. But surface hardness decreased with the increase of soft sulfide layer because the hard nitride layer formed beneath the sulfide. The thickness of sulfide layer was about 10$\mu\textrm{m}$ abpve 0.0088% of $H_2S$ gas. The highest surface hardness of the compound layer was Hv835 at $530^{\circ}C$, 1hr and 0.06% of $H_2S$ gas. X-ray diffraction indicated that the surface products were $Fe_{1_x}S$, $Fe_{2.5}N$ and $Fe_4N$. It was confirmed by EPMA that sulfide only existed in the surface.

• Journal of Welding and Joining
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• v.11 no.2
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• pp.74-85
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• 1993

Effect of Si metal powders addition with the plasma transferred arc(PTA) overlaying process on characteristics of the alloyed layer in aluminum alloy(A5083) has been investigated. The overlaying conditions were 175-250A in plasma arc current, 500mm/min in travel speed, the 5-20g/min in powder feeding rate. Main results obtained are summarized as follows. 1)Sufficient size of molten pool on surface of base metal was required for forming an alloyed layer; in a fixed travel, the formation of alloyed layer with clear and beautiful surface depend upon the plasma arc current and powder feeding rate; the greater plasma arc current and the smaller powder feeding rate were, the better bead was formed. Optimum alloyed conditions by which an excellent alloyed bead obtained was 225A in plasma arc current. PTA process made it possible to form an alloyed layer with up to 67wt% Si. 2)Microstructure in the alloyed layer was in accord with prediction from the Al-Si phase diagram 3)The hardness of the alloyed layer increased in proportion to Si content. 4)As volume fraction of primary Si increased, the specific wearness of the alloyed layer was significantly improved. However, no further improvement was found when the volume fraction was greater than about 30%. 5)Utilizing the PTA process, a crack free alloyed layer with maximum hardness of about Hv 310 could be obtained.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.10 s.253
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• pp.1179-1186
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• 2006

This paper was designed to assess the adhesive properties of hard coatings on non-nitrided and nitrided various tool steels. Estimations of adhesion were done to scratch test which is mainly used in hard coating. The critical load$(L_c)$ between coating and substrate is defined through analysis of frictional load vs. normal load curve, signals of acoustic emission and optical observations. Coatings employed in this study are TiN, CrN and TiAlN, tools as substrates are STD11, STD61 and SKH51. It was classified to substrates with/without intermediate nitrided layer and hard coatings on substrate were deposited by arc PVD. Results showed that harder substrates and coatings give higher values of critical loads.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.393-397
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• 2003

Recently, rotating elements which use mechanical and electrical systems have been utilized for high speed and accuracy to increase the performance. The most important thing to get a more reliable system is to understand the friction, wear and characteristics which has an effect on various coated surfaces. In this study, the tribologicali characteristics of various soft/hard materials were investigated by using a custom-built pin-on-reciprocator tester From the experimental results, it was found that the friction coefficients of the soft material coated surfaces were lower under various normal loads due to trier self-lubricating ability and material transfer to the counter surface.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.186-189
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• 2005

This paper was designed to assess the adhesive properties of hard coatings on non-nitrided and nitrided various tool steels. Estimations of adhesion were done to scratch test which is mainly used in hard coating. The critical load(Lc) between coating and substrate is defined through analysis of frictional load vs. normal load curve, signals of acoustic emission and optical observations. Coatings employed in this study are TiN, CrN and TiAlN, tools as substrates are STD11, STD61 and SKH51. It was classified to substrates with/without nitrided layer and hard coatings on substrate were deposited by arc PVD. Results showed that harder substrates and coatings give higher values of critical loads.