• 한국세라믹학회지
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• 제33권4호
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• pp.379-384
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• 1996

The H2S sensing mechanism of CuO-SnO2 was confirmed by analyzing the electrical-resistance variation with temperature under an H2S atmosphere. While the resistance of CuO-SnO2 thick film at N2+H2S atmosphere was almost invariant with change in temperature it increased with increasing temperature for air +H2S atmos-phere. This behavior was analyzed using an equation derived from a basic assumption based on the H2S sensing mechanism proposed before. the experimental results are sufficiently explained with the equation derived which showed that the H2S sensing mechanism was reasonable. The equation also gave a detailed analysis and physical meaning to the behavior of the resistance variation with change in H2S concentration.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.359-359
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• 2011

This study reports the H2S gas sensing properties of CuO / ZnO nano-hetero structure bundle and the investigation of gas sensing mechanism. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and CuO / ZnO nano-heterostructures were prepared by photo chemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. In order to improve the H2S gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by photo-chemical deposition of CuO on the ZnO nanorods bundle. The furnace type gas sensing system was used to characterize sensing properties with diluted H2S gas (50 ppm) balanced air at various operating temperature up to 500$^{\circ}C$. The H2S gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. Photo-chemically fabricated CuO/ZnO heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with H2S gas.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Bulletin of the Korean Chemical Society
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• 제31권6호
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• pp.1573-1576
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• 2010

Bacillus subtilis PerR is a metal-dependent peroxide-sensing transcription factor which uses metal-catalyzed histidine oxidation for peroxide-sensing. PerR contains two metal binding sites, one for structural $Zn^{2+}$ and the other for the regulatory/peroxide-sensing metal. Here we investigated the effect of mutations at both the structural and regulatory metal binding sites on the oxidation of either H37 or H91, two of the peroxide-sensing ligands. All four serine substitution mutants at the structural $Zn^{2+}$ site (C96S, C99S, C136S and C139S) exhibited no detectable oxidation at histidine residues. Two of the alanine substitution mutants at regulatory metal site (H37A and D85A) exhibited selective oxidation preferentially at the H91-containing tryptic peptide, whereas no oxidation was detected in the other mutants (H91A, H93A and D104A). Our results suggest that the cysteine residues coordinating structural $Zn^{2+}$ are essential for peroxide sensing by PerR, and that the C-terminal regulatory metal binding site composed of H91, H93 and D104 can bind $Fe^{2+}$, providing a possible explanation for the peroxide sensing mechanisms by PerR.

• 한국재료학회지
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• 제6권7호
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• pp.716-722
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• 1996

박막 형 가스 센서의 막 두께가 가스 감지 특성에 미치는 영향을 단순화된 모델로부터 수식으로 유도하여 해석하였고, 그것을 ${SnO}_{2}$와 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과에 적용하였다. 유도된 수식으로부터 박막 가스 센서의 가스 감지 특성은 가스의 박막 안으로의 확산성에 크게 의존하며, 그 가스 확산성은 박막의 두께, 가스의 센서 재료의 반응성, 작동 온도 등에 의해서 결정됨을 알 수 있었다. 또한 이 수식은 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과와 비교적 잘 일치하였고, CuO-${SnO}_{2}$ 박막과 ${SnO}_{2}$ 박막의 서로 판이한 ${H}_{2}S$ 감응 특성에 대한 설명에 적용되었다. 이로부터, 일반적인 산화물 반도체식 가스 센서의 가스 감지 특성이 가스 확산성에 의해서 어떻게 지배되는가를 구체적으로 제안하였다.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.392-397
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• 2014

CuO nanotubes are synthesized using $TeO_2$ nanorod templates for application to $H_2S$ gas sensors. $TeO_2$ nanorod templates were synthesized by using the VS method through thermal evaporation. Scanning electron microscopy, transmission electron microscopy and X-ray diffraction showed that the synthesized nanotubes were monoclinic-structured polycrystalline CuO with diameter and wall thickness of approximately 100~300 nm and 5~10 nm, respectively. The CuO nanotube sensor showed responses of 136~325% for the $H_2S$ concentration of 0.1~5 ppm at room temperature. These response values are approximately twice as high as that of the CuO nanowire sensor for the same concentrations of $H_2S$ gas. Along with the investigation of the performance of the sensors, the mechanisms of $H_2S$ gas sensing of the CuO nanotubes are also discussed in this study.

• 센서학회지
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• 제33권2호
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• pp.105-111
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• 2024

In this study, the H₂S gas sensing characteristics were evaluated using surface-modified SnO₂ microparticles by tip sonication. The surface-modified SnO₂ microparticles were synthesized using the following sequential process. First, bare SnO₂ microparticles were synthesized via a hydrothermal method. Then, the surfaces of bare SnO₂ microparticles were modified with Ti nanoparticles during tip sonication. The sensing characteristics of SnO₂ microparticles modified with Ti were systematically investigated in the range of 100-300℃, compared with the bare SnO₂ microparticles. In this study, we discuss in detail the improved H₂S sensing characteristics of SnO₂ microparticles via Ti nanoparticle modification.

• 센서학회지
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• 제17권2호
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• pp.147-150
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• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

• 한국수소및신에너지학회논문집
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• 제8권4호
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• pp.145-154
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• 1997

Pd, Pd-Rh 게이트 MOS센서의 $H_2$, $H_2S$ 검지특성과 Pd박막의 중착조건이 감지특성에 미치는 영향에 대해서 조사하였다. rf power의 증가와 증착온도의 증가는 모두 센서의 감도와 초기반응속도를 감소시켰으며 rf power의 변화보다는 증착온도의 변화에 의한 효과가 현저하였다. Pd-Rh 센서의 경우 순수한 Pd 센서에 비해 감도가 낮았으며 Rh의 양이 증가할수록 감도는 감소하였다. Pd-Rh 센서에서 $H_2$가 $H_2S$보다 더 뛰어난 감도를 보여주었다. rf power, 증착온도, 기판의 변화가 MOS센서의 감도나 초기반응속도 등의 센서특성에 영향을 미친다는 사실을 확인할 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.250-251
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• 2014

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.